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Document No.: STME-PU-TG390M-2400M-R04
Instruction Manual
Magnetically Suspended
Compound Molecular Pump
TG390M/420M Series
TG900M/1300M Series
TG2400M Series
It is mandatory to read and understand all the 'Important warning' and 'Important
caution' in this manual before using the product.
Keep this manual at hand in order to read it at any time.
Osaka Vacuum, Ltd.
Original instructions
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Table of Contents
Summary of Contents for OSAKA VACUUM TG390M/420M Series
- Page 1 Document No.: STME-PU-TG390M-2400M-R04 Instruction Manual Magnetically Suspended Compound Molecular Pump TG390M/420M Series TG900M/1300M Series TG2400M Series It is mandatory to read and understand all the ‘Important warning’ and ‘Important caution’ in this manual before using the product. Keep this manual at hand in order to read it at any time.
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Page 2: Introduction
Document No.: STME-PU-TG390M-2400M-R04 Introduction TG390M/420M, TG900M/1300M, TG2400M series are the magnetically suspended compound molecular pump which is controlled with the exclusive digital controller. Hereinafter, these magnetically suspended compound molecular pump referred to as ‘the pump’. The pump transports gas molecules from the inlet port to the outlet port by the high speed rotation of the rotor in the pump. - Page 3 Document No.: STME-PU-TG390M-2400M-R04 Table1 Conformity Directives and Standards The combination of the pump and the controller The conformity directives and standards, etc. Controller model Pump model TC011M TG390Mxyz, TG420Mxyz, - UL61010-1:2004 TG900Mxyz, TG1300Mxyz, - SEMI S2-0709 TG2400Mxyz, - CE marking TG390Mxyz-90, TG420Mxyz-90, TG900Mxyz-90, TG1300Mxyz-90, TG900Mxyz-91, TG1300Mxyz-91,...
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Page 4: Notation In This Manual
For your safety, follow all general rules (laws and regulations) in addition to the instructions provided in this manual. ● Osaka Vacuum holds the right to modify the product specifications without prior notice in order to maintain and improve the quality of the product. -
Page 5: Mark And Symbol
Document No.: STME-PU-TG390M-2400M-R04 Mark and Symbol The following marks and symbols are used for ‘Important warning’ and ‘Important caution’ in this manual. Mark Definition Important warning WARNING This indicates the hazard which results in death and/or serious injury. Important caution CAUTION This indicates the hazard which results in injury. -
Page 6: Warranty And Liability
"Standard Warranty Certificate". Note, however, that using the pump in manners not described in this manual will void all warranty. Use of the pumps under atypical conditions without prior consent from Osaka Vacuum will also void the warranty. -
Page 7: Definition Of Eligible Worker
Document No.: STME-PU-TG390M-2400M-R04 Definition of Eligible Worker Although this manual has been written for all the people handling the pump, for safety, the eligible workers are defined as follows. ■ Handling worker Handling worker indicates a worker performing the receiving, unpacking, transportation, packing and shipment for the pump. -
Page 8: Eligible Worker For Each Chapter
Document No.: STME-PU-TG390M-2400M-R04 Eligible Worker for Each Chapter WARNING Equip each worker with the appropriate personal protective equipment. The personal protective equipment shown in this manual are things which are expected typically. Add the appropriate personal protective equipment as necessary. CAUTION Only the eligible worker shall perform the work in each chapter. -
Page 9: Table Of Contents
Document No.: STME-PU-TG390M-2400M-R04 Contents Introduction ----------------------------------------------------------------------------------------------1 Features of Pump .....................1 Notation in this Manual .....................3 Safety........................3 Mark and Symbol......................4 Warranty and Liability ....................5 Copyright and Responsibilities .................5 Definition of Eligible Worker ..................6 ■ Handling worker ...................6 ■ Installation worker ..................6 ■... - Page 10 Document No.: STME-PU-TG390M-2400M-R04 10 Check / Maintenance---------------------------------------------------------------------------- 40 10.1 Daily Check ....................40 10.2 Recommended Overhaul Interval ..............41 ■ Low Speed Mode (TC011M series) ............41 10.3 Protective Bearing ..................42 10.4 Removal of Pump ...................43 10.5 Request of Overhaul / Repair.................45 11 Storage / Scrap------------------------------------------------------------------------------------ 46 11.1 Storage ......................46 11.2 Disposal ......................46 12 Specification--------------------------------------------------------------------------------------- 47...
