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DISCO DAD 2H/6T Troubleshooting Manual

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First Edition-October, 1984.
Revised-September, 1991. [8]
USING LINT-FREE PAPER
AUTOMATIC DICING SAW
DAD-2H/6T
DAD-2H/6TM
TROUBLESHOOTING GUIDE
This manual is solely for the use of employees of Disco Corporation,
its authorized representatives and users of the actual equipment. This
manual may not be reproduced in any from, or shown to third parties
without written permission from Disco Corporation.

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  • Page 1 First Edition-October, 1984. Revised-September, 1991. [8] This manual is solely for the use of employees of Disco Corporation, its authorized representatives and users of the actual equipment. This manual may not be reproduced in any from, or shown to third parties USING LINT-FREE PAPER without written permission from Disco Corporation.

  • Page 2: Table Of Contents

    CONTENTS INTRODUCTION page A. GENERAL Symbol letter ..............................A-1 B. CONSTRUCTION 1. Composition and Arrangement of Mechanical Equipment..............B-1 2. Composition and Arrangement of Electrical Equipment ................B-2 3. Pneumatic, Water Schematic Diagram ....................B-3 C. CIRCUIT DIAGRAM Block Diagram............................C-1 Machine Wiring Diagram (1/6) ........................C-2 Machine Wiring Diagram (2/6) (2H/6T 90°)....................C-3 Machine Wiring Diagram (3/6) (2H/6T 360°)....................C-4 Machine Wiring Diagram (4/6) (2H/6TM)....................C-5...
  • Page 3 (Not Assigned)............................C-25 (Not Assigned)............................C-26 (Not Assigned)............................C-27 (Not Assigned)............................C-28 (Not Assigned)............................C-29 (Not Assigned)............................C-30 X-axis Sensor P.C. Board .........................C-31 Y-axis Sensor P.C. Board .........................C-32 Z-axis Sensor P.C. Board .........................C-33 Touch Sensor P.C. Board .........................C-34 FP5 DC5 Circuit Diagram ........................C-35 Trans-Box for Domestic ...........................C-36 Trans-Box for Export..........................C-37 Control Box A (2H/6T) ..........................C-38 (Not Assigned)............................C-39...
  • Page 4 4. Setting-up Operation........................... E-11 5. Semi/Fully Auto Operation......................... E-15 6. Driver Control Circuit Board......................E-17 7. Driver..............................E-19 8. Inverter ............................... E-21 9. Self-diagnostics ..........................E-30 10. Inverter Alarm Resetting ........................E-35 F. ILLUSTRATIONS AND PARTS LIST Exploded View of Main Body (A) ......................F-1 Exploded View of Main Body (B)......................

  • Page 5: Introduction

    INTRODUCTION...
  • Page 6 PREFACE This manual describes the procedures to be performed in case of trouble with the DISCO DICING SAW DAD-2H/6T and DAD-2H/6TM. A lot of information is given herin, which will help you to make the machine operate at its best performance.

  • Page 7: General

    A. GENERAL...

  • Page 8: Symbol Letter

    Table for Symbol Letter Symbol letter Component Capacitor Connector Diode or Light Emitting Diode Fuse Bidirectional Thyristor Printed Circuit Board Choke Transformer Light Emitting Diode Transistor Resistor Rectifier Relay Triac Transformer Potentiometer 840920...

  • Page 9: Construction

    B.CONSTRUCTION...

  • Page 10: Composition And Arrangement Of Mechanical Equipment

    B. EQUIPMENT COMPOSITION AND SCHEMATIC DIAGRAM 1. Composition and Arrangement of Mechanical Equipment Fig. B-1 910110...

  • Page 11: Composition And Arrangement Of Electrical Equipment

    2. Composition and Arrangement of Electrical Equipment Fig. B-2 910810 910810...

  • Page 12: Pneumatic, Water Schematic Diagram

    3. Pneumatic, Water Schematic Diagram Fig. B-3 891110 891110...

  • Page 13: Circuit Diagram

    C.CIRCUIT DIAGRAM...
  • Page 14 CONTENTS Block Diagram............................C-1 Machine Wiring Diagram (1/6) ......................C-2 Machine Wiring Diagram (2/6)(2H/6T 90 ° ) ..................C-3 Machine Wiring Diagram (3/6)(2H/6T 360 ° ) ..................C-4 Machine Wiring Diagram (4/6)(2H/6TM)....................C-5 Machine Wiring Diagram (5/6) ......................C-6 Machine Wiring Diagram (6/6) ......................C-7 Control Unit Wiring Diagram.......................C-8 Control Unit Wiring Diagram.......................C-9 Control Unit Wiring Diagram......................C-10 DC Power Unit ...........................C-11...
  • Page 15 C-ii X-axis Sensor P.C. Board ........................C-31 Y-axis Sensor P.C. Board ........................C-32 Z-axis Sensor P.C. Board........................C-33 Touch Sensor P.C. Board........................C-34 FP5 DC5 Circuit Diagram ........................C-35 Trans-Box for Domestic ........................C-36 Trans-Box for Export..........................C-37 Control Box A (2H/6T) ........................C-38 (Not Assigned)............................C-39 Control Box A (2H/6TM) ........................C-40 Control Box B.............................C-41 Control Box C.............................C-42 Operation Panel ..........................C-43...

  • Page 19: Block Diagram

    EAUA--089800 Y-axis Sensor Board UA0898 EAUA--089600 Z-axis Sensor Board UA0896 EAUJ --292000 UA2920 Cable Unit (θ Axis Sensor) EAUA--327100 Touch Sensor Board UA3271 DISCO EAUA--003500 D1 Diode Board DISCO EAUM--388101 EMI SUPPRESSION UA3881 UNIT EAUG--100302 Dicer Trans-Box 2H/6T 360° EAUB--093905...
  • Page 27 Index No. Part No. Description Spec. No. Q'ty EAUB--093905 Control Box Unit DAD-2H/6T (90° Rotation) ANML-2015C03 Terminal Block ML-205-C-3P SATO APF4000 Fuse Holder F4000 SATO F2, F3 APG00001A250 Glass Fuse 250V 1A APG00005A250 Glass Fuse 250V 5A AT00XYA-500 Transformer YA-500 MELEC BNGF-2050 CR Filter...

