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SIGMAKOKI OptoSigma HSC-103 User Manual

Three-axis stage controller
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SC12205-K10-15002A
2nd
User's Manual
Three-axis Stage Controller
HSC-103
1
Copyright 2020, SIGMAKOKI Co.,Ltd.

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Summary of Contents for SIGMAKOKI OptoSigma HSC-103

  • Page 1 SC12205-K10-15002A User’s Manual Three-axis Stage Controller HSC-103 Copyright 2020, SIGMAKOKI Co.,Ltd.
  • Page 2 ・ The prior written approval of SIGMAKOKI CO., LTD. is necessary to reprint or reproduce in whole or in part these materials. ・ If these products or technologies are subject to the Japanese export control restrictions, they must be exported under a license Japanese government and cannot be imported into a country other than the approved destination.

  • Page 3: Table Of Contents

    5-3 Speed ........................41 Chapter 6: RUN current setting ..................42 6-1. Setting the drive current..................42 Chapter 7: Specifications ....................43 7-1.Specifications ......................43 7-2 Connector Pin Assignments .................. 44 7-3. Outlines ........................46 Copyright 2020, SIGMAKOKI Co.,Ltd.

  • Page 4: For Your Safety

    For Your Safety Before using this product, read this manual and all warnings or cautions in the documentation provided. Only Factory Authorized Personnel should be changes and/or adjust the parts of controller. The Symbols Used in This Manual WARNING CAUTION This symbol marks warnings that should be read This symbol indicates where caution should be used and used to prevent serious injury or death.
  • Page 5 SC12205-K10-15002A Disclaimer of Liability ① SIGMAKOKI CO., LTD. does not accept liability for damages resulting from the use of this product or the inability to use this product. ② SIGMAKOKI CO., LTD. does not accept liability for damages resulting from the use of this product that deviates from that described in the manual.

  • Page 6: Chapter 1: Before You Begin

    1-3.The HSC-103 System Please interface with 10120-3000PE by 3M External I/O control Limited. 3 Axis Stage Controller USB cable MDR cable Control JS-300/301/JB-400/401 HSC-103 MDR14-CA from PC /JD-100/101 D15D15A cable D15D15A-CA Exe) HST-50X /HST-100X /HST-200X /HST-120YAW/HST-160YAW Copyright 2020, SIGMAKOKI Co.,Ltd.

  • Page 7: Parts And Functions

    This connector is used when the device is controlled from the computer via an USBinterface. ： ⑤ OPTION Connector When control by JS-300/301 JB-400/401 or JD-100/101. ※ )About the usage of OPTION(JS-300/301/JB-400/401/JD-100/101), confirm various User’s manual. Copyright 2020, SIGMAKOKI Co.,Ltd.
  • Page 8 (Single phased;2-current carrying & Rated 7[A],250[V] ground) UL, CSA Approved UL, CSA Approved Cable length of above Power Supply cord shall be shorter than 4.5[m]. For your own safety, make sure POWER is OFF before connecting every cable. Copyright 2020, SIGMAKOKI Co.,Ltd.

  • Page 9: Chapter 2: Basic Operations

    ④ Please use a special cable MDR14-CA for the connection of peripheral device. ⑤ The one side of MDR14-CA is connected with the connector of the peripheral device. ⑥ The connector on the other side of MDR14-CA is connected with the OPTION connector of HSC-103. Copyright 2020, SIGMAKOKI Co.,Ltd.

  • Page 10: Connecting Power Cable

    *) If unconnected to the Internet, from FTDI’s website on a PC connected to the Internet, please go to download the driver (VCP Drivers). Then move the driver that download to PC to connect the HSC-103. Please then perform the installation of the driver. The FTDI website (http://www.ftdichip.com/index.html) Copyright 2020, SIGMAKOKI Co.,Ltd.