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Page 11: Workflow From Unpacking To Operation
Document No.: STME-PU-TG390M-2400M-R04 1 Workflow from Unpacking to Operation The workflow from unpacking of pump to operation is as follows. Unpacking ● Keeping of packing materials. (For reuse.) ● Checking of pump weight ● Checking of contents Carriage ● Notice of carriage Check before Installation ●... -
Page 12: Unpacking And Carriage
Document No.: STME-PU-TG390M-2400M-R04 2 Unpacking and Carriage 2.1 Unpacking Be careful not to damage contents. And, keep the packing materials and inlet/outlet flange for shipping to reuse. ■ Checking of Pump Weight The pump weighs about 14 - 56 kg. Check the pump weight, before unpacking. The weight of each model is shown in Table2. -
Page 13: Checking Of Contents
Document No.: STME-PU-TG390M-2400M-R04 ■ Checking of Contents The components and attachments of standard package is shown below. Some parts may be different depending on the specifications of the pump. If any of the contents are different from the expected contents, and/or if any of the contents have abnormality and/or damage, contact us immediately. -
Page 14: Carriage
Document No.: STME-PU-TG390M-2400M-R04 2.2 Carriage WARNING Do not get under the lifted pump. The pump is about 14 to 56kg in weight. CAUTION Use the lifter and/or crane and/or handcart when lifting the pump and/or carrying the pump. And, be careful that the pump does not turn over and/or does not fall down. The pump is about 14 to 56kg in weight. -
Page 15: Handling Of Pump
Document No.: STME-PU-TG390M-2400M-R04 3 Handling of Pump WARNING Do not expose the worker to the vacuum. 3.1 Using Gas WARNING Obtain the each SDS from the gas supplier before using the gases, and be sure to confirm the characteristics of the each gas. Take necessary protection measures according to the characteristics of the gas in order to secure the safety of the workers. -
Page 16: Usage Environment
Document No.: STME-PU-TG390M-2400M-R04 3.2 Usage Environment The pump can be used in the following environment. Usage environment Contents Location Indoor Ambient temperature 10 to 40 °C (50 to 104 °F) ; Water cooling type 10 to 32 °C (50 to 90 °F) ; Forced air cooling type and Natural air cooling type Ambient relative humidity 5 to 80 %RH (No condensation) -
Page 17: External View And Dimensions
Document No.: STME-PU-TG390M-2400M-R04 3.3 External View and Dimensions The external view and dimensions are shown in Fig.1 - Fig.3 and Table3. TG390M / 420M series Air cooling type Forced air cooling type Natural air cooling type (Natural Air cooling type) TG-MI type TG-MI series φ180... - Page 18 Document No.: STME-PU-TG390M-2400M-R04 TG2400M series (Air cooling type) Forced air cooling type TG-MI type TG-MI series φ310 Center of Gravity KF40 Water cooling type φ324 Water cooling type φ286 185.5 ISO-G1/4 ISO-Rc1/4 ISO-Rc1/4 6-M16 DP25 Fig.3 External View and Dimensions for TG2400M series Table3 Dimensions of Pump Unit: mm Model...
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Page 19: Name Of Pump Part
Document No.: STME-PU-TG390M-2400M-R04 3.4 Name of Pump Part The name of each pump purt is shown in Fig.4 - Fig.6 and Table4. TG390M / TG420M series TG-MI series (TG-MI series) (Air Cooling Type) Forced air cooling type Water cooling type (Water Cooling Type) Fig.4 Name of Pump Part for TG390M / TG420M series TG900M / TG1300M series... - Page 20 Document No.: STME-PU-TG390M-2400M-R04 Table4 Name of Pump Part and Each Function Name of pump part Function ① Inlet port Connects to chamber (vacuum devices). ② Outlet port Connects to backing pump. ③ Power input connector Connects to output cable. ④ Purge port Connects to purge gas piping.
