K465i Operations and Maintenance
P/N 1212831 Rev C
Figure 5-2. Chamber Maintenance Window
4. Ensure that all the power supplies are turned off – use the toggle switches located on the front of
the power supplies.
Figure 5-3. Toggle Switches on Power Supplies
Page 5-10
©
Veeco Instruments, Inc.
Confidential
Copyright
2012
All Rights Reserved