  • Page 29: Control Unit Wiring Diagram

    Index No. Part No. Description Spec. No. Q'ty EAUB--093905 Control Box Unit DAD-2H/6T (90° , 360° Rotation) EGC2, 8 KAHIR048-009 Card-Edge Connector CR13-48D-2.17E HIROSE EGC1, 7 KAKEL044-010 Card-Edge Connector 1156-044-132 EAUB--085905 Control Box Unit DAD-2H/6TM (Ditto) (Ditto) Control Unit Wiring Diagram EE0065...

  • Page 31: Control Unit Wiring Diagram

    Index No. Part No. Description Spec. No. Q'ty EAUB--093905 Control Box Unit DAD-2H/6T (90° , 360° Rotation) EGC8, 10, 12 KAHIR048-009 Card-Edge Connector CR13-48D-2.17E HIROSE EGC9, 11, 13-16 KAKEL044-010 Card-Edge Connector 1156-044-132 KCELC056-038 Square Connector 00-8016-056-217-707 ELCO EAUB--085905 Control Box Unit DAD-2H/6TM (Ditto) (Ditto)

  • Page 43: X-Axis Sensor P.c. Board

    IL-10P-S3FP2 C1 - 4 CD103050-008 Film Capacitor TDY-103-050-K NICHICON D1 - 4 DA1S1588 Diode 1S1588 TOSHIBA R11, R14, R21, RA1/4W0220J Carbon Film Resistor 220ΩJ 1/4W PHILIPS R24, R31, R34, R41, R44 FAPCB-0178 Print Board UA0897 DISCO X-axis Sensor P.C.Board C-31...

  • Page 45: Y-Axis Sensor P.c. Board

    Transistor 2SC1815 TOSHIBA C1 - 3 CD103050-008 Film Capacitor TDY-103-050-K NICHICON D1 - D3 DA1S1588 Diode 1S1588 TOSHIBA R11, R14, R21, RA1/4W0220J Carbon Film Resistor 220ΩJ 1/4W PHILIPS R24, R31, R34 FAPCB-0179 Print Board UA0898 DISCO Y-axis Sensor P.C.Board C-32...

  • Page 47: Z-Axis Sensor P.c.board

    Carbon Film Resistor 220Ω 1/4W PHILIPS R2, R6 RA1/4W1.0KJ Carbon Film Resistor 1.0KΩJ 1/4W PHILIPS R3, R7 RA1/4W0470J Carbon Film Resistor PHILIPS 470ΩJ 1/4W R4, R8 RA1/4W4.7KJ Solid Resistor PHILIPS 4.7KΩ 1/4W FAPCB-0180 Print Board UA0896 DISCO Z-axis Sensor P.C.Board C-33...

  • Page 49: Touch Sensor P.c.board

    CC103025-018 Ceramic Capacitor RSB-200-YD-103-5L5 NICHICON KEJAEA10-009 P.C.B Connector IL-10S-S3L KEJAEA05-004 P.C.B Connector IL-5S-S3L ASQMB-01 Buzzer QMB-01 2KHZ STAR MICRONICS LY1, LY2 ADLAB2N002 Relay LAB2N-002DC5V OMRON RHSR19R470K Variable Resistor SR19R470KΩ ALPS FAPCB-0409 Print Board PCB0409 DISCO Touch Sensor P.C.Board EE0301 C-34...

  • Page 53: Trans-Box For Domestic

    Index No. Part No. Description Spec. No. Q'ty EAUG--100302 Trans-Box Domestic ATDOX1-1.5K Transformer 1-1.5K P200/S100V DISCO ELB1, 2 AGEB015A-027 Leak Current Breaker NV30-CA TC15A 30mA MITSUBISHI AGCA003A-035 Breaker NRAS1100-3A 1P3A IZUMI XCWN1512K Double Socket WN1512K MATSUSHITA PLG1 KBNNA04-120 Round Connector...

  • Page 55: Trans-Box For Export

    Index No. Part No. Description Spec. No. Q'ty EAUG--100502 Trans-Box Export ATDOX3-5K Transformer 3-5K DISCO ELB1 AGEB010A-026 Leak Current Breaker NV30-CA TC10A 30mA MITSUBISHI ELB2 AGEB015A-027 Leak Current Breaker NV30-CA TC15A 30mA MITSUBISHI AGCB015A-028 Breaker NF30-S TC15A 3P MITSUBISHI AGCB010A-029...
  • Page 57 Index No. Part No. Description Spec. No. Q'ty EAUB--093905 Control Box Unit Automatic 90° Rotation PB1A-PB8A Connector CR21-44D-4WB HIROSE PB1B-PB8B KAHIR048-012 Connector CR13-48D-3.17W HIROSE PB9-PB12 CR21-44D-4WB HIROSE BNGF-2050 Noise Filter GF-2050 TOHOKU KINZOKU F2, F3 APG00001A250 Fuse F-7161-1A SATO APG00005A250 Fuse F-7161-5A SATO...
  • Page 59 Index No. Part No. Description Spec. No. Q'ty Manual θ-axis EAUB--085905 Control Box Unit PB1A - PB8A Connector CR21-44D-4WB HIROSE PB1B - PB8B KAHIR048-012 Connector CR13-48D-3.17W HIROSE PB9 - PB12 CR21-44D-4WB HIROSE BNGF-2050 Noise Filter GF-2050 TOHOKU KINZOKU F2, F3 APG00001A250 Fuse F-7161-1A...

  • Page 63: Control Box C

    Index No. Part No. Description Spec. No. Q'ty AT00XYA-500 Transmitter YA-500 MELEC DCS25VB10 Diode S25VB SHINDENGEN DCS5VB10 Diode S5VB SHINDENGEN EAUA--025000 DC Power Unit MELEC KDAMP09R022 Nylon Connector 1-480277-0 KDAMP03P010 Nylon Connector 1-480304-0 KDAMP-MP083 Nylon Connector Pin 60618-1 (Male) KDAMP-FP084 Nylon Connector Pin 60617-1 (Female) Control Box C...

  • Page 67: Operation Panel

    Index No. Part No. Description Spec. No. Q'ty EAUA--088100 Operation Panel Board N030-1504 1 set S1 - S15, S17 - S31 AHPBS66-01 Tact Switch PBS66-01 LD1 - LD6, SDTLR124 TLR124 TOSHIBA LD8 - LD21 SD1 - SD8 SDTLR313 TLR313 TOSHIBA KFYAM034-023 Flat Connector FAP-34-03#2...

