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Summary of Contents for MKS RGA Series
- Page 1 RGA Series Low profile fast rotation stage ’ ANUAL A1355A...
- Page 2 RGA Series Low profile fast rotation stage Warranty Newport Corporation warrants this product to be free from defects in material and workmanship for a period of 1 year from the date of shipment. If found to be defective during the warranty period, the product will either be repaired or replaced at Newport’s discretion.
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Page 3: Table Of Contents
RGA Series Low profile fast rotation stage Table of Contents Waranty ......................ii EU Declaration of Conformity ............... v UK Declaration of Conformity ..............vi Definitions and Symbols ................vii Warnings ..................... viii Cautions ......................x Introduction ..................... 1 Description ....................2 Design Details .................... - Page 4 RGA Series Low profile fast rotation stage Mapping......................14 Connection to Non-Newport Electronics ..........15 Dimensions ..................... 16 Accessories ..................... 17 URSBK: 90° Mounting Bracket for RGA150 ..........17 (M-)URS150TP: Solid Top Mounting Plate for RGA150 ......18 10.0 Maintenance ................... 19 10.1 Maintenance ....................
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Page 5: Eu Declaration Of Conformity
RGA Series Low profile fast rotation stage EU Declaration of Conformity A1355A0 – EDH0427En1010 – 04/21... -
Page 6: Uk Declaration Of Conformity
RGA Series Low profile fast rotation stage UK Declaration of Conformity A1355A0 – EDH0427En1010 – 04/21... -
Page 7: Definitions And Symbols
RGA Series Low profile fast rotation stage Definitions and Symbols The following terms and symbols are used in this documentation and also appear on the product where safety-related issues occur. General Warning or Caution The exclamation symbol may appear in warning and caution tables in this document. -
Page 8: Warnings
RGA Series Low profile fast rotation stage Warnings WARNING The motion of objects of all types carries potential risks for operators. Ensure the protection of operators by prohibiting access to the dangerous area and by informing the personnel of the potential risks involved. - Page 9 RGA Series Low profile fast rotation stage WARNING Do not exceed the usable depth indicated on the mounting holes (see section “Dimensions”). Longer screws can damage the mechanics or cause an electrical issue. WARNING Do not exceed the specified speed and load limitations.
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Page 10: Cautions
RGA Series Low profile fast rotation stage Cautions CAUTION Do not place this stage in a hostile environment such as X-Rays, hard UV, or in any vacuum environment. CAUTION Do not place this stage in a location affected by dust, oil fumes, steam, high humidity or acidity. -
Page 11: Introduction
This mapping file can be introduced in the controller to improve accuracy (see §3.2 and §6.5) RGA150 Rotation stage of the RGA Series. RECOMMENDATION We recommend you read carefully the chapter “Connection to electronics” before using the RGA Series rotation stage. A1355A0 – EDH0427En1010 – 04/21... -
Page 12: Description
Low profile fast rotation stage Description The RGA is the latest world class rotation stage from MKS that adds to the breadth of readily-available, standard, precision stages. The RGA was designed to move fast, with a low-profile and a large aperture. It addresses the need for quick angle adjustments of wafers and vacuum chucks. -
Page 13: Design Details
XPS controller, there is very little amount or need to adjust the operating parameters to begin using the stage quickly and more importantly, safely. Like all MKS motorized products, each RGA is shipped with a free test report that documents the positioning performance of each individual unit meeting the published specifications. -
Page 14: Characteristics
RGA Series Low profile fast rotation stage Characteristics Definitions Specifications of our products are established in reference to ISO 230 standard part II “Determination of accuracy and repeatability of positioning numerically controlled axes”. This standard gives the definition of position uncertainty which depends on... - Page 15 RGA Series Low profile fast rotation stage Wobble Tilt of rotation axis during rotation of a stage measured on a reference surface. Guaranteed and Typical Specifications Guaranteed maximum performance values are verified per Newport's A167 metrology test procedure. For more information, please consult the metrology tutorial section in the Newport catalog or at www.newport.com...
