Related Manuals for Canon ANELVA M-332MX
Summary of Contents for Canon ANELVA M-332MX
- Page 1 sales@artisantg.com artisantg.com (217) 352-9330 | Visit our website - Click HERE...
- Page 2 FT-651-059 A-NET CRYSTALION GAUGE M-332MX OPERATION MANUAL . 5 .2010 . 28 .2009 . 11 .2000 EDITION DATE...
- Page 3 Foreign Exchange and Foreign Trade Control Law is necessary. Furthermore, when this product is transferred or disposed in Japan, please take notice of the place where it is dealt. © Copyright 2010 by Canon ANELVA Corporation All Rights Reserved.
- Page 4 In order to operate this instrument safely and correctly, always observe the safety precautions written below. Canon Anelva shall not accept any liability or guarantee for any damage incurred as a result of mishandling this instrument or failure to observe these safety precautions.
- Page 5 Repair or replacement shall be made without charge if any structural or design faults are found, or if a defect occurs due to the liability of Canon ANELVA within a period lasting twelve months after this product is received and inspected.
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Page 6: Specifications
FT651-059 Crystal Ion Gauge M-332MX Outline The A-NET Crystal Ion Gauge M-332MX is a transducer model vacuum gauge that can measure pressures over a wide range from 4 x Pa to atmospheric pressure. The vacuum gauge controller and the gauge head are incorporated into a single body. This vacuum gauge is a combination vacuum gauge that uses a crystal type vacuum gauge (crystal gauge), which employs a crystal oscillator, for measuring in the high-pressure region and a ionization... -
Page 7: Part Names And Functions
FT651-059 Part Names and Functions Table 2 Part Names and Functions Name Function ① D-Sub 15P connector D-Sub 15-pin connector used for power supply and input-output signals ② Crystal LED Indicates the operating status of the crystal gauge ③ B-A LED Indicates the operating status of the B-A gauge ④... -
Page 8: Part Dimensions
FT651-059 Part Dimensions NW40 flange φ34 Dsub15P Connector Unit[mm] Figure 1 Crystal Gauge M-322XG Dimensions Unpacking and Checking When you receive this product, immediately open the packaging and check all components are included. Inspect the outside for any external damage. Components Crystal gauge M-332MX main unit (with gauge head) D-Sub connector HDAB-15S (Hirose Denki) -
Page 9: Connecting To External Instruments
FT651-059 Connecting to External Instruments （1） Remote I/O Connector Pin Layout and Function Table 4 D-Sub Connector Pin Layout Pin No. Function Remarks DC Input (22 to 26 VDC) DC Input common (Note 1) Control signal Vcc IN (24V DC) Control signal power supply input (Note 2) Control signal Vcc common Filament ON/OFF input... - Page 10 FT651-059 ③ Input Signal Use Example Controller internal circuit External circuit 6.8k ３ Ｅｘｔ Ｖｃｃ ＩＮ ＋ ＋24V ５ － PS2501(k) ＦＩＬ ＯＮ／ＯＦＦ ＩＮＰＵＴ ４ Ｅｘｔ Ｖｃｃ ＣＯＭ D-Sub connector FIL ON/OFF input use example Figure 2 Input Signal Use Example （3）...
- Page 11 FT651-059 By removing the M3 screw locking the crystal gauge M-332MX gauge head as shown in the above figure, the gauge head can be pulled away and detached. When pulling away the gauge head, be certain to pull it straight. If stress is applied to the pins of the gauge head, there is a risk of a leak occurring at the gauge head pins.
- Page 12 FT651-059 Adjusting the Crystal Gauge Unit By adjusting the crystal gauge, measurements of greater accuracy can be obtained. Adjust the zero point and ATM as follows. （1） Zero Adjustment If foreign material becomes stuck to the sensor, the high vacuum pressure reading may drift higher.
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Page 13: Troubleshooting
Course of Action Check the power is supplied to the crystal gauge. If not restored even if the power is LED OFF supplied, contact Canon Anelva. Red illuminated Contact Canon Anelva Check the gauge head is properly connected to the controller. If there is no connection...