1. Manuals
  2. Brands
  3. Varian Manuals
  4. Security Sensors
  5. 979 Series
  6. Operation manual

Varian 979 Series Operation Manual

Helium mass spectrometer leak detector
Hide thumbs
Table of Contents

Advertisement

Quick Links

Download this manual
vacuum technologies
Model 979 Series
OPERATIONS MANUAL
Helium
Mass Spectrometer
Leak Detector
Manual No. 699909979
Revision K
September 2003

Advertisement

Table of Contents
loading
Need help?

Need help?

Do you have a question about the 979 Series and is the answer not in the manual?

Questions and answers

Related Manuals for Varian 979 Series

Summary of Contents for Varian 979 Series

  • Page 1 Model 979 Series OPERATIONS MANUAL Helium Mass Spectrometer Leak Detector Manual No. 699909979 Revision K September 2003...
  • Page 2 Model 979 Series Helium Mass Spectrometer Leak Detector Contra-Flow, ConvecTorr, and TriScroll are trademarks or registered trademarks of Vacuum Technologies. Alconox is a registered trademark of Alconox, Inc. Apiezon is a registered trademark of M&I Materials Ltd. Loctite and PST are registered trademarks of Loctite Corporation.

  • Page 3: Warranty

    Model 979 Series Helium Mass Spectrometer Leak Detector Warranty Products manufactured by Seller are warranted against defects in materials and workmanship for twelve (12) months from date of shipment thereof to Customer, and Seller’s liability under valid war- ranty claims is limited, at the option of Seller, to repair, to replace, or refund of an equitable portion of the purchase price of the Product.
  • Page 4 Model 979 Series Helium Mass Spectrometer Leak Detector This page intentionally left blank.

  • Page 5: Table Of Contents

    Pumps ...........................xxi Vacuum Technologies Services ....................xxii Contacting Vacuum Technologies .................... xxii Section 1. Introduction to the Model 979 Series ................1-1 1.1 The Model 979 ........................1-1 1.1.1 Model 979 Series Configurations ................1-1 1.2 Unpacking the 979 ....................... 1-7 1.2.1 Unpacking Instructions....................
  • Page 6 Model 979 Series Helium Mass Spectrometer Leak Detector Section 2. Operating the 979 Leak Detector ................... 2-1 2.1 Initial Startup and Shutdown ....................2-1 2.1.1 Startup ........................2-1 2.1.2 Calibration ........................2-1 2.1.3 Shutdown ........................2-1 2.2 Operator Interface........................ 2-2 2.2.1 Sniffer Set-Up Procedure ....................
  • Page 7 Model 979 Series Helium Mass Spectrometer Leak Detector Section 3. Service ........................... 3-1 3.1 Version ..........................3-1 3.1.1 Manual Zeroing and Calibrate..................3-3 3.1.1.1 AUTO-ZERO < 0 .................... 3-3 3.1.1.2 Gain ........................ 3-4 3.1.1.3 Offset ......................3-4 3.1.2 Manual Spectube Tuning .................... 3-4 3.1.2.1 Changing Manual Tuning Parameters ............
  • Page 8 Model 979 Series Helium Mass Spectrometer Leak Detector Appendix A. Rear Panel Interface Connectors ................A-1 A.1 Optically Isolated Outputs....................A-1 A.2 Optically Isolated Inputs ......................A-3 A.3 Non-Isolated Serial and Analog Interfaces ................A-4 A.4 Remote Control Connector....................A-5 Appendix B. Communications Protocol ..................B-1 B.1 Protocol (RS-232)........................B-1...
  • Page 9 Model 979 Series Helium Mass Spectrometer Leak Detector List of Figures 979 Bench Mount Unit ......................1-1 Single, Oil-Sealed Mechanical Pump Configuration on Two-Wheel Cart ......1-2 Single, Dry Mechanical Pump Configuration on Two-Wheel Cart ........1-3 Single, Dry Mechanical Pump Configuration on Four-Wheel Cart........1-4 Dual, Oil-Sealed Mechanical Pump Configuration on Four-Wheel Cart ......
  • Page 10 Model 979 Series Helium Mass Spectrometer Leak Detector Removing the Connectors ....................4-7 Wing Nut ..........................4-8 KF-25 Quick Clamp ......................4-8 Magnet Body Bracket Screws..................... 4-9 Magnet Assembly Slotted Screws ..................4-10 Tuning Magnet Set Screws....................4-10 Button TC Assembly ......................4-11 4-10 Removing the Button TC ....................
  • Page 11 Model 979 Series Helium Mass Spectrometer Leak Detector List of Tables 979 Series Specifications....................1-18 Sniffer Mode Sensitivity Range (Full Scale)............... 2-5 979 Operating States ....................... 2-10 979 Condition States......................2-10 System Information Screen Conditions................2-12 979 Standard Sensitivity Leak Detector................2-23 979 High Sensitivity Leak Detector ..................
  • Page 12 Model 979 Series Helium Mass Spectrometer Leak Detector This page intentionally left blank.

  • Page 13: Declaration Of Conformity

    Model 979 Series Helium Mass Spectrometer Leak Detector to which this declaration relates is in conformity with the following standard(s) or other normative documents. auf das sich diese Erklärung bezieht, mit der/den flogenden Norm(en) oder Richtlinie(n) übereinstimmt.

  • Page 14: Preface

    Model 979 Series Helium Mass Spectrometer Leak Detector Preface Hazard and Safety Information Some common international symbols used in this manual and the equipment itself are shown below. ° OFF Power Switch Position Earth Ground ON Power Switch Position Hot Surface AC –...

  • Page 15: Solvents

    Model 979 Series Helium Mass Spectrometer Leak Detector Solvents The mechanical components of leak detectors are typically CAUTION cleaned with alcohol, methanol, or other solvents. When heated, sprayed, or exposed to high-temperature equipment, these solvents become flammable and explosive, causing serious injury or death. Do not use these solvents near a high-temperature source.

  • Page 16: Equipment, General

    Model 979 Series Helium Mass Spectrometer Leak Detector Equipment, General The leak detector is not designed for use with hazardous gases. WARNING Verify that the system to be tested has been purged of all hazardous gases prior to using the leak detector.When testing a...