  • Page 71: Dc Power P.c.board

    Index No. Part No. Description Spec. No. Q'ty EAUA--025100 DC Power P.C.Board 1 set IEMC7805CT MC7805CT MOTOROLA TB2SB434-O 2SB434-O TOSHIBA R1 - R3 RC05W0.20K Cement Resistor 0.2Ω 5W RC05W05.0K Cement Resistor 5Ω 5W RC05W0500K Cement Resistor 500Ω 5W +5V, GND KKTP30 Check Terminal TP30...
  • Page 72 EAUA--087600...

  • Page 73: Main Cpu Board

    Index No. Part No. Description Spec. No. Q'ty EAUA--087600 Main CPU Board MELEC 1 set µPD8085AC IC11 IGUPD8085AC IC15 - IC17, IHMBM2764-30 MEMORY IC MBM2764-30 FUJITSU IC21 - IC25 IC13, IC14 IHM5M5118P MEMORY IC M5M5118P MITSUBISHI IBSN74LS245N TTL IC HD74LS245P HITACHI IBSN74LS00∆N TTL IC...
  • Page 74 EAUA--087703...

  • Page 75: Input/Output P.c.board

    Index No. Part No. Description Spec. No. Q'ty EAUA--087703 I/O Board MELEC 1 set µPD8279C-5 IC27 IGUPD8279C-5 IBSN74LS245N TTL IC HD74LS245P HITACHI IC10, IC11 IBSN74LS273N TTL IC SN74LS273N IC2, IC3 IBSN74LS138N TTL IC HD74LS138P HITACHI IBSN74LS174N TTL IC HD74LS174P HITACHI IC14 IBSN74LS175N TTL IC...
  • Page 76 EAUA--087800 (X, Y) EAUA--087900 (Z, θ)

  • Page 77: Sub Cpu Board (X,Y,Z,Θ)

    Index No. Part No. Description Spec. No. Q'ty EAUA--087800 Sub CPU Board X, Y MELEC 1 set µPD8085AC IC26, IC31 IGUPD8085AC IC27, IC30 IHMBM2764-30 MEMORY IC MBM2764-30 FUJITSU IC27, IC30 ISYAM28-0003 IC SOCKET IC-99-2086 YAMAICHI IC20, IC21, IC22, IBSN74LS373N TTL IC SN74LS373N IC23 IC4, IC7, IC13...
  • Page 78 EAUA--023600...
  • Page 79 Index No. Part No. Description Spec. No. Q'ty EAUA--023600 X Driver P.C.Board 1 set Q1 - Q10 TD2SD525 Transistor 2SD525 TOSHIBA Q11 - Q20 TD2SD560 Transistor 2SD560 Q21 - Q30 TB2SB649 Transistor HITACHI 2SB649© Q31 - Q40 TC2SC2240 Transistor 2SC2240 TOSHIBA TD2SD287 Transistor...

  • Page 80: Driver P.c.board

    Index No. Part No. Description Spec. No. Q'ty EAUA--023600 X Driver P.C.Board (Continued) 1 set Diode radiator 3K08256 MELEC Alminum radiator 4K07563 MELEC Alminum radiator 3K06472 MELEC FAPCB-0071 Print Board EAUA--023600 Y Driver P.C.Board 1 set EAUA--023600 Z Driver P.C.Board 1 set θ...

  • Page 81: Maintenance

    D. MAINTENANCE...

  • Page 82: Maintenance And Inspection

    D. MAINTENANCE 1. Maintenance and Inspection 1) Be sure to wipe off water that has been sprinkled on the chuck table and operating panel after every use of the machine. 2) Remove wafer chips accumulated around the scupper of the water tray. 3) Do not place tools and the like on the stainless waterproof cover in order to prevent the cover from being scratched.

  • Page 83: Checking Procedures For Troubleshooting

    E. CHECKING PROCEDURES FOR TROUBLESHOOTING...
  • Page 84 CLASSIFICATION SYMPTOM CAUSES .1. Power 1-1. STAND-BY lamp is not lit. 1-1. (1) Defective Pressure Sensor. (2) Defective Temperature Sensor. (3) Defective I/O P.C. Board. 1-2. No lamps are lit. 1-2. (1) Fuse (F1) has blown. (2) Defective +5V Power Supply. (3) Defective Panel Cable.
  • Page 85 WHAT AND HOW TO CHECK REMEDIAL ACTION 1-1. Check the pressure gauge. 1-1. No action is required if the valve is correct. Touch the spindle motor with a bare hand to check If it is too hot to touch, it is possible that cooling the temperature.

  • Page 86: Power

    CLASSIFICATION SYMPTOM CAUSES θ does not stop rotating. (2) Defective θ Sensor and Cable. 1. Power 1.5. 1-5. (Continued) 1.6. FAN (MB2) does not rotate. 1-6. (1) Fuse has blown. (2) Poor connection or defective FAN. 1-7. FAN (MB3) does not rotate. 1-7.
  • Page 87 WHAT AND HOW TO CHECK REMEDIAL ACTION 1-5. If it remains at 5V in (1), check connections and 1-5. Replace the defective part. sensor. (Blow off by air, the water under chuck table) Check θ-axis sensors 1-3. Repair the board if it malfunctions. (Replace) 1-6.

  • Page 88: Data Setting Operation

    CLASSIFICATION SYMPTOM CAUSES 2. Data setting 2-1. PANEL cannot be operated. 2-1. (1) Defective Panel. Operation (2) Defective I/O P.C. Board. (3) Defective Flat Cable. 2-2. Data cannot be entered. 2-2. (1) Defective CPU P.C. Board. (2) Defective ROM P.C. Board. 2-3.
  • Page 89 WHAT AND HOW TO CHECK REMEDIAL ACTION 2-1. Check if the buzzer sounds when panel switch is 2-1. If it does, check other parts. If it does not, replace the turned ON. switch P.C. board. (Also note the following items (2) and (3).) Check the operation after replacing PB6 (EAUA-- If there is no change, check other parts.