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Page 21: Labels
Document No.: STME-PU-TG390M-2400M-R04 3.5 Labels WARNING Follow the instructions of the warning label anytime. The pump is provided with the various warning labels and/or caution labels in order to keep the safety. The location of the each labels and name plate and the contents are detailed Fig.7 - Fig.9 and Table5. - Page 22 SER. NO. 0103 ,DATE 06-2002 the year and month of manufacture ROT. SPEED 40800min ,ROT. ROT. SPEED: OSAKA VACUUM,LTD. NABARI FACTORY Maximum rotational speed 1300-81 YABATA,NABARI,MIE 518-0605,JAPAN MADE IN JAPAN ROT. ←: Rotational direction (clock wise in view of the inlet port) Manufacturer and Address ②...
- Page 23 Document No.: STME-PU-TG390M-2400M-R04 Label Contents ⑥ This label is affixed on the temporary blank Notice flange for inlet port. Label Keep this flange, and reuse it when the pump is removed. (E.g. for carriage or storage) The label indicates the location of outlet port. ⑦...
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Page 24: Preparations Before Installation
Document No.: STME-PU-TG390M-2400M-R04 3.6 Preparations before Installation Hereinafter, the flange/frame/trestle/floor for mounting the pump is referred to as ‘equipment’. Design the equipment to mount the pump securely by a method designated in this manual. Big torque is generated by the sudden stop of the rotor at the time of the rotor destruction, and the torque acts to rotate the pump body. -
Page 25: Fixing Method And Process
Document No.: STME-PU-TG390M-2400M-R04 3.7 Fixing Method and Process WARNING Confirm that the strength of the equipment which the pump is fixed to can resist the rapid shutdown torque shown in the Table6. In addition, confirm that the equipment holds the weight of the pump and can mount the pump securely. -
Page 26: Pump Fixing Bolts
Document No.: STME-PU-TG390M-2400M-R04 ■ Pump Fixing Bolts Use the bolts having the strength that are equal to or higher than strength shown in Table7 and Table8 for pump fixing. Tighten all bolts equally. Table7 Fixing Bolts for Inlet Port Flange Bolt Model Bolt Material / Strength Class... -
Page 27: Fixing Method
Document No.: STME-PU-TG390M-2400M-R04 ■ Fixing Method The pump can be mounted in any orientation. (Upright/inverted/horizontal/tilted) Fix the pump securely according to one of the fixing methods of Table9 from (1) to (4). Table9 Fixing Method The counterpart connected the Pump model Fixing method inlet flange of the pump The equipment which the inlet... - Page 28 Document No.: STME-PU-TG390M-2400M-R04 When the equipment which the inlet flange of the pump is connected to can resist the rapid shutdown torque shown in the Table6. (1) Fixation at Both Inlet Flange and Pump Bottom (Recommended) The pump fixation at the pump bottom in addition to the inlet flange is recommended. 1.
- Page 29 Document No.: STME-PU-TG390M-2400M-R04 When the equipment which the inlet flange of the pump is connected to cannot resist the rapid shutdown torque shown in the Table6. (E.g. bellows, damper, APC valve, unfixed chamber) (3) Fixation at Both Inlet Flange and Pump Bottom (Recommended) The pump fixation at both the inlet and pump bottom is recommended.
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Page 30: Connecting The Peripheral Devices
Document No.: STME-PU-TG390M-2400M-R04 4 Connecting the Peripheral Devices 4.1 Connecting of Exhaust Piping ■ Selection of Backing Pump The performance of the pump is affected by the outlet pressure. Take the exhaust piping conductance and/or the gas flow rate into account, select the appropriate backing pump. -
Page 31: Connecting Of Purge Gas Piping
Document No.: STME-PU-TG390M-2400M-R04 4.2 Connecting of Purge Gas Piping When the reactive gases and/or corrosive gases are evacuated or when the gas including dust is evacuated, supply the purge gas into the pump during operation. An example of the purge gas piping for the pump is illustrated in Fig.16. The parts of the purge gas piping for the pump are options. -
Page 32: Connecting Of Cooling Water Piping
Document No.: STME-PU-TG390M-2400M-R04 4.3 Connecting of Cooling Water Piping CAUTION Connect the cooling water piping securely so that water does not leak. Do not pressurize the cooling water piping beyond the maximum water pressure. The pump needs cooling during the pump operation. For the water cooling type, connect the cooling water piping and supply the cooling water. -
Page 33: Connecting Of Controller And Cables
Document No.: STME-PU-TG390M-2400M-R04 5 Connecting of Controller and Cables Connect the pump and the controller by the cables. Confirm the applicable pump model with the ‘main name plate’ and ‘setting model indication label’ of the controller, and use the pump and controller in a correct combination. Table13 indicates the combination standard of the pump and controller. -
Page 34: Operation