  • Page 17: Power And Static

    Vacuum Technologies strongly recommends the use of surge CAUTION protection to improve the immunity of the 979 Series leak detectors against unidirectional transients caused by the following phenomena: ❑...
  • Page 18 Model 979 Series Helium Mass Spectrometer Leak Detector This equipment is designed to meet current EEC regulations: WARNING LVD (Low Voltage Directive, 73/23/EEC) and EMC (Electromagnetic Compatibility, 89/336/EEC Directive) for Installation Category II, Pollution Degree II environment for Industrial, Scientific, Measuring and Process Control electrical equipment.

  • Page 19: Vacuum Equipment And Cleanliness

    Model 979 Series Helium Mass Spectrometer Leak Detector This equipment generates, uses, and can radiate RF energy and CAUTION if not installed and used in accordance with the instructional manual, may cause harmful interference to radio communications. When this equipment is operated in a commercial environment operation is subject to the following two conditions: ❑...

  • Page 20: O-Ring Care

    Model 979 Series Helium Mass Spectrometer Leak Detector O-ring Care When removing, checking or replacing O-rings, keep in mind the following: Vacuum Technologies recommends replacing all O-rings NOTE during routine maintenance or during any maintenance procedure requiring that O-rings be removed.

  • Page 21: Spectrometer Tube

    Model 979 Series Helium Mass Spectrometer Leak Detector Spectrometer Tube The spectrometer tube operates at a very high vacuum CAUTION produced by the high vacuum pump. Service of the spectrometer tube requires that this vacuum be vented to the atmosphere.

  • Page 22: Vacuum Technologies Services

    Model 979 Series Helium Mass Spectrometer Leak Detector The vacuum pumps are also compressors; incorrect operation WARNING may be dangerous. Study the “Mechanical Pump Operation Manual” enclosed with your pump before starting pumps. The pumps are designed to prevent any thermal risk for user safety.

  • Page 23: Section 1. Introduction To The Model 979 Series

    1.1.1 Model 979 Series Configurations This section contains outline drawings of the various configurations of the 979 Series leak detector. Figure 1-1 shows the outline drawing and physical dimensions of the stand-alone, bench-mount 979 Series Leak Detector.

  • Page 24: Single, Oil-Sealed Mechanical Pump Configuration On Two-Wheel Cart

    Model 979 Series Helium Mass Spectrometer Leak Detector Figure 1-2 shows the outline drawing and physical dimensions of a single, oil sealed mechanically pumped leak testing station with the 979 Series Leak Detector on a two-wheel cart. Figure 1-2 Single, Oil-Sealed Mechanical Pump Configuration on Two-Wheel Cart...

  • Page 25: Single, Dry Mechanical Pump Configuration On Two-Wheel Cart

    Model 979 Series Helium Mass Spectrometer Leak Detector Figure 1-3 shows the outline drawing and physical dimensions of a single, dry mechanically pumped leak testing station with the 979 Series Leak Detector mounted on a two-wheel cart. Figure 1-3 Single, Dry Mechanical Pump Configuration on Two-Wheel Cart...

  • Page 26: Single, Dry Mechanical Pump Configuration On Four-Wheel Cart

    Model 979 Series Helium Mass Spectrometer Leak Detector Figure 1-4 shows the outline drawing and physical dimensions of a single, dry mechanically pumped leak testing station with the 979 Series Leak Detector on a four-wheel cart. Figure 1-4 Single, Dry Mechanical Pump Configuration on Four-Wheel Cart...

  • Page 27: Dual, Oil-Sealed Mechanical Pump Configuration On Four-Wheel Cart

    Model 979 Series Helium Mass Spectrometer Leak Detector Figure 1-5 shows the outline drawing and physical dimensions of a dual, oil sealed mechanically pumped leak testing station with the 979 Series Leak Detector on a four-wheel cart. Figure 1-5 Dual, Oil-Sealed Mechanical Pump Configuration on Four-Wheel Cart...

  • Page 28: Dual, Dry Mechanical Pump Configuration On Four-Wheel Cart

    Model 979 Series Helium Mass Spectrometer Leak Detector Figure 1-6 shows the outline drawing and physical dimensions of a dual, dry mechanically pumped leak testing station with the 979 Series Leak Detector on a four-wheel cart. Figure 1-6 Dual, Dry Mechanical Pump Configuration on Four-Wheel Cart...

  • Page 29: Unpacking The 979

    Model 979 Series Helium Mass Spectrometer Leak Detector 1.2 Unpacking the 979 The 979 leak detector is carefully packed onto a resiliently mounted skid and enclosed by a heavy cardboard container banded to the skid. Upon receipt, inspect the container for evi- dence of damage in shipment.

  • Page 30: Removing The 979 From The Skid

    Model 979 Series Helium Mass Spectrometer Leak Detector 1.2.2 Removing the 979 from the Skid There are two methods for removing the 979 from the skid. Both methods require two people. The second method involves removing the Skid-Mates (the blue donut-shaped mounts at the front of the skid) from the skid.

  • Page 31: Services Required For Operation

    For indoor use only, Pollution Degree II in accordance with UL3101-1 Standard. Vacuum Technologies strongly recommends the use of surge CAUTION protection to improve the immunity of the 979 Series leak detectors against unidirectional transients caused by the following phenomena: ❑...

  • Page 32: Helium

    1.4 Preparation for Operation Pre-operational set up is minimal for the 979 Series leak detector. Oil sealed vacuum pumps are shipped with the proper initial charge of oil. On the front of the roughing and forepumps is an oil level sight glass. The oil level should be in the middle of the glass when the pump is not running.

  • Page 33: Installation

    Model 979 Series Helium Mass Spectrometer Leak Detector 1.5 Installation The 979 Series leak detector is delivered completely assembled as ordered. Locate the 979 close to its power source and be sure there is at least four inch clearance for proper ventilation, and sufficient room for the operator to safely maneuver to perform testing.

  • Page 34: Storage

    Model 979 Series Helium Mass Spectrometer Leak Detector 1.6 Storage If the leak detector is not used immediately, it can be stored as received without special precautions. A dry, relatively dust-free area is preferred. The required environmental conditions for storage are: ❑...
  • Page 35 Model 979 Series Helium Mass Spectrometer Leak Detector ➀ Leak Rate Display The large bar graph displays the leak rate in one of two forms: ❑ A mantissa on the bar and a numerical exponent ❑ Just the bar as a logarithmic bar graph display The label for the bar graph changes to indicate the current mode of operation.

