Figure 5-2. Chamber Maintenance Window; Figure 5-3. Toggle Switches On Power Supplies - Veeco K465i GaN Operation And Maintenance

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K465i Operations and Maintenance
P/N 1212831 Rev C

Figure 5-2. Chamber Maintenance Window

4. Ensure that all the power supplies are turned off – use the toggle switches located on the front of
the power supplies.

Figure 5-3. Toggle Switches on Power Supplies

Page 5-10
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Veeco Instruments, Inc.
Confidential
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2012
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