Edwards nEXT300D Manuals

Manuals and User Guides for Edwards nEXT300D. We have 2 Edwards nEXT300D manuals available for free PDF download: Instruction Manual

Edwards nEXT300D Instruction Manual

Edwards nEXT300D Instruction Manual (81 pages)

Turbomolecular Pumps

Brand: Edwards | Category: Water Pump | Size: 2.8 MB

Table of Contents

Table of Contents
3
Introduction

8
- Scope and Definitions
  8
- General Description
  9
- Pump Controller
  10
- Operational Features
  10
- Power Limit Setting
  10
- Standby Speed
  10
- Timer
  11
- Analogue Output
  11
- Automatic Vent Options
  11
- Normal Speed Setting
  12
- Logic Interface
  12
- Parallel Control and Monitoring
  12
- Serial Control and Monitoring
  12
- Serial Control with Parallel Monitoring
  13
- Parallel Control with Serial Monitoring or Serial Configuration
  13
- Controller Configuration (Serial Set-Up)
  13
Technical Data

14
Installation

32
Operation

52
- Configuring the Next Pump Using Serial Commands
  52
- Power Limit Setting
  52
- Powering a Fan from the Controller
  53
- Controlled Venting Options
  53
- Standby Speed Setting
  54
- Normal Speed Setting
  54
- Timer Setting and Options
  55
- Analogue Signal Options
  56
- Factory Settings
  56
- Assigning a Multi-Drop Address
  56
- Configuring the Next Pump Using a TIC
  57
- Start-Up
  58
- Close the Vent Valve
  58
- Pre-Start Checks
  58
- Operation with Parallel Control and Monitoring
  59
- Start the Pump
  59
- Running at Standby Speed
  59
- Stop the Pump
  59
- Parallel Monitoring
  59
- Operation with Serial Control and Monitoring
  59
- Delayed Start
  59
- Start the Pump
  60
- Standby Speed
  60
- Stop the Pump
  60
- Temperature Readings
  60
- Link Parameter Readings
  61
- Measured Motor Speed
  61
- Simultaneous Parallel and Serial Operation
  61
- Operation with a TIC
  61
- Decelerating and Venting
  61
- Operation at Extreme Conditions
  62
- Operation with High Inlet Pressure
  62
- Operation at High Temperatures
  62
- Operation at Over-Speed
  62
- Electrical Supply Failure
  62
- Bakeout
  63
Maintenance

66
- Introduction
  66
- Bearing and Oil Cartidge Maintenance
  66
- Rotor Life
  66
- Clean the External Surfaces of the Pump
  67
- Fault Finding
  67
- Flashing Service Codes
  70
- Flashing Error Codes
  70
- Decoding System Status Words
  71
- Useful Service Information
  73
Storage and Disposal

74
- Storage
  74
- Disposal
  74
Service, Spares and Accessories

76
- Introduction
  76
- Service
  76
- Returning a Pump for Service
  76
- Bearing and Oil Cartridge On-Site Maintenance
  76
- Spares
  77
- ISX Inlet-Screen
  77
- Inlet-Strainer
  77
- Inlet-Flange Seals and Integrated Inlet Screens
  77
- Accessories
  77
- Installation
  77
- ACX Air-Cooler
  77
- WCX Water-Cooler
  78
- BX Bakeout Band
  78
- TAV Vent-Valve and Vent-Port Adaptor
  78
- VRX Vent-Restrictor
  78
- Vent-Port Adaptor
  79
- PRX Purge-Restrictor
  79
- Next Exploded Accessories View
  80
- Next Exploded Accessories View
  81

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Edwards nEXT300D Instruction Manual

Edwards nEXT300D Instruction Manual (48 pages)

Brand: Edwards | Category: Water Pump | Size: 3.18 MB

Table of Contents

Table of Contents
5
Safety and Compliance
8
Definition of Warnings and Cautions
8
Safety Symbols
9
General Description
10
Overview
10
Figure 1 General View of the Pumping System
11
Technical Data
12
Operating and Storage Conditions
12
Mechanical Data
12
Figure 2 Dimensions (T-Station with E2M1.5 Backing Pump Option)
13
Pump Performance Data
14
Figure 3 Dimensions (T-Station with XDD1 Backing Pump Option)
14
Pumped Media
15
Venting Gas Specification and Vent Control Data
16
Materials Exposed to Gases Pumped
17
Electrical Connections
17
Figure 4: Max Allowed Rate of Pressure Rise During Venting: Pressure against Time
17
Figure 5 Pin Connections for 15-Way Sub-Miniature 'D' Type Socket
18
Electrical Data
19
Figure 6 Pin Connections for an 8-Way RJ45
19
Installation
20
Installation Safety
20
Unpack and Inspect
20
Locate the Pumping System
21
Bench Top Fixing
21
Bench Top Fixing with Straps
21
Bench Top Fixing with Screws
22
Fill the Pump with Oil
22
Connect to the Vacuum System
22
Figure 7 Bench Top Fixing with Straps
22
Connect to the Exhaust Extraction System
23
Connect the Electrical Supply
24
Configure the Pumping System
24
Turbo Pump Delay
24
Connect a Vacuum Gauge
25
Figure 8 Turbomolecular Pump Start Delay with XDD1 Diaphragm Pump
25
Commission the System
26
Installation Checklist
26
Test the System
26
Operation
27
Control Panel Description
27
Menu Structure
28
Figure 9 Menu Structure
28
Turbo Screen
29
Figure 10 Turbo Screen
29
Gauge Screen
30
Vent Valve Screen
30
Figure 11 Gauge Screen
30
Turbo Setpoint Screen
31
Figure 12 Vent Valve Screen
31
Figure 13 Turbo Setpoint Screen
32
Calibrate Gauge Screen
33
Figure 14 Turbo Setpoint Number Entry Mode
33
Figure 15 Calibrate Gauge Screen
33
Units Screen
34
Gas Ballast Control (E2M1.5)
34
Figure 16 Units Screen
34
Electrical Supply Failure
35
Maintenance
36
Maintenance Safety
36
Maintenance Plan
36
Inspect the Hoses, Pipelines and Connections
37
Factory Default Settings
37
Fault Finding
38
Error Numbers
39
Storage
40
Disposal
41
Service
42
Return the Equipment or Components for Service
42
Spares
44
Accessories
45
TAV Vent Valve and Vent Port Adaptor (for Next300 Turbo Pump)
45
Outlet Mist Filter(for E2M1.5 Rotary Vacuum Pump)
45

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