  • Page 36: Rear Panel Controls

    Model 979 Series Helium Mass Spectrometer Leak Detector Under The UNDER range light indicates that the measured helium leak rate is currently less than the minimum displayable value. The light may flash briefly as the system recovers from a leak indication and the displayable leak rate approaches zero.

  • Page 37: Power Control And Circuit Breakers

    Model 979 Series Helium Mass Spectrometer Leak Detector ➀ I/O connector The I/O connector is a 37-pin female D-type connector. Access to all discrete input/output functions, RS-232, reject set points, and analog leak rate output signals are available at this connector. A detailed summary of information related to I/O communications is provided in Appendix B “Communications Protocol”.
  • Page 38 Model 979 Series Helium Mass Spectrometer Leak Detector ➀ Main Power The power entry module contains the main power ON/OFF switch/ Switch/Circuit circuit breaker. The 979 may be powered down in any state. Upon Breaker power down, all internal valves close in order to protect and main- tain the cleanliness of the vacuum system.

  • Page 39: Universal Remote Option

    The Universal Remote shown in Figure 1-11 allows the operator limited control of the 979 Series Leak Detector at a distance of up to 25 feet from the unit. The Universal Remote is connected through the port labeled Varian Remote Control on the rear panel (see Figure 1-9 on page 1-14).

  • Page 40: Specifications

    Model 979 Series Helium Mass Spectrometer Leak Detector 1.10 Specifications The specifications for the 979 Series Leak Detector are provided in Table 1-1. Table 1-1 979 Series Specifications Specifications 979 Helium Mass Spectrometer Versions System Sensitivity Standard Sensitivity High Sensitivity...
  • Page 41 Model 979 Series Helium Mass Spectrometer Leak Detector Table 1-1 979 Series Specifications (Continued) Specifications 979 Helium Mass Spectrometer Versions Pressure Indication Test port and spectrometer pressure bar graph displays and test port pressure alphanumeric indication on LCD display. Spectrometer Tube Sensitivity optimized design, header mounted ion source with dual thoria-coated ®...
  • Page 42 Model 979 Series Helium Mass Spectrometer Leak Detector Table 1-1 979 Series Specifications (Continued) Specifications 979 Helium Mass Spectrometer Versions 89/392/EEC Directive; EN61326:1997. Dimensions See Outline Drawings (Figure 1-1 on page 1-1 to Figure 1-6 on page 1-6). Weight 50 lb. (23 kg) net – stand-alone, bench-mount unit.

  • Page 43: Section 2. Operating The 979 Leak Detector

    Model 979 Series Helium Mass Spectrometer Leak Detector Section 2. Operating the 979 Leak Detector 2.1 Initial Startup and Shutdown 2.1.1 Startup Plug the leak detector power cord into an appropriate receptacle and place the power switch on the rear power control panel in the l position.

  • Page 44: Operator Interface

    Model 979 Series Helium Mass Spectrometer Leak Detector 2.2 Operator Interface The front panel of the Model 979 is shown in Figure 2-1. Operation controls include buttons for AUDIO VOLUME, SNIFFER, ZERO, READ STANDARD LEAK, CALIBRATE, TEST, HOLD and VENT functions. In addition to the basic control buttons, the 979 utilizes a touch panel display for the initial set-up of the leak detector.
  • Page 45 Model 979 Series Helium Mass Spectrometer Leak Detector The ZERO button is only active while the leak detector is in the test state. Press the ZERO button to cause the 979 to read the background leak rate signal plus electronic noise signal for the current flow rate (for example, mid-stage), store the reading in memory, and then reset the zero reference point on the leak rate display.
  • Page 46 Model 979 Series Helium Mass Spectrometer Leak Detector The Audio leak rate indication volume is controlled by the two buttons labeled HI and LOW and with up and down arrows. Press the HI arrow button to increase the volume of the tone. Press the LOW arrow button to decrease the volume of the tone.

  • Page 47: Sniffer Set-Up Procedure

    Model 979 Series Helium Mass Spectrometer Leak Detector 2.2.1 Sniffer Set-Up Procedure 1. Vent the 979 and insert a Vacuum Technologies Power Probe (Part Number K9565306) into the test port. Refer to the product catalog for additional Power Probe configurations.

  • Page 48: Touch Panel Menus

    Model 979 Series Helium Mass Spectrometer Leak Detector 2.3 Touch Panel Menus The 979 Leak Detector uses a touch panel display for the initial set-up and configuration of the leak detector. Once the leak detector is set up and configured for a specific application, basic operation is controlled primarily by the clearly labeled buttons described in the previ- ous section.

  • Page 49: Selecting Options In Touch Panel Screens

    Model 979 Series Helium Mass Spectrometer Leak Detector 3. Touch the NXT arrow to select the next digit to be changed and set its value by repeating step 2. 4. Touch the OK box to accept changes and store the new value of the parameter into the memory of the leak detector.

  • Page 50: Touch Panel Home Screen

    Model 979 Series Helium Mass Spectrometer Leak Detector 2.4 979 Touch Panel Home Screen The 979 Touch Panel Home Screen displays a summary of the following status and configuration settings: ❑ Digital Leak Rate Display ❑ Test Port Pressure ❑ Leak Detector Status (not shown) ❑ Condition Indication (not shown) ❑...

  • Page 51: Test Port Pressure

    Model 979 Series Helium Mass Spectrometer Leak Detector 2.4.2 Test Port Pressure The Test Port Pressure value displayed on the touch panel Home screen represents the test port pressure as measured by a thermocouple device mounted on the valve block just below the test port.

  • Page 52: Operating States

    Model 979 Series Helium Mass Spectrometer Leak Detector Table 2-2 979 Operating States Display Description CALIBRATING Indicates that the leak detector is currently performing a calibration routine. The leak detector reverts to HOLD mode while calibrating to the internal leak standard.
  • Page 53 Model 979 Series Helium Mass Spectrometer Leak Detector Table 2-3 979 Condition States (Continued) Display Description FILAMENT 2 BURNT OUT Indicates that filament 2 of the ion source has burnt out. Filament 1 will automatically light, if it is still good, and the leak detector will display a flashing C in the leak rate exponent indicating that a calibration routine is required.

