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Hitachi FlexSEM 1000 User Manual page 3

User guide / operation procedures

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o Note: It is recommended to scan first using Scan 2 at Slow4 or 5 before capturing
the image
o You may check the capture settings under Menu
Shutting Down
Once imaging is completed, select the STOP button at the top left corner to turn off the
electron beam
Select Specimen exchange button once it becomes available and allow time for the SEM to
fully vent the chamber with air
Once the chamber has finished processing air, open the airlock door, and using gloves,
remove the sample holder from the stage
Insert the airlock door until it is "locked" and a small gap remains in the door
o Note: If you are using the tilt holder, ensure that stage Z direction position must be
reset to ~23.0mm before closing the airlock door
Press the illuminated EVAC/AIR button on the front of the SEM
Once the microscope has established a vacuum, exit the SEM software
Turn off the power switch at the side of the SEM, and turn off the main switch mounted on
the wall for the SEM
Transfer your data, and complete the sign-up sheet
Page 3 of 3
Last edited: 14 August 2020

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