1. Overview
Introduction
The BS78 is a high-precision, high-resolution scale that has an optical head with a semiconductor laser for
reading a high-resolution hologram scale.
1-1. Features
. High-resolution scale with signal wavelength of 0.1379 µm that out-performs light wave interferometer
systems.
. High stability that is not affected by temperature, air pressure, and air disturbances.
. High precision of ± 0.18 µm/220 mm.
. Total non-contact design virtually eliminates return error.
. Combining with other Sony Manufacturing Systems Corporation detectors allows sub-nanometer (0.14
nm) measurement and positioning.
. Large range for mounting allowance values in comparison to regular optical scales allows significantly
easier mounting.
1-2. Model Names
The model name indicates the measuring length and scale type.
Example:
BS78-220 N
Measuring
N : Normal type without reference point
length
NS : High-precision type without reference point
R : Normal type with reference point
RS : High-precision type with reference point
BS78
1
(E)