  • Page 54: System Information Screen

    Model 979 Series Helium Mass Spectrometer Leak Detector 2.5 979 System Information Screen The System Info screen, shown in Figure 2-6, displays details of the current leak detector set-up and operating conditions. The left-hand column displays filament status, reject set point status, turbo status, gross leak configuration, auxiliary rough pump set-up, auto sequencer status, and audio set point status.
  • Page 55 Model 979 Series Helium Mass Spectrometer Leak Detector Table 2-4 System Information Screen Conditions (Continued) CONDITION DISPLAY DESCRIPTION GROSS LEAK GROSS LEAK: INSTALLED Gross leak installed–standard on dual pump configurations. GROSS LEAK: NOT INSTALLED Gross leak not installed. ION SOURCE FILAMENT FIL 1 OFF Filament 1 is selected and not lit.

  • Page 56: First Menu Selection Screen

    Model 979 Series Helium Mass Spectrometer Leak Detector 2.6 First Menu Selection Screen Touch the MENUS box on the Home screen to display the Main Menu screen (Figure 2-7). The Main Menu screen displays the screens available for performing general set-up of the 979.

  • Page 57: Selecting Internal Or External Calibrated Leak For Calibration

    Model 979 Series Helium Mass Spectrometer Leak Detector 2.6.1.1 Selecting Internal or External Calibrated Leak for Calibration Touch the USE INT/EXT LEAK box to switch between selecting whether the 979 performs an automated calibration to the optional internal calibrated leak or to an external calibrated leak placed in the test port.

  • Page 58: Reject And Audio Set Points

    Model 979 Series Helium Mass Spectrometer Leak Detector 2.6.2 Reject and Audio Set Points Touch the REJECT & AUDIO SET POINTS box to display the Reject and Audio Set Points screen (Figure 2-9). From this screen set the parameters to enable/disable, display and/or change the value of the four reject set points and the audio set point.

  • Page 59: Auto Sequencer Set-Up

    Model 979 Series Helium Mass Spectrometer Leak Detector 2.6.3 Auto Sequencer Set-Up Touch the AUTO SEQUENCER SET-UP box to display the Auto Sequencer Set-Up screen Figure 2-10. Auto sequencer provides the ability to set up the 979 so that it automatically runs through a complete test cycle (START/ROUGH/TEST/VENT), passing or failing the test part per the test specification entered by the user.

  • Page 60: Auto Sequencer Set-Up Controls

    Model 979 Series Helium Mass Spectrometer Leak Detector 2.6.3.1 Auto Sequencer Set-Up Controls ROUGH TIME The ROUGH TIME variable determines the amount of time that the leak detector is allowed to evacuate the test object to the tolerable test transfer pressure. In AUTO SEQUENCER mode, the 979 trans- fers into test as soon as the tolerable transfer pressure is met.

  • Page 61: Rough Pump Set-Up

    Model 979 Series Helium Mass Spectrometer Leak Detector 2.6.4 Rough Pump Set-Up Touch the ROUGH PUMP SET-UP box to display the Rough Pump Set-Up screen (Figure 2-11), which provides the end user with the ability to select the function of the dedi- cated rough pump on a dual pump system.

  • Page 62: Inputting The Rough Pump And Forepump Sizes

    Model 979 Series Helium Mass Spectrometer Leak Detector 2.6.4.2 Inputting the Rough Pump and Forepump Sizes The next two toggle boxes are used to select the ROUGH PUMP SIZE and the FORE PUMP SIZE on dual mechanical pump systems. ❑...

  • Page 63: Range Stop And Manual Range Set-Up And Control

    Model 979 Series Helium Mass Spectrometer Leak Detector 2.6.5.1 Range Stop and Manual Range Set-Up and Control RANGE STOP The RANGE STOP feature configures the 979 so that it only auto-ranges down to the pre-selected decade entered in the range stop variable field.

  • Page 64: Selecting Fine Test Or Gross Test Only Mode

    Model 979 Series Helium Mass Spectrometer Leak Detector 2.6.5.2 Selecting Fine Test or Gross Test Only Mode Touch the USE FINE TEST (GROSS TEST ONLY) box to toggle the leak detector between a fine test (normal) operating mode and a gross leak test only mode.

  • Page 65: Standard Sensitivity Leak Detector

    Model 979 Series Helium Mass Spectrometer Leak Detector Table 2-5 979 Standard Sensitivity Leak Detector Test Fine Gross (2 Pump) Range –9 –8 –7 –6 –5 –4 –3 –2 –1 Valve Path MS/CF MS/CF CF** CF/GL GL*** Transfer Pressure 100 mTorr /...

  • Page 66: Output Control Set-Up

    Model 979 Series Helium Mass Spectrometer Leak Detector 2.6.6 Output Control Set-Up Touch the OUTPUT CONTROL SET-UP box to display the Output Control Set-Up screen (Figure 2-13). From this screen, select the desired leak rate output, BARGRAPH DISPLAY mode, and the RS-232 communication protocol.

  • Page 67: Leak Detector Logarithmic Output Voltage

    Model 979 Series Helium Mass Spectrometer Leak Detector Figure 2-14 Leak Detector Logarithmic Output Voltage Figure 2-15 Leak Detector Linear Output Voltage 2-25...

  • Page 68: Serial Communications Protocol Set-Up

    Model 979 Series Helium Mass Spectrometer Leak Detector 2.6.6.3 Serial Communications Protocol Set-Up The Output Control Set-Up screen also allows for the selection of RS-232 communication parameters, BAUD RATE, STOP BITS, and PARITY (see Appendix B “Communications Protocol”). 2.6.7 Transfer Pressure Set-Up Touch the TRANSFER POINTS SET-UP selection box to display the Transfer Pressure Set-Up screen (Figure 2-16).

  • Page 69: Next And Back Boxes

    Model 979 Series Helium Mass Spectrometer Leak Detector GROSS LEAK XFER The GROSS LEAK XFER set point determines the test pressure cross over point at which the 979 transfers into the GROSS LEAK TEST mode from Roughing mode. In the GROSS LEAK TEST mode, the...