Document No.: STME-PU-TG390M-2400M-R04 6 Operation 6.1 Confirmation before Operation WARNING Confirm that the pump is fixed appropriately. Confirm that the equipment has no leakage. Confirm the “6.2 Confirmation before Operation” of “controller manual”. CAUTION Confirm safety around the pump, controller and operation area. Do not turn on the mains supply to the controller, when there is the outsider near the pump and/or controller, or when the worker installs and/or maintains the pump. -
Page 35: Notice During Operation
Document No.: STME-PU-TG390M-2400M-R04 6.2 Notice during Operation CAUTION Do not touch the surface of the pump during the operation. Confirm the “6.3 Notice during Operation” of “controller manual”. Do not turn off the mains supply during pump operation except in the case of the NOTICE emergency off. -
Page 36: Various Operation
Document No.: STME-PU-TG390M-2400M-R04 7 Various Operation 7.1 Putting Gas into Vacuum Device Prevent the throughput per one pump from exceeding the maximum throughput when the gases are put into the vacuum device. The maximum throughput of the pump is shown in Table14. Table14 Maximum Throughput 1Pa･L/s (25°C) = 0.543sccm (0°C, 1atm) Pump model *... -
Page 37: Start-Up Simultaneous With Backing Pump
Document No.: STME-PU-TG390M-2400M-R04 7.2 Start-up Simultaneous with Backing Pump The pump and the backing pump can be started simultaneously in the following cases; A case that the capacity of the chamber is small. A case that the effective volume flow rate of the backing pump is large. When the condition mentioned above is not met, the controller will detect ‘acceleration error’... -
Page 38: Using Of Metal Band Heater (Tg-Mi Series)
Document No.: STME-PU-TG390M-2400M-R04 7.4 Using of Metal Band Heater (TG-MI series) WARNING Do not touch the inside of the heater cover, while input power is ON. And, do not remove the heater cover. CAUTION Do not touch the surface of the pump during the operation. TG-MI series pump has an insulation structure and the metal band heater, and the temperature management system which is equipped in the controller can raise the pump temperature to a certain value. -
Page 39: Emergency Off System
Document No.: STME-PU-TG390M-2400M-R04 8 Emergency OFF (EMO) System ■ Emergency Off (EMO) System Incorporate an emergency shutdown (Emergency Off) circuit as the emergency off system. Hereinafter, the emergency off system is referred to as the ‘EMO system’. Design the EMO system in customer. Design the EMO system to interrupt the mains supply of the controller. -
Page 40: Troubleshooting
Document No.: STME-PU-TG390M-2400M-R04 9 Troubleshooting The pump and the controller is equipped with various protective functions. When an abnormality happens to the pump and/or controller, the pump performs brake and/or freerun and/or touchdown by the protective function and stops safely. In addition, the controller enables quick troubleshooting by displaying an error name corresponding to the abnormality that happened to the LCD. -
Page 41: Check / Maintenance
Document No.: STME-PU-TG390M-2400M-R04 10 Check / Maintenance WARNING Equip the worker with appropriate PPE such as gas mask, when accessing the using pump. CAUTION Confirm the complete stop of the rotor before accessing the pump. Perform the check and maintenance appropriately for a long safety use of the pump. Turn off the mains supply to the pump depending on the working contents and intercept the supply of gases and/or water to the vacuum equipment, when accessing the using pump. -
Page 42: Recommended Overhaul Interval
Document No.: STME-PU-TG390M-2400M-R04 10.2 Recommended Overhaul Interval The pump needs the periodical overhaul. The recommended overhaul intervals (only a guide) of each process are shown in. Request the overhaul (non-free) of the pump to us periodically depending on the application process. However, consult us for details, because the overhaul interval is widely different according to not only the application process but also the use conditions. -
Page 43: Protective Bearing
Document No.: STME-PU-TG390M-2400M-R04 10.3 Protective Bearing The protective bearings are important parts to support the high speed rotating rotor safely at the time of abnormality. The protective bearings are necessary to overhaul appropriately, because the protective bearings are the consumable parts, which do the abrasion whenever use. The controller adds up the use situation of the protective bearings, and detects the ‘touchdown counter alarm’... -
Page 44: Removal Of Pump
Document No.: STME-PU-TG390M-2400M-R04 10.4 Removal of Pump WARNING Before removing the pump, be sure to confirm the using gases and obtain the each SDS from the gas supplier. Take necessary protection measures according to the characteristics of the gas in order to secure the safety of the workers. Equip the maintenance worker with the appropriate PPE, such as gas stop, goggles, protective gloves, to prevent exposure to the hazardous gases. - Page 45 Document No.: STME-PU-TG390M-2400M-R04 Perform the work after confirming the complete stop of the rotor. Purge the pump by an inert gas such as nitrogen sufficiently before removing the pump. The capacity of the pump are shown in the Table17 Table17 Pump Capacity Model Capacity TG390M / TG420M...
