Maintenance; Cleaning - Veeco Dimension 3100 Manual

Maintenance, Troubleshooting and Warranty

Maintenance

18.1 Maintenance
Generally, the Dimension 3100 system requires very little maintenance. A simple schedule of
cleaning and calibration check is usually sufficient.
Every three months:
1. Wipe down the major components of the instrument.
2. Clean the SPM stage.
3. Check the air table for proper level and isolation.
4. Check piezo calibration.

18.1.1 Cleaning

Major Components
The D3100 is essentially an assortment of electronic boxes. You should use the same care with this
equipment as with other laboratory instruments. Wipe the exterior of the system with clean paper
towels or a cloth dampened with water or alcohol. Dispose of wipes in an appropriately labelled
solvent-contaminated waste container.
SPM Stage
The surfaces of the granite base, sample chuck and chuck manifold should be wiped down with a
lint-free cloth dampened with acetone. To properly perform this:
1. Remove the scanner from the Z stage and place it in a safe place.
2. Remove the sample chuck by lifting it off of the chuck manifold.
3. Disconnect the manifold from the X stage assembly by removing the three Phillips head
screws that pass through the X flexure.
CAUTION:
4. Lift the manifold off of the granite base.
5. Wipe the top of the granite stage base.
338
Do not remove the vacuum hoses on the side of the manifold! The
upper hose has a wire inside that will be damaged if the hoses are
pulled off.
Dimension 3100 Manual Rev. D