  • Page 70: Second Menu Selection Screen

    Model 979 Series Helium Mass Spectrometer Leak Detector 2.7 Second Menu Selection Screen The Second Menu screen (Figure 2-17) displays the screens available for performing general set-up and service functions. Touch the BACK box from this screen to display the First Menu screen.

  • Page 71: Section 3. Service

    Model 979 Series Helium Mass Spectrometer Leak Detector Section 3. Service This section discusses the VERSION and SERVICE menus, which are accessed from the Second Menu screen (Figure 3-1). These menus provide access to information and proce- dures that are generally outside of day-to-day operations. Most of these functions should be performed by trained service personnel as they significantly affect the performance of the Model 979.

  • Page 72: Service Menu Screen

    Model 979 Series Helium Mass Spectrometer Leak Detector Touch the VERSION box to display the revision and checksum of the main CPU and the front panel CPU software. Inquiry of the checksum information takes several seconds. Approximately 15 seconds after the revision data is displayed in full, the VERSION screen automatically reverts to the Second Menu screen.

  • Page 73: Manual Zeroing And Calibrate

    Model 979 Series Helium Mass Spectrometer Leak Detector 3.1.1 Manual Zeroing and Calibrate Touch the MANUAL ZEROING and CALIBRATE box to display the Manual Zeroing and Cal screen (Figure 3-4), which provides control over the leak detector AUTO-ZERO < 0 feature and allows for viewing and adjusting the spectrometer tube Gain.

  • Page 74: Gain

    Model 979 Series Helium Mass Spectrometer Leak Detector 3.1.1.2 Gain Touch the GAIN box to manually adjust the calibration gain. The gain parameter is used to calibrate the leak detector to a known helium source. The gain parameter is adjusted after the leak detector has been tuned to helium.

  • Page 75: Changing Manual Tuning Parameters

    Model 979 Series Helium Mass Spectrometer Leak Detector 3.1.2.1 Changing Manual Tuning Parameters To change a manual tuning parameter: 1. Touch the box for the desired parameter. When you touch the box containing the desired variable, a highlighted indicator appears to the right of the numbers.

  • Page 76: Ion Voltage

    Model 979 Series Helium Mass Spectrometer Leak Detector 3.1.2.4 Ion Voltage Touch the ION VOLTAGE box to display the current ion voltage value of the Ion Source in the spectrometer tube. This value can also be manually adjusted. The ion voltage parameter is used to tune the leak detector, maximizing the leak detector output for a peak helium sig- nal.

  • Page 77: Manual Valve Control

    Manipulation of the valves through the Manual Valve Control CAUTION screen should only be done by persons who are extremely familiar with the 979 Series leak detector as damage to critical components (e.g., spectrometer tube) could occur. MANUAL VALVE CONTROL...

  • Page 78: Vacuum System Diagram

    Model 979 Series Helium Mass Spectrometer Leak Detector Table 3-2 979 Valve State Table - Dual Mechanical Pump System 979 Operating State VENT ROUGH GROSS TEST CONTRA-FLOW MIDSTAGE SNIFF MODE *O – Open **C – Closed TEST GROSS LEAK PORT...

  • Page 79: System Initialize Set-Up

    Model 979 Series Helium Mass Spectrometer Leak Detector 3.1.4 System Initialize Set-Up Touch the SYSTEM INIT SET-UP box to display the System Initialize Set-Up screen (Figure 3-8), which allows for the front panel push buttons to be enabled or disabled, and displays the current status of the buttons.

  • Page 80: System Pressure Gauge Calibration Procedure

    Model 979 Series Helium Mass Spectrometer Leak Detector 3.1.5.1 System Pressure Gauge Calibration Procedure This procedure allows for calibration of the system pressure thermocouple gauge. Both the Vacuum and Atmospheric Calibrations procedures must be performed in the order written.g 3.1.5.1.1 Vacuum (Low Pressure) Calibration 1.

  • Page 81: Atmospheric Calibration

    Model 979 Series Helium Mass Spectrometer Leak Detector 3.1.5.1.2 Atmospheric Calibration Calibration of the system pressure thermocouple (TC) gauge to atmosphere is only required if the system TC gauge tube is replaced or if calibration appears to be off. 1. Upon replacement of the system TC, unplug the mechanical pump(s) from the back of the 979 before powering up the leak detector.

  • Page 82: Vacuum (Low Pressure) Calibration

    Model 979 Series Helium Mass Spectrometer Leak Detector 3.1.5.2.1 Vacuum (Low Pressure) Calibration 1. Verify that the leak detector is in the SYSTEM READY condition (Figure 3-10 on page 3-10) and that a test port cap is in place. 2. Place the service key (T009) into the key switch and set the key switch to the SERVICE position.

  • Page 83: Section 4. Maintenance

    Model 979 Series Helium Mass Spectrometer Leak Detector Section 4. Maintenance Like other sensitive test equipment, a mass spectrometer leak detector requires periodic maintenance to ensure continued reliable operation. After prolonged use, the leak detector accumulates contaminants from even the cleanest of products tested. These contaminants eventually impair operation.
  • Page 84 Model 979 Series Helium Mass Spectrometer Leak Detector When removing, checking or replacing O-rings: Remove O-rings carefully with your fingers. Do not use metal CAUTION tools for this task. This prevents scratching of any sealing surfaces. Wipe all O-rings clean with a lint-free cloth before installation to ensure that no foreign matter is present to impair the seal.

  • Page 85: Scheduled Maintenance

    Model 979 Series Helium Mass Spectrometer Leak Detector For simplicity, the maintenance functions in this section are grouped by recommended frequency, as shown in Table 4-1, based on assumed everyday use. Table 4-1 Scheduled Maintenance Description Daily 12 Months Refer to Calibration check Section 4.1 “Daily Maintenance”...

  • Page 86: Daily Maintenance

    Model 979 Series Helium Mass Spectrometer Leak Detector 4.1 Daily Maintenance 4.1.1 Sensitivity Check 1. Press the READ STANDARD LEAK button. 2. Compare the value displayed on the HOME screen (Section 2.4 “979 Touch Panel Home Screen” on page 2-8) to the value of the known calibrated leak displayed on the SYSTEM INFORMATION screen (Section 2.5 “979 System Information Screen”...