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Page 16: Mechanical Specifications
RGA Series Low profile fast rotation stage Mechanical specifications RGA150 Travel range (deg) 360 continuous Minimum Incremental Motion, typical (mdeg) 0.01 (1) (3) Uni-directional repeatability, typical (mdeg) ±0.035 (1) (3) ±0.0975 Bi-directional repeatability, typical (mdeg) (1) (3) Accuracy, typical (guaranteed) (mdeg) ±4 (±8) -
Page 17: Weights
RGA Series Low profile fast rotation stage CAUTION When a RGA150 rotation stage is integrated in an assembly or in a system, vibrating events due to the rotation of an off-center load at a high speed must be taken into account. -
Page 18: Position Feedback Signals
RGA Series Low profile fast rotation stage Position Feedback Signals The incremental sensor consists of an optical scale and an encoder head. When the carriage moves, the encoder head generates signals in quadrature and sends them to the pins of the encoder connector. -
Page 19: Installation
RGA Series Low profile fast rotation stage Installation Unpacking The RGA stages are delivered in packaging designed for safe transport. To remove the stage from packaging, open the protection bag and carefully lift the strap installed in the middle. Handling... -
Page 20: Mounting Conditions
RGA Series Low profile fast rotation stage Mounting conditions The RGA stage features special four-point mounting surfaces. While the compactness of its body provides good stiffness, it is recommended that the mounting conditions below are followed for best performance. Installation considerations Mounting surface flatness (top or bottom mounting) 10 µm... -
Page 21: Connection To Newport Controllers
Low profile fast rotation stage Connection to Newport Controllers NOTE RGA Series stages are intended to be used with Newport XPS-D controller and XPS-DRV11 driver card. Warnings on Controllers Controllers are intended for use by qualified personnel who recognize shock hazards and are familiar with safety precautions required to avoid possible injury. -
Page 22: Cables
RGA Series Low profile fast rotation stage Cables All RGA stages are delivered with two cables for direct connection to XPS- D controller and XPS-DRV11 driver card. The wiring diagrams and connectors for these cables are provided below. 6.2.1 Motor cable (MCAB-5-B) •... -
Page 23: Encoder Cable (E5775A)
SUB-D connectors. They are available in 10-meter length (MCAB-10-B for motor and E5772A for encoder) WARNING The RGA Series stages operate only with 10-meter max. cables. Connection There is a label on every stage indicating its part and serial numbers. -
Page 24: Configuration
RGA Series Low profile fast rotation stage Plug both cables on the stage sockets. At the other ends, plug motor connector on driver card, and encoder connector on the corresponding controller encoder socket. WARNING Cables are shielded correctly. For a correct operation, make sure to lock connectors (ground continuity provided by the cable). -
Page 25: Connection To Non-Newport Electronics
RGA Series Low profile fast rotation stage Connection to Non-Newport Electronics When operating with non-Newport controllers, it is recommended to adhere to the wiring pinouts presented previously and to use cabling with similar characteristics. WARNING Newport is not responsible for malfunction or damage of RGA stages when used with non-Newport controllers. -
Page 26: Dimensions
RGA Series Low profile fast rotation stage Dimensions A1355A0 – EDH0427En1010 – 04/21... -
Page 27: Accessories
RGA Series Low profile fast rotation stage Accessories NOTE The following accessories are not included with RGA Series rotation stages and must be ordered separately. URSBK: 90° Mounting Bracket for RGA150 A1355A0 – EDH0427En1010 – 04/21... -
Page 28: M-)Urs150Tp: Solid Top Mounting Plate For Rga150
RGA Series Low profile fast rotation stage (M-)URS150TP: Solid Top Mounting Plate for RGA150 A1355A0 – EDH0427En1010 – 04/21... -
Page 29: Maintenance
RGA Series Low profile fast rotation stage 10.0 Maintenance RECOMMENDATION Please contact Technical Sales Support team for recommendations on application specific maintenance. 10.1 Maintenance The RGA stage requires no particular maintenance. Nevertheless, this is a precision mechanical device that must be kept and operated with caution. -
Page 30: Repair
RGA Series Low profile fast rotation stage • Insert the syringe needle as deep as possible into the greasing hole and keep pressed against the stage • Manually or using the motor, rotate the carriage while slowly injecting 0.5ml of grease (perform at least 4 complete rotations during grease injection) •... -
Page 31: Service Form
Service Form Your Local Representative Tel.: __________________ Fax: ___________________ Name: _________________________________________________ Return authorization #: ____________________________________ (Please obtain prior to return of item) Company:_______________________________________________ Address: ________________________________________________ Date: __________________________________________________ Country: ________________________________________________ Phone Number: __________________________________________ P.O. Number: ____________________________________________ Fax Number: ____________________________________________ Item(s) Being Returned: ____________________________________ Model#: ________________________________________________ Serial #: ________________________________________________ Description: ________________________________________________________________________________________________________... - Page 32 Visit Newport Online at: www.newport.com North America & Asia Europe Newport Corporation MICRO-CONTROLE Spectra-Physics S.A.S 1791 Deere Ave. 9, rue du Bois Sauvage 91055 Évry CEDEX Irvine, CA 92606, USA France Sales Sales Tel.: (800) 222-6440 e-mail: sales@newport.com Tel.: +33 (0)1.60.91.68.68 Technical Support e-mail: france@newport.com Tel.: (800) 222-6440...
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