Varian VHS-6 Manuals

Varian VHS-6 Manuals

Manuals and User Guides for Varian VHS-6. We have 2 Varian VHS-6 manuals available for free PDF download: Instruction Manual

Varian VHS-6 Instruction Manual

Varian VHS-6 Instruction Manual (60 pages)

Diffusion Pumps

Brand: Varian | Category: Power Pump | Size: 0.99 MB

Table of Contents

Table of Contents
7
Instructions for Use
13
Introduction
21
- Pump Specifications
  21
- Pump Operational Specifications
  21
- VHS-4 Speed and Throughput Curves
  24
- VHS-4 Wiring Information
  24
- VHS-4 Dimensions
  25
- VHS-6 Speed and Throughput Curves
  26
- VHS-6 Wiring Information
  26
- VHS-6 Dimensions
  27
- VHS-250 Speed and Throughput Curves
  28
- VHS-250 Wiring Information
  28
- VHS-250 Dimensions
  29
Installation
30
- Unpacking
  30
- Pump Oil Installation
  30
- Vacuum System Connections
  31
- Cooling Water Connections
  31
- Electrical Connections
  32
- Thermal Switch
  33
Startup
35
Shutdown
36
General Maintenance
37
Inspection Requirements
37
Cleaning
38
VHS-4 and VHS-6 Cold Cap Removal/Installation
39
- VHS4 and VHS-6 Cold Cap Removal/Installation
  39
VHS-250 Cold Cap Removal/Installation
40
Jet Assembly Removal/Installation
41
- VHS-4 Diffusion Pump Jet Assembly
  42
- VHS-6 and 250 Diffusion Pump Jet Assembly
  43
Heater Replacement
44
- VHS-6 and VHS-250 Heater Mounting
  44
- VHS-4 Heater Mounting
  45
Pump Fluid Charge
46
Leakage
47
Outgassing
47
Poor Pump or System Performance
48
- VHS-4 Models
  51
- VHS-4 Replacement Parts
  51
- VHS-6 Models
  52
- VHS-6 Replacement Parts
  53
- VHS-250 Models
  54
- VHS-250 Replacement Parts
  54

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Varian VHS-6 Instruction Manual

Varian VHS-6 Instruction Manual (30 pages)

Diffusion pump

Brand: Varian | Category: Water Pump | Size: 0.33 MB

Table of Contents

Table of Contents
13
Section I - Installation

14
- Specifications
  14
- Installation
  15
- Unpacking
  15
- Pump Oil Installation
  15
- Vacuum System Connections
  16
- Cooling Water Connections
  16
- Electrical Connections
  17
- Thermal Switch
  17
Section II - Operation

18
- Startup Procedure
  18
- Shutdown Procedure
  19
Section III - Maintenance and Service

20
- General
  20
- Periodic Inspection
  20
- Cleaning
  20
- Cold Cap Removal/Installation
  21
- Jet Assembly Removal/Installation
  22
- Heater Replacement
  23
- Adding Pump Fluid
  23
Section IV - Troubleshooting

24
- Leakage
  24
- Outgassing
  24
- Poor Pump or System Performance
  24
Section V - Replacement Parts

26
- Replacement Parts
  29

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