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OPERATION PROCEDURES FOR PHILIPS/FEI CM-20
TRANSMISSION ELECTRON MICROSCOPE
General Comments
Normally the microscope will be left in the power ON (standby ready to operate)
condition; i.e., all circuits will be continuously energized and the microscope will be under full
vacuum (MAIN, VACUUM, HIGH TENSION lamps on the right control panel are all lit if the
PANEL DIM is pressed). If it is not in this condition do not operate the microscope. Seek help
from authorized personnel.
If the microscope is in standby ready condition, proceed with the following abbreviated
procedures for high voltage application and alignment before beginning any observation. If the
microscope is not properly aligned, good results will not be obtained.
I. Start-Up (This procedure is when the microscope starts from cold)
(1) Run the cooling water (for vacuum and lens systems).
(2) Turn on the main power line (in mechanical room, behind the microscope room).
(3) Press the ON power switch on MICROSCOPE. The microscope will go through a series
of self check by the computer program. It will automatically turn on VACUUM
SYSTEM, and reach to the high vacuum state as indicated by the UHV and HI VAC
lights.
II. Specimen Exchange
(i) Specimen Unloading:
(1) Make sure specimen position is at center, i.e., SHIFT (right at 0, left at 10), TILT
indicator at 0 and 11 (HOLDER/azimuth) and tilt drive is engaged.
(2) From holding position (B): Pull out the specimen holder gently until it no longer moves
and then turn it clockwise about 180 degree until it stops (A position, make sure it no
longer turns, the indicator box face down).
(3) Gently extract the holder from the airlock.
(4) Place the specimen holder onto a proper sample holder stand/support for specimen
loading/unloading.
(ii) Specimen Loading:
(1) Set specimen onto suitable specimen holder. USE GLOVES! Caution: No direct
contact of your hand with a specimen holder and any other part which will be placed
inside the microscope.
WAC, 09/27/02
1
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Summary of Contents for Philips FEI CM-20
- Page 1 OPERATION PROCEDURES FOR PHILIPS/FEI CM-20 TRANSMISSION ELECTRON MICROSCOPE General Comments Normally the microscope will be left in the power ON (standby ready to operate) condition; i.e., all circuits will be continuously energized and the microscope will be under full vacuum (MAIN, VACUUM, HIGH TENSION lamps on the right control panel are all lit if the PANEL DIM is pressed).
- Page 2 (2) Hold the specimen holder with the airlock-opening pin up. Carefully insert the specimen holder into the airlock entry and slide it in until stop. At this point, pre-pumping of the airlock commences as indicated by illumination of the red airlock indicator light. (3) After hearing a click sound, grape the specimen holder and turn clockwise, the specimen holder will slide into a groove in the airlock by vacuum.
- Page 3 (4) Make sure the camera cover is correctly placed, and then press CAM AIR again to pump the camera chamber. You should be able to hear the mechanical pump starting. Pull on the camera lid to ensure the vacuum is pulling. (5) Press READY, then TEM CAMERA, and CAM INIT.
- Page 4 ROUTINE ALIGNMENT PROCEDURES FOR PHILIPS CM-20 TEM The following protocol is not intended to be specific. It is intended to be used as a mean to refresh one’s memory in carry out step by step procedures which are necessary to obtain reasonably good results with the transmission electron microscopes.
- Page 5 (6) Set voltage at 20. Push HIGH TENSION button (the green LED should light) Slowly increase voltage from 20 kV to 160 kV using soft keys (wait 1 minute between each step). (7) After voltage reaches 160 kV, press FREE CONTROL soft key. Use focus knob, slowly increase voltage from 160kV to 200kV.
- Page 6 by first making crossover image with INTENSITY knob, then open up condenser II (INTENSITY)/expand the beam and close condenser II on the opposite side of crossover. If the beam appears to swing this indicates the aperture is not properly centered. Center the aperture by moving the X and Y controls on the aperture housing.
- Page 7 (4) Condenser lens astigmatism correction - Press STIG to activate stigmator control. - Press COND soft key so that it is highlighted (the default is OBJ). - Condense the beam. - Use MULTIFUNCTION knobs to correct the astigmatism. The beam should be round when changing the setting of the INTENSITY knob, or the filament image will be sharpest if filament is under-saturated.
- Page 8 - Press ALGN to de-activate. (3) Voltage centering - Place a more or less symmetrical image to the center. - Condense the beam at the center of screen, and spread the beam. - Press ROT CENTER and VOLT soft keys in ALGN. - Make sure it is in the VOLT mode (check bottom right soft key).
- Page 9 (5) Change camera length (by changing MAGNIFICATION knob) to 44.0 mm. (6) Realign the diffraction pattern. (7) Repeat steps 4 to 6 until the transmitted spot remains at (near) the center while changing camera length between 44.0 mm to 3.2 m. (8) Deactivate ALGN, and depress D to get out of diffraction mode.
- Page 10 (2) Set a magnification at least 3 or 4 times higher than that will used for photographing. (3) Obtain the thinnest over-focus (Fresnel) fringe that can be clearly seen in the binocular, with beam spread. Caution: make sure you focus the binocular on the viewing screen. (4) Adjust the OJB STIG X and Y (MULTIFUNCTION keys) until the fringe follows the outline of the hole uniformly and symmetrically.
- Page 11 6. Press F4 to set alignment. When program asks for a file name, choose the file that has a file name of the most recent date and type this in (this is the alignment saved by Philips service engineer). Answer Y to the question to execute the program and bring you back to the cmointor page 7.