Section 3.4. Source Delivery Assembly And Flow Module - Veeco K465i GaN Operation And Maintenance

K465i Operations and Maintenance
Section 3.4.
The Source Delivery Assembly/SDA (for hydrides, alkyl bubbler networks, etc.):
collects gas

controls gas, and

injects gas into the reactor

The Source Delivery system includes:
Gas purifiers – Purity levels of the gases (hydrogen, nitrogen, ammonia) can affect

the quality of material grown in the reactor
Valves

- pneumatic valves (software-controlled), used to start, stop and switch gas
flow
- manual valves; used to stop or redirect gas flow or for isolation of leak
check ports
- needle valves, used for fine control of gas flow when no MFC is in use
Mass Flow Controllers – Used to regulate (control) the amount of gas flow in the

system, as set by a user, not to be used for maintenance isolation (Flow Control
System Overview shown below)
Pressure Controllers - used to regulate pressure in various portions of the system

Pressure Transducers and Gauges – Capacitance manometers are used to measure

pressure, and convenctron gauges and ion gauges are used to measure pressure in
the the HV portion of the system. The System N
Alkyl Bubblers control gas flow shown below (Idle, Vent and Run):

Copyright
Source Delivery Assembly and Flow Module
©
Veeco Instruments, Inc.
2012
All Rights Reserved
P/N 1212831 Rev C
flow is shown below.
2
Confidential
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