  • Page 90: Manual Operation

    CLASSIFICATION SYMPTOM CAUSES 3. Manual 3-1. X-axis does not move, even if 3-1. (1) Defective panel Switches. Operation are selected. (2) Defective X Limit Switch (including Cable). (3) Defective I/O P.C. Board. (4) Defective D/C P.C. Board. (5) Defective Driver. (6) Defective Cable connected to the Motor.
  • Page 91 WHAT AND HOW TO CHECK REMEDIAL ACTION 3-1. Check switch of X-axis; the procedure 3-1. Same as 1-4 (1). is the same as 1-4 (1). Check voltage at XL or XR terminal of PB6 If it is approx. 0V, the limit switch is normal, and (EAUA--087703) with a tester (synchroscope).
  • Page 92 CLASSIFICATION SYMPTOM CAUSES 3. Manual 3-6. Z-axis does not move upward to the upper 3-6. (1) Same as in the case of X-axis. Operation limit, even if EM STOP is selected. (Continued) 3-7. Spindle does not rotate, even if SPINDLE 3-7.
  • Page 93 E-10 WHAT AND HOW TO CHECK REMEDIAL ACTION 3-6. Check EM STOP switch of Z-axis. 3-6. Same as in 3-1. The procedure is the same as in 3-1. (Terminal to be checked is ZU.) P.C. Boards: PB6 (EAUA--087703) PB8 (EAUA--087900) PB11 (EAUA--023600) 3-7.

  • Page 94: Setting-Up Operation

    E-11 CLASSIFICATION SYMPTOM CAUSES 4. Setting-up 4-1. Z-axis does not move upward to the upper 4-1. (1) Defective Upper Limit or Connecting Operation limit. Cable. (2) Defective I/O P.C. Board. (3) Defective D/C P.C Board. (4) Defective Driver P.C. Board. (5) Defective Cable connected to the Motor.
  • Page 95 E-12 WHAT AND HOW TO CHECK REMEDIAL ACTION 4-1. Check the voltage at ZV terminal of PB6 (EAUA-- 4-1. Limit switch is normal if it is approx. 0V, and 087703) with a tester (synchroscope). therefore check other parts. If it is approx. +5V, repair (replace) the limit switch.
  • Page 96 E-13 CLASSIFICATION SYMPTOM CAUSES 4. Setting-up 4-5. Y-axis does not move in reverse. 4-5. (1) Defective Y Center Sensor or Connecting Operation Cable. (Continued) (2) Defective I/O P.C. Board. (3) Defective D/C P.C Board. 4-6. Y-axis does not move. 4-6. (1) Same as in Y-axis in MANUAL.
  • Page 97 E-14 WHAT AND HOW TO CHECK REMEDIAL ACTION 4-5. Check the voltage of terminal YC of PB6 (EAUA-- 4-5. If the voltage is approx. 0V when the Y-axis is on 087703) with a tester (synchroscope). the front side of the center or approx. 5V when the Y-axis is on the back side of the center, the board is normal.

  • Page 98: Semi/Fully Auto Operation

    E-15 CLASSIFICATION SYMPTOM CAUSES 5. Semi/Fully Auto 5-1. During the CUTTING Operation, no water 5-1. (1) Defective I/O P.C. Board. Operation is supplied from the cutting nozzle. (2) Defective Magnetic Valve or Connecting Cable. 5-2. After completion of the CUTTING 5-2.
  • Page 99 E-16 WHAT AND HOW TO CHECK REMEDIAL ACTION 5-1. Check the operation after replacing PB6 (EAUA-- 5-1. If there is no change after the replacement, check 087703) with a spare P.C. board. other parts. If it operates, correctly, the board is defective.

  • Page 100: Driver Control Circuit Board

    E-17 CLASSIFICATION SYMPTOM CAUSES 6. Driver Control 6-1. Motor does not rotate. 6-1. (1) P-ROM is out of place. (2) C.P.U is running the wrong way. Circuit Board (Defective Circuit) (Commonly used for X, Y, and Z-Axes) 6-2. Motor does not rotate smoothly at the lower 6-2.
  • Page 101 E-18 WHAT AND HOW TO CHECK REMEDIAL ACTION 6-1. Check if P-ROM is correctly set. 6-1. Reset it, if it is incorrectly set. Check the CLOCK Power Output by using a If a normal output waveform as shown in the figure synchroscope.

  • Page 102: Driver

    E-19 CLASSIFICATION SYMPTOM CAUSES 7. Driver 7-1. Motor does not rotate. 7-1. (1) Fuse has blown. (For X, Y, Z, and θ) (2) Defective Power Supply. (3) Drive Circuit is damaged. 7-2. Motor does not rotate smoothly at the lower 7-2.
  • Page 103 E-20 WHAT AND HOW TO CHECK REMEDIAL ACTION 7-1. Take out fuses F1 and F2 in the P.C. board and 7-1. If they have blown, replace the fuses. Also check them with a tester. investigate why the fuse has blown. If they have not blown, check other parts.

  • Page 104: Inverter

    E-21 CLASSIFICATION SYMPTOM CAUSES 8. Inverter 8-1. Spindle does not rotate (inverter alarm does 8-1. (1) Defective power supply line. not go on). (2) Leak in spindle motor. (3) Spindle ON signal defective. (4) Jamming of the spindle. (5) Inverter controller defective. (6) Main fuse blown by power surge inside the inverter.
  • Page 105 E-22 WHAT AND HOW TO CHECK REMEDIAL ACTION 8-1. Check if power supply is connected to the inverter. 8-1. After repairing the power supply line, the inverter can operate. Check if external transformer breaker is open. After replacing the spindle motor, the inverter can operate.
  • Page 106 E-23 CLASSIFICATION SYMPTOM CAUSES 8. Inverter 8-6. Illumination lamp fails to go on. 8-6. (1) Main fuses F1 and F2 are blown. (Continued) (2) Illumination ON signal is defective. (3) Shortcircuit in lamp grounding, etc. (4) Illumination circuit is defective. 880120...
  • Page 107 E-24 WHAT AND HOW TO CHECK REMEDIAL ACTION 8-6. Check if inverter fan does not rotate normally and if 8-6. Same as symptom 8-1 (spindle does not rotate). spindle does not rotate. Check I/O board, operation panel and signal wiring. After checking the I/O interface, the inverter can operate.
  • Page 108 E-25 Hold Output Level HOLD Signal Name State of Signal Fig. E-1 PB7 Output Waveform. 840920...
  • Page 109 E-26 Hold Output Voltage at Each Terminal. 1.5V 1.5V Fig. E-2 Output Waveform of Driver P.C. Board. 840920...
  • Page 110 E-27 Fig. E-3 Output Waveform of Driver P.C. Board. 840920...