  • Page 87: Removing The Spectrometer Tube Assembly

    Model 979 Series Helium Mass Spectrometer Leak Detector Table 4-3 Tools and Parts Required for Spectrometer Tube Overhaul Tools Screwdrivers Slotted and Phillips Gloves Butyl or polycarbonate, powder-free Parts Part Number Description 82850302 Ion Source R1266301 Button TC 670029096 Vacuum Technologies Spectrometer Tube Cleaning Kit O-rings (Parker 2-025 V747-75 Black) –...

  • Page 88: Front Panel

    Model 979 Series Helium Mass Spectrometer Leak Detector 1. Remove the 2 Phillips screws from the Model 979 front panel (Figure 4-1). Figure 4-1 Front Panel 2. Lean the top of the front panel forward to allow access to the spectrometer tube...

  • Page 89: Front View Of The Spectrometer Tube Assembly

    Model 979 Series Helium Mass Spectrometer Leak Detector 3. The spectrometer tube is located in the center front of the 979 just behind the front panel (Figure 4-2). ➀ ➁ ➂ Figure 4-2 Front View of the Spectrometer Tube Assembly ➀...

  • Page 90: Wing Nut

    Model 979 Series Helium Mass Spectrometer Leak Detector 5. Disconnect the ground cable from the spectrometer tube magnet by removing the screw ➀ with a slotted screwdriver (Figure 4-3 on page 4-7). ➀ 6. Remove the wing nut located underneath the shelf below the spectrometer tube (Figure 4-4).

  • Page 91: Magnet Body Bracket Screws

    Model 979 Series Helium Mass Spectrometer Leak Detector 8. Lift the spectrometer tube up and off of the tray and lay it down on a clean non-magnetic surface. If the spectrometer tube magnet comes in contact with a CAUTION magnetic surface, it may become de-magnetized causing the spectrometer tube to lose sensitivity.

  • Page 92: Magnet Assembly Slotted Screws

    Model 979 Series Helium Mass Spectrometer Leak Detector ➀ 9. Remove the 2 slotted screws that mount the spectrometer tube magnet assembly to the spectrometer tube body (Figure 4-7). ➀ Figure 4-7 Magnet Assembly Slotted Screws 10. Carefully slide the magnet assembly off of the spectrometer tube body.

  • Page 93: Removing The Button Tc

    Model 979 Series Helium Mass Spectrometer Leak Detector 4.3.2 Removing the Button TC ➀ 1. Remove the 4 Phillips screws that hold the Button TC header (Figure 4-9). ➀ Figure 4-9 Button TC Assembly ➁ 2. Remove the Button TC header (Figure 4-10) by pressing down on the Button TC ➀...

  • Page 94: Button Tc Wires (View With Header On)

    Model 979 Series Helium Mass Spectrometer Leak Detector 3. If the header and Button TC come up together, hold one hand under the Button TC to catch it, and push down on the center post to remove the header from the Button TC. Be careful not to damage the sensing wire.

  • Page 95: Removing The Ion Source

    Model 979 Series Helium Mass Spectrometer Leak Detector 4.3.3 Removing the Ion Source Store the Ion Source in a cool, dry area in a tightly sealed WARNING container. Wash hands thoroughly after handling the Ion Source and especially before smoking or eating.

  • Page 96: The Ion Source

    Model 979 Series Helium Mass Spectrometer Leak Detector 3. Examine the ion source (Figure 4-13) and cavity (Figure 4-14) for deposits and discoloration. When examination is completed, dispose of it properly or return it to Vacuum Technologies for exchange. Figure 4-13 The Ion Source ➀...

  • Page 97: Removing The Preamplifier

    Model 979 Series Helium Mass Spectrometer Leak Detector 5. Remove the ground slit plate (Figure 4-15) by placing a thin, slotted screwdriver snug into the slot and carefully twisting and prying with the screwdriver. Figure 4-15 Ground Slit Plate A locking screwdriver designed to grab onto the slot of a screw NOTE will work very well for this procedure.

  • Page 98: Remove The Magnetic Poles

    Model 979 Series Helium Mass Spectrometer Leak Detector 4.3.5 Remove the Magnetic Poles ➀ ➁ 1. Remove the 4 slotted screws to free the magnet pole piece (Figure 4-17). ➀ ➁ Figure 4-17 Magnetic Pole Piece 2. Pick up the spectrometer tube body and tilt it over to remove the magnetic pole piece.

  • Page 99: Examining And Cleaning The Spectrometer Parts

    Model 979 Series Helium Mass Spectrometer Leak Detector 4. Repeat steps 1, 2, and 3 (Section 4.3.5 “Remove the Magnetic Poles” on page 4-16) to remove the second magnetic pole piece (Figure 4-19) from the other side of the spectrometer tube body.

  • Page 100: Discolored Ground Magnet Pole Piece

    Model 979 Series Helium Mass Spectrometer Leak Detector 3. Using the Scotch-Brite pad, polish away any discolored areas of the magnetic pole pieces (Figure 4-21). Figure 4-21 Discolored Ground Magnet Pole Piece 4. Using the VacuSolv presaturated cleaning wipes and swabs (Figure 4-22), thoroughly wipe down all surfaces of the spectrometer tube body, magnetic pole pieces, and ground slit plate.

  • Page 101: Reassembly

    Model 979 Series Helium Mass Spectrometer Leak Detector 7. Carefully wipe down and inspect all O-rings before reusing. Replace all damaged O-rings (Figure 4-23). Figure 4-23 Inspecting the O-ring Vacuum Technologies recommends replacing all O-rings NOTE during routine maintenance or during any maintenance procedure requiring that the O-rings be removed.

  • Page 102: Ion Source Replacement Outside Of Annual Maintenance

    Model 979 Series Helium Mass Spectrometer Leak Detector 4.4 Ion Source Replacement Outside of Annual Maintenance The ion source has two filaments. The spare is automatically turned on when Filament 1 burns out, or manually by touching the filament selector box located on the MANUAL SPECTUBE TUNING screen (Figure 3-5 on page 3-4).

