Vega VEGASOURCE 81 Operating Instructions Manual page 59

Source holder
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VEGASOURCE 81, beam exit channel
Fig. 42: Beam exit channel (e.g. version X, C)
VEGASOURCE 81, base plate
Fig. 43: Base plate with holes (e.g. version X, C)
VEGASOURCE 81 • Source holder
53,6 mm
(2.11")
158 mm
(6.22")
76,2 mm
(3.00")
127 mm
(5.00")
152,4 mm
(6.00")
9 Supplement
59

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