  • Page 111: Self-Diagnostics

    E-28 Self-diagnostics Error Display: When an error occurs, the panel display signifies the following: MODE/PROG# DATA BLOCK Error code (001-015)…..identifies the error cause. A Panel operation sequence error Type of error B Suspend keys operated C Mechanical failures during operation Error has occurred Doesn’t change to error display Error Display Timing:...
  • Page 112 E-29 The Types of Error Code and Their Meanings: As stated above, the error codes are divided into 3 types: A: Incorrect panel operation sequence; B: Operation of suspended key; and C: Mechanical failure during operation. Within each type, error codes 001-999 indicate the source of the errors. A-type Errors (panel operation sequence error) DISPLAY SIGNIFICANCE + SOLUTION...
  • Page 113 E-30 DISPLAY SIGNIFICANCE + SOLUTION E A006 IN FULL AUTO, 90° ROTATION FOR ALIGNMENT OF THE SECOND CHANNEL INOPERABLE The 3 operations below have not been completed, preventing the unit from proceeding with alignment of the second channel. Make sure these operations are performed fully, then press the or the keys.
  • Page 114 E-31 DISPLAY SIGNIFICANCE + SOLUTION E A013 SEMIAUTO MODE CANNOT BE ENTERED The theta cw or ccw limit sensor is on, and therefore semiauto cannot be entered. B-type Errors (disabled key operation) DISPLAY SIGNIFICANCE + SOLUTION E B001 DISABLED KEY PRESSED During certain sequential operations (ie.
  • Page 115 E-32 DISPLAY SIGNIFICANCE + SOLUTION E C005 ERROR IN ALIGNMENT LIMIT This error is activated when the table moves to either the X- or the Y-axis end limit during alignment. In such a case FULL AUTO MODE will be suspended, so it is necessary to check the conditions of the alignment and press FULL AUTO once again.

  • Page 116: Inverter Alarm Resetting

    E-33 10. Inverter Alarm Resetting Alarm Display and Its Significance Fig. E-7 Alarms are indicated by the LED. Output overcurrent (AC phase current) Input overvoltage Input under (including any momentary power stoppage) Output overcurrent (for preventing direct current peak and overheating) These alarm states can be released by turning on the reset switch or turning off the power switch.

  • Page 117: Illustrations And Parts List

    F. ILLUSTRATION AND PARTS LIST...

  • Page 118: Exploded View Of Main Body (A

    EXPLODED VIEW OF MAIN BODY(A) (F-1)
  • Page 119 EXPLODED VIEW OF MAIN BODY (A) (F-1) Index Disco Quantity Description Remarks Number Part No. per Assy (Not Assigned) (Not Assigned) (Not Assigned) (Not Assigned) (Not Assigned) (Not Assigned) MG6N-M04-1U Hex Nut M4-1 MGTK-M0406U Truss Hd Screw M4 x 6...
  • Page 120 EXPLODED VIEW OF MAIN BODY (A) (F-1) Index Disco Quantity Description Remarks Number Part No. per Assy MODDH094 Sponge MODDH018 Blower MS14-BC 1set MGSSM04035U Soc Hd Screw M4 x 35 MADDHA28 Cover Assy (Splash L) 1set MODDHA86 Cover (Splash)(1-1) MODDHA74...
  • Page 121 EXPLODED VIEW OF MAIN BODY (A) (F-1) Index Disco Quantity Description Remarks Number Part No. per Assy MODDH136 Case Support (1) (Not Assigned) MODDHA85 Splash Cover MODDH309 Cover (Splash) MODDH152 Strainer MODDH133 Grommet MODDH402 Water Case MGSK-M0310UB Fil Hd Screw...
  • Page 122 EXPLODED VIEW OF MAIN BODY (A) (F-1) Index Disco Quantity Description Remarks Number Part No. per Assy EAUF--089300 Operation Panel Unit For Manual GE2H/6 Switch Guide Sheet MGTK-M0416UB Truss Hd Screw M4 x 16 KBNNA03-015 Metal Connector NCS-303-RM MODDH130 Electric Panel...
  • Page 123 EXPLODED VIEW OF MAIN BODY (A) (F-1) Index Disco Quantity Description Remarks Number Part No. per Assy AGCA020A-003 Circuit Breaker 1set NRAN2100- 20A-AA MODDH002 Base Block MGSSM08025U Soc Hd Screw M8 x 25 MODDHB24 Magnet Catch 2sets C-100-B-2 MGW-M03U Washer...
  • Page 124 EXPLODED VIEW OF MAIN BODY (B) (F-2)
  • Page 125 EXPLODED VIEW OF MAIN BODY (B) (F-2) Index Disco Quantity Description Remarks Number Part No. per Assy EAUC--199301 Spindle Inverter 1.5kw 1set MGSSM04008U Soc Hd Screw M4 x 8 MGW-M04U Washer ABLY4-A6 Control Relay 1set ALPTF14A Relay Soket 1set MGSSM04040U...
  • Page 126 EXPLODED VIEW OF MAIN BODY (B) (F-2) Index Disco Quantity Description Remarks Number Part No. per Assy MADDH916 1set Camera Monitor Set(5 Inch) MODDH188 Monitor 5 Inch 5M9AK 1set MGSSM04018U Soc Hd Screw M4 x 18 MG6N-M04-1U Hex Nut M4-1...
  • Page 127 EXPLODED VIEW OF MAIN BODY (F-2) Index Disco Quantity Description Remarks Number Part No. per Assy MGSSM03010U Soc Hd Screw M3 x 10 EAUB--093905 Control Box Unit 1set EAUB--085905 Control Box Unit 1set DAD-2H/6TM MODDHF04 Monitor TV (Option) 1set MODDHF92...