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Page 46: Request Of Overhaul / Repair
Document No.: STME-PU-TG390M-2400M-R04 10.5 Request of Overhaul / Repair WARNING Specify the using gases and these safety notes on the ‘Inspection Request Form’, when the overhaul and/or repair of the pump is requested to us. In addition, specify the using gases and these safety notes on the outside surface of the package for the sending back, too. -
Page 47: Storage / Scrap
Document No.: STME-PU-TG390M-2400M-R04 11 Storage / Scrap 11.1 Storage WARNING Seal up the inlet and outlet and purge/vent port of the pump securely. Store the pump perpendicularly on the flat floor. Do not store the pump in the following environment. NOTICE ... -
Page 48: Specification
Document No.: STME-PU-TG390M-2400M-R04 12 Specification 12.1 Specification Model TG390M series TG420M series Specification Inlet port VG100 / CF100 / ISO-B100 VG150 / CF160 / ISO-B160 Flange size Outlet port KF25 340 L/s 400 L/s Volume flow rate (without protective screen) 290 L/s 300 L/s 1.0 x 10... - Page 49 Document No.: STME-PU-TG390M-2400M-R04 Model TG900M series TG1300M series Specification Inlet port VG150 / CF160 / ISO-B160 VG200 / CF200 / ISO-B200 Flange size Outlet port KF25 900 L/s 1300 L/s Volume flow rate (without protective screen) 1050 L/s 1200 L/s 1.0 x 10 Maximum compression ratio 1.5 x 10...
- Page 50 Document No.: STME-PU-TG390M-2400M-R04 Model TG2400M series Specification Inlet port VG250 / ISO-B250 Flange size Outlet port KF40 2400 L/s Volume flow rate (without protective screen) 1100 L/s 1.0×10 Maximum compression ratio 1.4 x 10 / 8.3 x 10 Ultimate pressure ≤...
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Page 51: Model Code Explanation
Document No.: STME-PU-TG390M-2400M-R04 12.2 Model Code Explanation Model - nn (1) Model : Compound molecular pump (2) Pump size : Near volume flow rate (N (3) Bearing system : Magnetically suspended (4) Optional series a = (Not written) : Standard : Insulated structure with T.M.S. - Page 52 Document No.: STME-PU-TG390M-2400M-R04 12.3 Spare Contact us when the following documents and/or parts is necessary. Name Note For TG390/420M series, TG900/1300M series, Instruction Manual (this manual) TG2400M series. For TC010M/MT series / TC010MA/MAT series Controller manual For TC011M/MT series. For TC010M/MT series / TC010MA/MAT series Serial Comunication Instruction Manual For TC011M/MT series.
- Page 54 Fax +86-21-6101-0110 Osaka Vacuum U.S.A., Inc. 48000 Fremont Blvd. Fremont, CA 94538, U.S.A. Phone +1-510-770-0100 Fax +1-510-770-0104 Service center Osaka Vacuum, Ltd. Nabari Factory (Japan) : Phone +81-595-64-1162 Fax +81-595-64-1163 Osaka Vacuum U.S.A., Inc. (U.S.A.) : Phone +1-510-770-0100 Fax +1-510-770-0104 Shanghai Osaka Vacuum, Ltd.
- Page 55 Declaration of Conformity Manufacturer: OSAKA VACUUM,LTD. NABARI FACTORY 1300-81 Yabata, Nabari, Mie 518-0605, Japan TEL : 0595-64-1161 FAX : 0595-64-1166 Technical file compiled by: D R M Green <Eurolink (Europe) Limited> Avalon House Marcham Road Oxon OX14 1UD UK TEL : +44-1793-784545...
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