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ADT 7100 User Manual
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ADT 7100 User Manual

ADT 7100 User Manual

Dicing saw
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ADT 7100 Dicing Saw
User Manual

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Summary of Contents for ADT 7100

  • Page 1 ADT 7100 Dicing Saw User Manual...
  • Page 2 Contents Chapter 1: System Overview Chapter 2: Operating Procedure Chapter 3: Supported Processes Chapter 4: Troubleshooting...

  • Page 3: System Overview

    OVERVIEW INTRODUCTION The ADT 7100 Dicing Saw is optimized for multi-angle dicing of thin, tight tolerance products. It is capable of complex patterns such as multiple indexes and varying cut depths. A specified blade (dependent on substrate type) cuts the workpiece in the specified patterns. The ADT 7100 dicing saw can be used to cut different materials, each of which may need to be processed differently.

  • Page 4: Material Requirements

    LNF wiki tool page. Samples preparation and post-dicing process cleaning The samples that have been processed in the ADT 7100 dicing saw are considered “dirty” and not suitable to run in any other system in the cleanroom immediately after. Therefore, the dicing of samples should be one of the last steps in the process flow.

  • Page 5: Tool Overview

    ADT 7100 User Manual System Overview TOOL OVERVIEW Tool Layout Software Layout Lurie Nanofabrication Facility...
  • Page 6 ADT 7100 User Manual System Overview Most tasks can be performed from the menus on the top of the screen or the quick access buttons (icons) on the user interface. A picture of the main screen (i.e., the video workspace) is shown above.

  • Page 7: Safety And Hazards

    ADT 7100 User Manual System Overview Types of Blades The grit size and composition of a blade are dependent on the material to be cut. The thinner the blade, the narrower the kerf. These are blades available in the LNF store.
  • Page 8 ADT 7100 User Manual System Overview Personnel Qualifications/Responsibilities You must be authorized by a tool engineer or be accompanied by an authorized user to use this tool. Improper use, failure to follow this SOP, failure to fill out the logbook, and leaving unqualified users unattended will result in loss of authorization.

  • Page 9: Operating Procedure

    ADT 7100 User Manual Operating Procedure OVERVIEW This chapter covers the essential operation of the tool. If any problems are encountered during tool operation, please refer to the chapter on troubleshooting. BEFORE YOU START Before starting a reservation, make sure your samples meet the requirements in the system overview, especially if you are planning on further processing in the LNF cleanroom.

  • Page 10: Quick Reference

    ADT 7100 User Manual Operating Procedure 2.3 QUICK REFERENCE 1. Preparation before dicing a. Confirm your sample is compatible with the tool capabilities and blade. b. If your samples will go back to the cleanroom for further processing, or if you want to...
  • Page 11 ADT 7100 User Manual Operating Procedure 7. Sample alignment and cutting map generation a. Select the manual alignment option by clicking on the icon b. Follow the directions given in the wizard to do the alignment and to generate the cutting map.
  • Page 12 ADT 7100 User Manual Operating Procedure 2.4 VIDEOS The following videos show the right way of working on the ADT. You can access them from the wiki page or scan the following QR codes. How to properly mount a sample onto the...

  • Page 13: Detailed Operation

    ADT 7100 User Manual Operating Procedure 2.5 DETAILED OPERATION Enabling the Tool The first step to using this tool is to receive tool training and approval. Next, schedule tool time using the LNF scheduler located in the LNF online services. The following link will lead to the LNF online services: http://ssel-sched.eecs.umich.edu/sselOnLine/...
  • Page 14 ADT 7100 User Manual Operating Procedure 3. Ensure that the water level in the filtration system is filled to the bottom side of the lower white platform with a round hole in it. Do not fill past this point. Also, do not fill it to the ridge that goes entirely around the tank.
  • Page 15 ADT 7100 User Manual Operating Procedure Mounting samples Look at the ADT LNF wiki page for accessing a video showing this process. 1. If you plan to bring your samples back to the cleanroom to process in any LNF system,...
  • Page 16 ADT 7100 User Manual Operating Procedure it to the left, then to the right once. 13. Press down on the circular blade button on the top and move it twice around the frame. 14. Open the unit cover. 15. Lift off and discard the excess tape.
  • Page 17 ADT 7100 User Manual Operating Procedure Preparing hubless blades The 00777-1030-008, 00777-1045-008, and similar blades must be mounted in a flange before using the saw. Skip this section if you are using a blade with a built-in hub. Look at the ADT LNF wiki page accessing a video showing this process.
  • Page 18 ADT 7100 User Manual Operating Procedure Putting blade on the tool New blades for standard processes can be purchased from the LNF online store. Warning! Never touch the edge of a blade; this can cut you and damage the blade.
  • Page 19 ADT 7100 User Manual Operating Procedure 4. When you hear the loud click, open the large cutting chamber cover. Note: If you take more than 20 sec to open the chamber, it will lock again, and you will need to initiate the blade change procedure one more time.
  • Page 20 ADT 7100 User Manual Operating Procedure 15. Place the center of the torque wrench at the end of the spindle and fully engage it with the holding nut on the Spanner Tool. 16. Screw the holding nut onto the spindle by gently pushing the spanner tool toward the spindle, then turn the spanner tool clockwise while holding the torque wrench straight out from the spindle.