  • Page 128: Exploded View Of X-Axis (90° Theta)

    ° EXPLODED VIEW OF X-AXIS (90 THETA) (F-3A)
  • Page 129 ° EXPLODED VIEW OF X-AXIS (90 THETA) (F-3A) Index Disco Quantity Description Remarks Number Part No. per Assy MODDN005 Universal Chuck Table ° Theta-Axis Assy MADDX904 MSCO0555AN “O” Ring S-110 MODDXA79 Seal Ring MODDXB64 Sealing Rubber MGTK-M0412UB Truss Screw M4 x 12...
  • Page 130 ° EXPLODED VIEW OF X-AXIS (90 THETA) (F-3A) Index Disco Quantity Description Remarks Number Part No. per Assy MGSSM03018U Soc Hd Screw M3 x 18 MODDXA72 Thrust Needle Bearing NTB80105 MODDX133 Slide Cap MODDX083 Thrust Needle Bearing MODDX134 Slide Plate...
  • Page 131 ° EXPLODED VIEW OF X-AXIS (90 THETA) (F-3A) Index Disco Quantity Description Remarks Number Part No. per Assy MGSSM06016U Soc Hd Screw M6 x 16 MODDX065 Plate(Insulation) MGSSM05016U Soc Hd Screw M5 x 16 MGSSM06010U Soc Hd Screw M6 x 10...
  • Page 132 ° EXPLODED VIEW OF X-AXIS (90 THETA) (F-3A) Index Disco Quantity Description Remarks Number Part No. per Assy MODDX044 Bracket(X Sensor P.C.B) MGSSM05010U Soc Hd Screw M5 x 10 MODDHA66 Plate(P.C.B) MODDX913 X-Axis Assy 1set MGSSM06025U Soc Hd Screw M6 x 25...
  • Page 133 ° EXPLODED VIEW OF X-AXIS (90 THETA) (F-3A) Index Disco Quantity Description Remarks Number Part No. per Assy MADDX903 1set Stepping Motor Pulley Assy MODDX135 Pulley(Timing) 12XL037-6F MODDX032 Bracket(Motor) MGW-M06U Washer MODDX136 Stepping Motor PH569 Q5 MODDXF78 Housing(X-Axis Motor) (Not Assigned)
  • Page 134 EXPLODED VIEW OF X-AXIS (MANUAL THETA) (F-3B) (MODEL DAD-2H/6TM)
  • Page 135 EXPLODED VIEW OF X-AXIS (MANUAL THETA) (MODEL DAD-2H/6TM) (F-3B) Index Disco Quantity Description Remarks Number Part No. per Assy MODDXA52 Chuck Table MODDX146 Ring(Center) MADDX905 Manual Theta-Axis Assy 1set DAD-2H/6TM MODBX006 Center Plug MODBX007 Packing MADDXB42 Upper Disc Set 1set...
  • Page 136 EXPLODED VIEW OF X-AXIS (MANUAL THETA) (MODEL DAD-2H/6TM) (F-3B) Index Disco Quantity Description Remarks Number Part No. per Assy MGSK-M0308U Fil Hd Screw M3 x 8 MODBX078 Stopper MG6N-M04-3U Hex Nut M4-3 MG6N-M04-1U Hex Nut M4-1 MGWS-M04U Spring Washer MODBX077...
  • Page 137 MEMO...
  • Page 138 ° EXPLODED VIEW OF X-AXIS (360 THETA) (F-3C)
  • Page 139 ° EXPLODED VIEW OF X-AXIS (360 THETA) (F-3C) Index Disco Quantity Description Remarks Number Part No. per Assy MODDN005 Chuck Table(Universal) MODDX092 Seal Cup Theta-Axis Assy(360 ° ) MADDX90201 1set MODDX123 Cover MSCO0562AN “O” Ring S-135 MGSK-M0306U Fil Hd Screw...
  • Page 140 ° EXPLODED VIEW OF X-AXIS (360 THETA) (F-3C) Index Disco Quantity Description Remarks Number Part No. per Assy MODDX069 Locating Screw MSCO0507AN “O” Ring S-10 MSDDX113 Duct Joint MSCO0503AN “O” Ring MGSSM03018U Soc Hd Screw M3 x 18 MODDX133 Slide Cap...
  • Page 141 MEMO...
  • Page 142 EXPLODED VIEW OF X-AXIS (F-3D) (MODEL DAD-2H/6T)

  • Page 143: Exploded View Of X-Axis (Manual Theta) (Model Dad-2H/6Tm)

    EXPLODED VIEW OF X-AXIS (F-3D) Index Disco Quantity Description Remarks Number Part No. per Assy As Req’d MODTF2-6-1 Tape Frame MADDXB02 Chuck Table Assy 3 Inch 1set MADDXB03 Chuck Table Assy 4 Inch 1set MADDXB04 Chuck Table Assy 5 Inch...

  • Page 144: Exploded View Of Y-Axis

    EXPLODED VIEW OF Y-AXIS (F-4)
  • Page 145 EXPLODED VIEW OF Y-AXIS (F-4) Index Disco Quantity Description Remarks Number Part No. per Assy MGSSM04010U Soc Hd Screw M4 x 10 MGW-M04U Washer MGSSM03010U Soc Hd Screw M3 x 10 EAUA--089800 Y-Axis Sensor Board UA0898 1set MODDY045 Bracket(Y-Axis Sensor)
  • Page 146 EXPLODED VIEW OF Y-AXIS (F-4) Index Disco Quantity Description Remarks Number Part No. per Assy MODDY057 Correcting Bar MODDY059 Bushing MGSSM05020U Soc Hd Screw M5 x 20 MODDY067 Stand(Front Guide) MGSSM06020U Soc Hd Screw M6 x 20 MADDY902 Y-Axis Assy(For Maintenance)
  • Page 147 EXPLODED VIEW OF Y-AXIS (F-4) Index Disco Quantity Description Remarks Number Part No. per Assy MODDY071 Stepping Motor PH569-A KDMOX12P057 Nylon Connector 1360P-1 MADDYA02 Linear Motion Guide Assy 1set MODDY075 Linear Motion Guide(1) MODDY076 Linear Motion Guide(2) MGSSM05025U Soc Hd Screw...

