Basic Operation; Overview - Allwin21 GaSonics AURA 1000 Operator's Manual

A9-0725-01 Rev. A
5.

BASIC OPERATION

5.1

OVERVIEW

The Allwin21 system consists of a reaction chamber, a wafer transport robot, cassette
stations, and a computer running the AW-ASH GUI control software. The wafers to be
processed are in a cassette and placed on the SEND cassette station. The robot then
moves a single wafer into the reaction chamber.
The controller uses a set of operating instructions known as recipes to control the
Allwin21 system. These recipes are created by the Process Engineer to monitor and
control the parameters of the processing cycle. The Operator then uses the control
software to select and run the process parameters (steady state temperature, process time,
ramp rates, etc.).
The control software program is also used to create, delete, copy, modify and store the
recipes and to execute system diagnostics.
The full control of the Allwin21 system is done through the control software and the front
control panel.
To get an understanding of how to operate the Allwin21 system, you must first be
familiar with the use of the menu screens to execute and interrupt a cycle in Run mode.
This section provides a discussion of the operation of the Allwin21 system. Calibration
and diagnostics of the Allwin21 system are discussed in the maintenance section.
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Figure 5:
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AW1008 Operator's Manual