  • Page 103: Reassembly

    Model 979 Series Helium Mass Spectrometer Leak Detector 7. Gently slide the ion source out of the spectrometer tube body (Figure 4-12 on page 4-13). Dark carbon-like deposits around the ion source filament NOTE and/or a rainbow-like discoloration on the inside walls of the ion source cavity indicate that the spectrometer tube has been operated at too high a pressure.

  • Page 104: Mechanical Pump

    Model 979 Series Helium Mass Spectrometer Leak Detector 4.5 Mechanical Pump Most pumps require regular maintenance. Oil gets contaminated over time and has to be replaced. In a system with dry pumps, tip seals have to be checked for wear. The rough- ing and forepumps of the system must be maintained at the intervals recommended to ensure reliable leak detection by the Model 979.
  • Page 105 Model 979 Series Helium Mass Spectrometer Leak Detector Table 4-4 979 Spare Parts (Continued) Assembly Part Number Calibrated Leak (Low 8 Range) Call Vacuum Technologies Main Power Supply 659077039 Ion Source Controller PCB L9539302 Digital Interface PCB L9536301 Preamplifier Driver PCB...

  • Page 106: Accessory Item List

    Model 979 Series Helium Mass Spectrometer Leak Detector 4.7 979 Accessory Item List Table 4-5 979 Accessory Item List Assembly Part Number LDNW25 Inlet Adapter Kit LDNW25INADKIT Flapper Box, NW25 Flange L6241302 Power Probe, 10’ Length (NW25 Flange) K9565306 Power Probe, 25’ Length (NW25 Flange)

  • Page 107: Appendix A. Rear Panel Interface Connectors

    Optically isolated (5 VDC to 24 VDC) discrete I/O interface ❑ Non-isolated Serial RS-232 interface ❑ Non-isolated analog (0 V to 10 V) output for the 979 Series Leak Detectors. The Remote Control connector provides: ❑ Non-isolated serial interface and power connection for the Universal Remote A.1 Optically Isolated Outputs...

  • Page 108: Optically Isolated Output Circuit Sketch

    Model 979 Series Helium Mass Spectrometer Leak Detector Table A-1 Summary Table of Optically Isolated Outputs Output Name Momentary Description or Level Customer-supplied +5 VDC to +24 VDC for all P101 outputs. REJ 1 Level Active when Leak Rate is greater than set point #1.

  • Page 109: Optically Isolated Inputs

    Model 979 Series Helium Mass Spectrometer Leak Detector A.2 Optically Isolated Inputs Table A-2 provides the input information for the I/O discrete connections. Figure A-3 shows the input circuit sketch. Level inputs are optically isolated 5 VDC to 24 VDC, 3600 Ohm resistive loads, and require a 200 ms minimum pulse width.

  • Page 110: Non-Isolated Serial And Analog Interfaces

    Model 979 Series Helium Mass Spectrometer Leak Detector A.3 Non-Isolated Serial and Analog Interfaces Table A-3 provides non-isolated RS-232 serial interface and non-isolated analog output information. Figure A-4 shows the cable wiring diagram from a standard RS-232 9 Pin connection to the 979 D Sub 37P.

  • Page 111: Remote Control Connector

    Model 979 Series Helium Mass Spectrometer Leak Detector A.4 Remote Control Connector The D Sub 9S connector provides a non-isolated serial interface and a power connection for the Universal Remote unit. Table A-4 provides non-isolated serial and power information. Table A-4 Summary Table of Non-Isolated Serial and Power...
  • Page 112 Model 979 Series Helium Mass Spectrometer Leak Detector This page intentionally left blank.

  • Page 113: Appendix B. Communications Protocol

    Model 979 Series Helium Mass Spectrometer Leak Detector Appendix B. Communications Protocol This appendix defines the technical specifications for the RS-232 protocol to be used with the 979 Leak Detector. B.1 Protocol (RS-232) RS-232 ports operate at 9600 baud, 8 bits, no parity, and one stop bit.

  • Page 114: Communicating With

    Model 979 Series Helium Mass Spectrometer Leak Detector B.2 Communicating with RS-232 The RS232 Protocol is intended for diagnostic purposes and initial set-up inquires. The RS232 connection is located on the rear D-sub 37 pin connector (refer to Table A-3 on page A-4 and Figure A-4 on page A-4).
  • Page 115 Model 979 Series Helium Mass Spectrometer Leak Detector 7. Configure the following settings: ❑ Bits per second (baud rate) – 9600 ❑ Data bits: – 8 ❑ Parity: – None ❑ Stop bits: – 1 ❑ Flow Control: – None 8.

  • Page 116: Printing With Hyperterminal

    Model 979 Series Helium Mass Spectrometer Leak Detector B.2.2 Printing with HyperTerminal The easiest way to print information captured in HyperTerminal is to choose Print from the File menu. However, this method only prints information currently displayed on the screen.

  • Page 117: Internal Operating Parameters

    Model 979 Series Helium Mass Spectrometer Leak Detector Table B-1 lists inquiries that are used to determine internal operating parameters. All inquiries, except VER, begin with and end with <CR>. Table B-1 Internal Operating Parameters Inquiry Response ?ALL Nine lines. Each begins with a <cr><lf>. The first line reports the filament bias voltage.
  • Page 118 Model 979 Series Helium Mass Spectrometer Leak Detector Table B-1 Internal Operating Parameters (Continued) Inquiry Response ?PRESSURES Two lines. Each begins with a <cr><lf>. The first line consists of the words test port TC followed by a number in milliTorr. The second line consists of the words system TC followed by a number in mTorr.

  • Page 119: Non-Volatile Operating Parameters

    Model 979 Series Helium Mass Spectrometer Leak Detector Table B-1 Internal Operating Parameters (Continued) Inquiry Response ?TURBO Three lines. Each begins with a <cr><lf>. The first line consists of the words turbo followed by either Ok or Not Ok. The second line consists of the words turbo followed by either Fault or No Fault.
  • Page 120 Model 979 Series Helium Mass Spectrometer Leak Detector Table B-2 Non-Volatile Operating Parameters (Continued) Command Parameter INIT-ION A three-digit number of volts in the range 200 to 350, which sets the ion voltage of the ion source. INIT-LINEAR None. The leak rate analog output voltage becomes linear.

