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PlanarDL-200XY Series
Aerotech PlanarDL-200XY Series Manuals
Manuals and User Guides for Aerotech PlanarDL-200XY Series. We have
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Aerotech PlanarDL-200XY Series manual available for free PDF download: Hardware Manual
Aerotech PlanarDL-200XY Series Hardware Manual (54 pages)
Brand:
Aerotech
| Category:
Industrial Equipment
| Size: 1.9 MB
Table of Contents
Planardl Hardware Manual
1
Table of Contents
3
List of Figures
4
List of Tables
5
Safety Procedures and Warnings
7
EU Declaration of Incorporation
9
Chapter 1: Overview
11
Table 1-1: Model Options
11
Environmental Specifications
12
Accuracy and Temperature Effects
12
Table 1-2: Environmental Specifications
12
Basic Specifications
13
Table 1-3: Planardl-100XY Series Specifications
13
Table 1-4: Planardl-200XY Series Specifications
14
Table 1-5: Planardl-300XY Series Specifications
15
Vacuum Operation
16
Chapter 2: Mechanical Specifications and Installation
17
Unpacking and Handling the Stage
17
Figure 2-1: Lifting Hardware and Shipping Brackets
18
Dimensions
19
Figure 2-2: Planardl-100XY Dimensions Without Cable Management
19
Figure 2-3: Planardl-100XY-CMS1 Dimensions
20
Figure 2-4: Planardl-100XY-CMS2 Dimensions
20
Figure 2-5: Planardl-200XY Dimensions Without Cable Management
21
Figure 2-6: Planardl-200XY-CMS1 Dimensions
22
Figure 2-7: Planardl-200XY-CMS2 Dimensions
22
Figure 2-8: Planardl-300XY Dimensions Without Cable Management
23
Figure 2-9: Planardl-300XY-CMS1 Dimensions
24
Figure 2-10: Planardl-300XY-CMS2 Dimensions
24
Securing the Stage to the Mounting Surface
25
Figure 2-11: Mounting Hole Locations
26
Table 2-1: Stage to Mounting Surface Hardware
26
Figure 2-12: Mounting Hole Locations Hidden by -CMS1
27
Attaching the Payload to the Stage
28
Figure 2-13: Planardl 100XY Cantilevered Load Capabilities
28
Figure 2-14: Planardl 200XY Cantilevered Load Capabilities
29
Figure 2-15: Planardl 300XY Cantilevered Load Capabilities
29
Chapter 3: Electrical Specifications and Installation
31
Motor and Feedback Connectors
32
Table 3-1: Motor Connector Pinout
33
Table 3-2: Mating Connector Part Numbers for the Motor Connector
33
Table 3-3: Feedback Connector Pinout
34
Table 3-4: Mating Connector Part Numbers for the Feedback Connector
34
Table 3-5: -CMS2 Third-Axis Motor Pinout
35
Table 3-6: Mating Connector Part Numbers for the -CMS2 Third-Axis Motor Connector
35
Table 3-7: -CMS2 Third-Axis Feedback Connector Pinout
36
Table 3-8: Mating Connector Part Numbers for the -CMS2 Third-Axis Feedback Connector
36
Motor and Feedback Wiring
37
Figure 3-1: Motor and Feedback Wiring
37
Motor and Feedback Specifications
38
Table 3-9: Feedback Specifications
38
Table 3-10: Planardl-100XY Motor Specifications
39
Table 3-11: Planardl-200XY Motor Specifications
40
Table 3-12: Planardl-300XY Motor Specifications
41
Table 3-13: Encoder Specifications
41
Limits, Marker, and Machine Direction
42
Figure 3-2: Machine Direction
42
Motor and Feedback Phasing
43
Figure 3-3: Hall Phasing
43
Figure 3-4: Analog Encoder Phasing Reference Diagram
44
Figure 3-5: Encoder Phasing Reference Diagram (Standard)
44
Chapter 4: Maintenance
45
Service and Inspection Schedule
45
Cleaning and Lubrication
46
Troubleshooting
48
Appendix A: Warranty and Field Service
49
Appendix B: Revision History
51
Index
53
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