  • Page 148: Exploded View Of Z-Axis

    EXPLODED VIEW OF Z-AXIS (F-5)
  • Page 149 EXPLODED VIEW OF Z-AXIS (F-5) Index Disco Quantity Description Remarks Number Part No. per Assy MADJZA03 Wheel Cover Nozzle Set 1set MODBZB16 Block(Nozzle) MSCO0502AN “O” Ring MGSK-M0306U Fil Hd Screw M3 x 6 MODBZ606 Long Hinge MODJZA15 Wheel Rear Cover...
  • Page 150 EXPLODED VIEW OF Z-AXIS (F-5) Index Disco Quantity Description Remarks Number Part No. per Assy MSCO0501AN “O” Ring MADDZ910 Cover(Wheel) Assy 1set MODDZ099 Cover(Wheel Rear) (Not Assigned) MODBZ052 Cover Pin(2) MSCO0002AN “O” Ring MODDZ101 Knob A-1176-18 MODDZ100 Cover(Wheel Front) MODDZ622...
  • Page 151 EXPLODED VIEW OF Z-AXIS (F-5) Index Disco Quantity Description Remarks Number Part No. per Assy MSR1640ZZ--M Miniature Ball Bearing R1640ZZ MGSVKM0305U Set Screw M3 x 5 MODBZ014 Screw(Spring) MODDZ015 Spring MGSSM04010U Soc Hd Screw M4 x 10 MODDZ031 Sensor Mounting Board...
  • Page 152 EXPLODED VIEW OF Z-AXIS (F-5) Index Disco Quantity Description Remarks Number Part No. per Assy MODDZ002 Motor Case MS7202A--P4S Angular Ball Bearing 7202A MODDZ014 Inner Collar MODDZ013 Outer Collar MSAW02S Bearing Washer AW02 MSAN02S Bearing Nut AN02 MODDZ042 Circular Nut...
  • Page 153 EXPLODED VIEW OF Z-AXIS (F-5) Index Disco Quantity Description Remarks Number Part No. per Assy (Not Assigned) (Not Assigned) MODFHB52 Fiber Cable (Option) 1set MODDHB43 Pin(Slide) (Option) MGSSM03014U Soc Hd Screw M3 x 14 MODJN140 Hold Pin (Option) MODDHB41 Holder...

  • Page 154: Exploded View Of Piping (A

    EXPLODED VIEW OF PIPING (A) (F-6)
  • Page 155 EXPLODED VIEW OF PIPING (A) (F-6) Index Disco Quantity Description Remarks Number Part No. per Assy MSTUF6X4.OLJ JUNRON Tube UF6 x 4 Blue MSTUF6X4.OWJ JUNRON Tube UF6 x 4 White MODDH151 Spiral Tube XXCV-100 Cable Tie CV-100 MSTUF8X5.OWJ JUNRON Tube UF8 x 5 White MSTUF8X5.OLJ...
  • Page 156 EXPLODED VIEW OF PIPING (B) (F-7)
  • Page 157 EXPLODED VIEW OF PIPING (B) (F-7) Index Disco Quantity Description Remarks Number Part No. per Assy MSHNU105PT14 Hose Nipple Union Set 1set 10.5 x PT1/4 MSFELB-1/4 Elbow MSFNPL-1/4 Nipple MODBH068 Air Filter AF-211 1set MSFDM-6H-1/8 8sets DM Tube Fitting Half Union...
  • Page 158 EXPLODED VIEW OF PIPING (B) (F-7) Index Disco Quantity Description Remarks Number Part No. per Assy XXS-514 Wire Sticker S-514 MSFDM-6H-1/4 4sets DM Tube Fitting Half Union DM-6H-1/4 MSBF6 Barb Fitting 5sets MSB40-13 Pipe Band 40-13 MSFNPL-1/8 Nipple MSFTEE-1/8 MSFDM-6L-1/8...

  • Page 159: (Not Assigned

    EXPLODED VIEW OF PIPING (B) (F-7) Index Disco Quantity Description Remarks Number Part No. per Assy MSUEF Universal Elbow Set 1set MGSSM04010U Soc Hd Screw M4 x 10 MGW-M04U Washer XXNK-9N Cable Clamp XXNK-9N MSFSKT-1/8 Socket 1/8 XXCV-100 Cable Tie(Convex)
  • Page 160 INDEX Disco Disco Disco Page Page Page Part No. Part No. Part No. ABLY4-A6 MADDH908 MODBH060 AGCA020A-003 MADDH909 MODBH068 AJGXL-12F F-3A MADDH915 MODBH070 ALPTF14A MADDH916 MODBH072 ANBTBH15C3 MADDHA28 MODBH107 ANML-1765-2P MADDHA29 MODBH10751 AQELB-12B MADDHA80 MODBN623 AQLM-100 MADDHA81 MODBN652 ART610-A6 MADDN902...
  • Page 161 INDEX Disco Disco Disco Page Page Page Part No. Part No. Part No. MODBY015 MODDH07202 MODDH700 MODBY017 MODDH077 MODDH701 MODBY018 MODDH094 MODDH710 MODBY019 MODDH096 MODDH722 MODBY051 MODDH098 MODDHA23 MODBZ001 MODDH107 MODDHA24 MODBZ004 MODDH130 MODDHA25 MODBZ005 MODDH131 MODDHA27 MODBZ014 MODDH133 MODDHA28...
  • Page 162 INDEX Disco Disco Disco Page Page Page Part No. Part No. Part No. MODDHE82 MODDX084 F-3C MODDX140 F-3A MODDHF04 MODDX090 F-3A MODDX142 F-3A MODDHF39 MODDX091 F-3A MODDX143 F-3A MODDHF92 MODDX092 F-3C MODDX144 F-3A MODDHF98 MODDX094 F-3A MODDX146 F-3A MODDHF99 MODDX094...
  • Page 163 INDEX Disco Disco Disco Page Page Page Part No. Part No. Part No. MODDXE34 F-3D MODDZ021 MODLH490 MODDXE35 F-3D MODDZ026 MODMH579 MODDXF34 F-3B MODDZ030 MODTF2-6-1 F-3D MODDXF78 F-3A MODDZ031 MOGAR129 MODDXG18 F-3A MODDZ03241 MOGAR130 MODDY016 MODDZ042 MOGAR219 F-3D MODDY018 MODDZ049...
  • Page 164 INDEX Disco Disco Page Page Part No. Part No. MSFBTU6 x 4 XXCV-100 MSFDM-6H-1/4 XXCV-100 MSFDM-6H-1/8 XXNK-18N MSFDM-6L-1/4 XXNK-9N MSFDM-6L-1/8 XXS-514 MSFELB-1/4 MSFHNPL-1/8 MSFNPL-1/4 MSFNPL-1/8 MSFPLG-1/4-2 MSFSKT-1/8 MSFTEE-1/4 MSFTEE-1/8 MSFZU-HZ8-01 MSFZU-HZ8-02 MSFZU-LZ8-01 MSFZU-LZ8-02 MSG-6W MSHK-0609P4T F-3A MSHNU105PT14 MSHR30203J-S MSR1640ZZ--M MSRF1960ZZ-M...