  • Page 121: Spectrometer Operating Parameters

    Model 979 Series Helium Mass Spectrometer Leak Detector The commands listed in Table B-3 are used to cause an immediate change in the spectrom- eter operating parameters. These Commands Do Not Change The Non-volatile Operating Parameters. Table B-3 Spectrometer Operating Parameters...
  • Page 122 Model 979 Series Helium Mass Spectrometer Leak Detector Table B-4 Leak Detection Actions (Continued) Command Action EXTERNAL Uses an external Calibrated Leak (in the test port). For Autocalibrate operations. FPEAK Adjusts the variable focus voltage to cause a maximum response to helium.

  • Page 123: Appendix C. Introduction To Leak Detection

    Through the use of modern mass spectrometer leak testing techniques, −9 as implemented by the 979 Series Helium Leak Detector, leak rates in the 10 std cc/sec range can be reliably detected. The discussion that follows provides a brief summary of specific information pertinent to the overall subject of leak detection.

  • Page 124: Terminology

    Model 979 Series Helium Mass Spectrometer Leak Detector C.3 Terminology The following terminology has application throughout this manual: Flow std cc/sec One cubic centimeter of gas per second at a pressure differential of one standard atmosphere (760 torr at 0 °C).

  • Page 125: Various Methods Of Testing For Leaks

    Model 979 Series Helium Mass Spectrometer Leak Detector C.4 Various Methods of Testing for Leaks There are many methods of testing for leaks in enclosures—either systems or containers. The more commonly used methods along with the range of accuracy provided are listed below: −3...

  • Page 126: Helium Mass Spectrometer Leak Detection (Msld

    Model 979 Series Helium Mass Spectrometer Leak Detector C.5 Helium Mass Spectrometer Leak Detection (MSLD) Helium is an excellent trace gas because it is the lightest of the inert gases and as a conse- quence readily penetrates small leaks. In addition, its presence in the atmosphere is minute (5 PPM or 4 millitorr absolute).

  • Page 127: Facts About Leak Rates

    Model 979 Series Helium Mass Spectrometer Leak Detector C.5.4 Facts About Leak Rates −5 Visualizing Leaks in std cc/sec: approximately 1 cc/day Everyday Terms −7 std cc/sec: approximately 3 cc/year Audible or Visual Detection by Observer −4 a. Bubbles rising...

  • Page 128: Test Piece Evacuated (Figure C-1A And Figure C-1B

    Model 979 Series Helium Mass Spectrometer Leak Detector C.6.1 Test Piece Evacuated (Figure C-1a and Figure C-1b) The object to be tested is evacuated by the leak detector roughing pump, then valved into the spectrometer vacuum system. The surface of the test object is then probed with a small jet of helium to locate individual leaks, or surrounded by helium (hooded) for an overall leak check.

  • Page 129: Test Piece Already Sealed (Figure

    Model 979 Series Helium Mass Spectrometer Leak Detector A sampling probe is connected to the leak detector. The object to be tested is filled with helium at the desired test pressure and the probe is moved over its surface. Some of the helium escaping from a leak is captured through the probe and enters the leak detector, thus locating the leak.

  • Page 130: Mass Spectrometer Leak Detector-Simplified Description

    Model 979 Series Helium Mass Spectrometer Leak Detector C.7 Mass Spectrometer Leak Detector—Simplified Description Each Model 979 consists basically of an analytical sensing tube called a spectrometer tube, electronics to operate the tube, and a vacuum system to maintain a very high vacuum within this tube (usually less than 0.1 millitorr or about one ten-millionth of ordinary atmo-...

  • Page 131: Magnetic Separation Principle

    Model 979 Series Helium Mass Spectrometer Leak Detector Test pieces are generally rough pumped (or, if pressurized, the chamber in which they are to be tested is rough pumped) by a mechanical vacuum pump before they are connected to the spectrometer tube. This prevents overloading the vacuum pumping system.
  • Page 132 Model 979 Series Helium Mass Spectrometer Leak Detector This page intentionally left blank.

  • Page 133: Index

    Model 979 Series Helium Mass Spectrometer Leak Detector Index Circuit Sketch Discrete I/O input A-3 About the Model 979 1-1 Discrete I/O output A-2 Analog output 2-24 Cleaning 1 V per decade log 2-24, 2-25 Button TC 4-18 Conversion charts 2-24, 2-25...
  • Page 134 Model 979 Series Helium Mass Spectrometer Leak Detector External calibration selection 2-15 Gross leak xfer 2-27 Gross test only mode 2-22 Fast calibration 2-15 Filament selection 3-6 Halogen C-3 Auto-filament selection 3-6 Helium C-3 Fil 1 active 3-6 Helium for sealing C-7...
  • Page 135 Model 979 Series Helium Mass Spectrometer Leak Detector Ion voltage Manual zeroing and calibrate (Cal) screen 3-3 Repeller voltage 3-5 Mass spectrometer leak detector C-8 Set parameter 3-6 Mass spectrometry principles C-4 Typical 3-6 Mechanical pump maintenance 4-22 Oil-sealed pump 4-22...
  • Page 136 Model 979 Series Helium Mass Spectrometer Leak Detector Power control and circuit breakers 1-15 Rough valve Circuit breakers 1-16 Circuit breaker 1-16 Forepump power 1-16 Roughing valve power 1-16 On/Off switch 1-16 RS-232 Serial non-isolated A-4 Rough pump power 1-16...
  • Page 137 Model 979 Series Helium Mass Spectrometer Leak Detector Suppressor voltage 3-6 Transfer pressure set-up screen 2-26 SYS INFO Turbo pump Touch screen boxes 2-9 Circuit breaker 1-16 SYS INFO box 2-8 System control and communication Ultrasonic C-3 panel 1-14, 1-15...
  • Page 138 Model 979 Series Helium Mass Spectrometer Leak Detector This page intentionally left blank.
  • Page 140 Tel (39) 011 997 9 111 Tel: (39) 011 997 9 111 Fax (39) 011 997 9 350 Brazil Fax: (39) 011 997 9 350 Varian Industria e Comercio Ltda. Japan Varian Vacuum Technologies Avenida Dr. Cardoso de Mello 1644 Customer Support and Service:...

Table of Contents