  • Page 21: Loading Samples

    ADT 7100 User Manual Operating Procedure 24. Click Finish on the wizard screen. 25. The spindle will start rotating. And the blade diameter is measured. The blade exposure is calculated and displayed below the green blade Indicator near the lower left part of the screen.
  • Page 22 ADT 7100 User Manual Operating Procedure ● There are buttons above the zoom box for (M) medium and (H) high zoom. Zoom is from 1 to 2 in increments of .25. Running a Process 1. Ensure that your recipe, blade, and workpiece are loaded in the tool.
  • Page 23 ADT 7100 User Manual Operating Procedure to the recipe parameters, the system automatically calculates and displays the cut map for that angle in the Main Workspace Window in the Video Workspace. Note: For a standard GPC algorithm, the cut position can be defined as the center of a street anywhere on the wafer.
  • Page 24 ADT 7100 User Manual Operating Procedure e. Close the Load/Unload Cover. 2. Removing a workpiece if you are not automatically prompted to do so. a. In the Video Workspace, click the Unload Wafer button , or from the Manual menu, select Services > Remove workpiece or press Ctrl+R.
  • Page 25 ADT 7100 User Manual Operating Procedure 7. Place the Allen Wrench at the end of the spindle with the larger diameter part all the way against the spindle. Engage the Spanner Tool onto the Spindle Nut. Never use the Torque Wrench to remove the blade as this may damage the Torque Wrench.
  • Page 26 ADT 7100 User Manual Supported Processes OVERVIEW This chapter covers the characterized processes for the tool. Any processes outside of the ones listed must be approved by a tool engineer and require additional training. Please refer to LNF wiki for more information.
  • Page 27 ADT 7100 User Manual Supported Processes The recipes are located in the Standard recipe group in the Programming Workspace. Do not edit these recipes as it will affect the following users that copy them. Length parameters can be specified in inches, millimeters, microns, etc., by selecting the units from the units pull-down menu.
  • Page 28 ADT 7100 User Manual Supported Processes 3.2 CREATE OR MODIFY A RECIPE When in doubt, stop and create a helpdesk ticket to request support from the LNF staff. If you feel confident to create a new recipe, or modify an existing one, follow these steps.
  • Page 29 ADT 7100 User Manual Supported Processes 3.3 MODIFY INDEX AND DEPTH PARAMETERS Things to consider before modifying your recipe: Superuser access is required to change the Depth parameter. To avoid confusion, it is best to select the reference cut position (after the manual alignment) at the beginning of your first pattern at the top of the workpiece.
  • Page 30 ADT 7100 User Manual Supported Processes Examples with just one depth and multiple indexes The following examples show how the parameters would look like for a specific angle. You can see a diagram indicating the space between the cutting lines based on the specified indexes on the right side.

  • Page 31: Custom Recipes

    ADT 7100 User Manual Supported Processes Example with multiple depths More than one pass per cut may be desirable when a workpiece is made of a tough material or is very thick. Using multiple passes can reduce blade wear and is done using multiple indexes with a value set to zero.
  • Page 32 ADT 7100 User Manual Supported Processes This page was intentionally left blank. Lurie Nanofabrication Facility...

  • Page 33: Troubleshooting

    Troubleshooting OVERVIEW This chapter covers the basic troubleshooting for the ADT 7100. For any errors or alarms not covered in this document, please create a hardware issue LNF Helpdesk ticket and fill out the logbook, including details of the alarm.

  • Page 34: Common Alarms

    ADT 7100 User Manual Troubleshooting 4.3 COMMON ALARMS If you are unsure how to proceed with any alarms Blade Eccentricity check is now available. not listed below, fill out the logbook and create a hardware issue helpdesk ticket. Here are some common error messages. For more complicated issues, users should contact a tool engineer via the LNF helpdesk ticket system.
  • Page 35 ADT 7100 User Manual Troubleshooting believe your blade life is still enough to finish the dicing process, you can continue cutting. You will be allowed to click Accept to resume cutting. When in doubt, stop and create a helpdesk ticket to consult with the tool engineer.
  • Page 36 ADT 7100 User Manual Troubleshooting 4.4 PIECES FLY OFF DURING DICING This is a common situation when working with materials that have poor adhesion due to lack of cleanliness or the type of material itself. Next, you can find some suggestions to try to alleviate this problem.
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