  • Page 165: Regular Inspections

    G. REGULAR INSPECTIONS...

  • Page 166: Daily Inspection, Maintenance And Adjustment

    G. REGULAR INSPECTIONS Daily Inspection, Maintenance and Adjustment Point to be checked before turning on the Power 1) The air pressure is 5.0kgf/cm G-71 P.S.I. or more. 2) There is no foreign matter in the hose. 3) Does the air spindle shaft revolve freely ? 4) Is the flange not marked with cutlery tooth, scratched, or contaminated ? 5) That the chuck table is not contaminated or scratched.

  • Page 167: Monthly Inspection, Maintenance And Adjustment

    7) Insert a screwdriver into the space over Z-axis and check that Z-axis moves smoothly from the upper limit to the lower limit. 8) Check that the helical coupling set between the Y-axis motor and the Y-axis ball screw, is tight. Points to be checked after turning on the Power 1) Enter cutting data after turning on the power.

  • Page 168: I/O Circuit Board Jumper Setup Procedure

    I/O Circuit Board Jumper Setup Procedure The I/O circuit board (EAUA--087703) jumper setup (J3/J4) must agree with the θ -axis rotation type (manual, 90 ° , or 360 ° ). When changing the jumper setup, see the figures below. Manual or 90° Type θ-axis Rotation Jumper setup: J3-6N side;...

  • Page 169: Camera Head Monitor Tv

    H. CAMERA HEAD MONITOR TV...

  • Page 170: General

    H. CAMERA HEAD MONITOR TV GENERAL The equipment consists of a TV camera and a monitor designed for use with dicing saws. The camera head is built small in size and light in weight so as to be used in combination with optical microscopes. Further, the camera control unit and monitor can be easily fitted a dicing saw by uniting them in one body.

  • Page 171: Composition Of Equipment

    COMPOSITION OF EQUIPMENT 3-1. Microcamera CS3400k 1 unit 3-1-1. Frame 3-1-2. SENSOR Circuit Board 3-1-3. VIDEO Circuit Board 3-1-4. DRIVER Circuit Board 3-1-5. OSC Circuit Board 3-1-6. DC/DC Circuit Board 3-2. CCU Monitor 5M9AK 1 unit 3-2-1. Frame 3-2-2. PROCESS Circuit Board 3-2-3.
  • Page 172 4-2. Monitor Unit: Input Signal: Composive synchronizing video signal 1 Vp-p Video Signal: 0.7V (positive) Synchronizing Signal: 0.3V (negative) Input Impedance 75ohms Line Frequency: 15.75kHz Frame Frequency: 60Hz Scanning Direction: Line ……………….……Upwards from below Frame……………………From left to right Braun Tube: 5inch, 70°...

  • Page 173: Connections

    CONNECTIONS The units should be connected as illustrated below. Fig. H-1 Connect the camera cable to the CAMERA plug socket in the 5M9AK monitor. Connect the 5M9AK monitor power cable to a power outlet. OPERATING PROCEDURES Make connections according to the instructions in Item 5. Turn on the POWER switch on the 5M9AK monitor, and a picture will appear on the monitor in about 10 seconds.
  • Page 174 External Operating Unit Fig. H-2 910110...
  • Page 175 Camera Head Internal Adjusters (VIDEO PWB) Fig. H-3 891110...
  • Page 176 Monitor Internal Adjuster (PROCESS PWB) 891110...
  • Page 177 Internal Monitor Adjusters (MONITOR PWB) 891110...
  • Page 178 Internal Monitor Adjuster (POWER SUPPLY PWB) Fig. H-6 891110...

  • Page 179: Microscope Model Ds

    J. MICROSCOPE MODEL DS...

  • Page 180: Specifications

    40mm 20mm Objective Lenses 1,5748" 0.7874" 1,5748" 0.7874" Disco Part No. MODDH04617 MODDH04618 MODDH04619 MODDH04620 ADJUSTMENT AND REPAIR The optical system of the microscope is so complicated as to be difficult to adjust. Therefore, the adjustment instructions below will be restricated to those for parts of the system. When some or all of the parts of the optical system are disassembled on occasion, reassembly requires specialized adjusting devices and a skilled specialist.
  • Page 181 When Dust and Contamination become Obstacles to Observation (Including Viewing Impaired by fogginess): 1-1. Objective Lens When non-transmission phenomenon with white or blue color occurs at the surface of the objective lens; [Cause] This phenomenon is caused by corrosion of the coated surface of the lens and degradation of the lens material.
  • Page 182 1-4. Contamination of Other Optical Parts When dust and contamination are seen on the condensing lens, the filter, the half mirror, and so on; [Remedy] Clean the condensing lens and filter. They must be returned to the manufacturer for repair. When the Split Line is Misaligned from the Central Position: If the central line (split line) is displaced on the television screen (DT6-, DTL-);...
  • Page 183 When the Right and Left Images are Misaligned in Displacement along the Z axis: The right and left images are misaligned in displacement along the Z axis; The position of the lamp filament is incorrect. Note: Adjust the filament position according to the proper procedure for adjustment of the lamp filament position.
  • Page 184 Method of Cenering the Lamp Filament for the DS The filament position of the 6V lamp for the DS is not always aligned at the center of the lamp. At present, it is very difficult to position the filament at the center of the lamp in manufacturing the lamps. Therefore, each time the lamp is replaced, the lamp filament must be aligned at the center of the lamp.
  • Page 185 If the Image Rotates when the Object is Moved Along the Z axis: There is some play in the Z axis adjusting screw, so the screw should be replaced. When Water Leaks from the Water Cooling Joint: When water leaks from the water cooling joint part or the cap; [Cause] This leakage is caused by corrosion of an O-ring or looseness of the joint of the cap.
  • Page 186 Cleaning Method of Lens Use adequate care not to allow dust or fingerprints to contaminate the optical parts such as the lenses. The surface of the prism inside the ocular lens cylinder and the inside face of the objective lens are particularly difficult to clean.

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