  • Page 11: Chapter 3: Settings

    Power ON. When JS-300/301(Option) operation and during the internal program behavior, work in this movement speed setting. [Setting Range] S：1～999999999 (Unit：0.01[μm/s]) F：1～999999999 (Unit：0.01[μm/s]) R：1～1000 (Unit：[ms]) *) Minimum S values should be set smaller than maximum F at Speed Setting. Copyright 2020, SIGMAKOKI Co.,Ltd.
  • Page 12 PLS_RATE3 1～1000000 1000 MOVE1 POS/NEG MOVE2 POS/NEG MOVE3 POS/NEG ORG1 SEL OFF/MINI/CENTER/ORGS/NORM/ZPM/ZPP MINI ORG2 SEL OFF/MINI/CENTER/ORGS/NORM/ZPM/ZPP MINI ORG3 SEL OFF/MINI/CENTER/ORGS/NORM/ZPM/ZPP MINI ORG OFFSET1 0～999999999 ORG OFFSET2 0～999999999 ORG OFFSET3 0～999999999 CONFIG1 ON/OFF CONFIG2 ON/OFF CONFIG3 ON/OFF Copyright 2020, SIGMAKOKI Co.,Ltd.
  • Page 13 *) Regarding each method, please refer to “Origin Reset Method”. 13～15) ORG OFFSET1～3：ORG offset setting Set ORG offset value for each axis (ORG1、ORG5、ORG6) at the ORG reset. [Setting range] 0～999999999 (Unit：0.01[μm]) *) When Setting range is set [0], ORG offset value is 0.5[mm]. Copyright 2020, SIGMAKOKI Co.,Ltd.
  • Page 14 SC12205-K10-15002A 16～18) CONFIG1～3：Select Auto-Config mode. Set Auto-Config mode for each axis. effect [Select item] ON： effect OFF：no Copyright 2020, SIGMAKOKI Co.,Ltd.
  • Page 15 ORG OFFSET default value: 0.5[mm]. CW(CCW) Sensor ORG reset speed F Detect CW limit sensor ORG reset speed M Move 0.5[mm] ORG reset speed S Detect CW limit sensor ORG reset speed M Move to offset position Copyright 2020, SIGMAKOKI Co.,Ltd.
  • Page 16 4-1) In case that ORG sensor is set on the inside of CW(CCW) sensor CW (CCW) Sensor ORG sensor ORG reset speed F Detect ORG sensor ORG reset speed M Move 0.5[mm] ORG reset speed S Detect ORG sensor Copyright 2020, SIGMAKOKI Co.,Ltd.
  • Page 17 5-1) In case that NEAR ORG sensor is on the inside of CW(CCW) sensor. NEAR ORG sensor ORG sensor CW (CCW) sensor ORG reset speed F Detect NEAR ORG sensor ORG reset speed S Detect ORG sensor Copyright 2020, SIGMAKOKI Co.,Ltd.
  • Page 18 6, ORG5 (for 3 sensor use (LS+ORG(Z phase))) ORG sensor (Z phase) CW (CCW) sensor ORG reset speed F Detect CW limit sensor ORG reset speed M Move to offset position ORG reset speed S Detect ORG sensor (z phase) Copyright 2020, SIGMAKOKI Co.,Ltd.
  • Page 19 ORG reset speed F Detect CW limit sensor ORG reset speed M Move to offset position ORG reset speed S After detect ORG sensor move to 0.5[mm] position ORG reset speed S Detect ORG sensor (Z phase) Copyright 2020, SIGMAKOKI Co.,Ltd.
  • Page 20 Select NEAR ORG sensor detecting level (Input logic level) for each axis [Select item] NM Open：(Normally switch ON by detecting NEAR ORG sensor from OFF condition) NM Close：( Normally switch OFF by detecting NEAR ORG sensor from ON condition Copyright 2020, SIGMAKOKI Co.,Ltd.
  • Page 21 Set mechanical ORG reset speed (minimum speed S, maximum speed F, acceleration time, ORG-reset speed M) for each axis. [Setting Range] S：1～999999999(Unit：0.01[μm/s]) F：1～999999999(Unit：0.01[μm/s]) R：1～1000(Unit：[ms]) M：1～999999999(Unit：0.01[μm/s]) *) Regarding Speed setting, minimum speed S should be set smaller than maximum speed F and ORG-reset speed M. Copyright 2020, SIGMAKOKI Co.,Ltd.

  • Page 22: Chapter 4: Using Hsc-103 To Position Motorized Stages

    Parameter is abbreviated when NOP (No Operation) needs to be set to the designated slave unit number. Note: (,)cannot be abbreviated. （Ex） ,p2 Parameter of 1 and 3-axis is abbreviated. p1,,p3 Parameter of 2-axis is abbreviated. Copyright 2020, SIGMAKOKI Co.,Ltd.
  • Page 23 Return 1(Busy) or 0 (READY) ？ Internal information Return by internal information I/O output command Output data to OUT terminal of I/O connector I/O input check Return data to IN terminal of I/O connector Program control Internal program command Copyright 2020, SIGMAKOKI Co.,Ltd.
  • Page 24 4-2-3 H command (Return to mechanical origin command) (1) Function This command indicates detect the mechanical origin for a stage and set the position as the origin. Coordinate value is cleared by 0. When the designated axis number with parameter is 1, the mechanical origin will be operated. No operation to 0 or abbreviated axis.
  • Page 25 4-2-6 E command (Arc interpolation movement command) (1) Function This command for arc interpolation movement enables to specify operation axis and rotation direction. 3 different modes of parameter are available to operate the arc interpolation movement with arbitrary 2 axes. When this command is sent under condition of busy and unconnected of axis, it will be response by NG as a command error and all command will stop to operate.
  • Page 26 E：0,1,3,0,0,0,5000,-5000 A center point coordinate is based on a relative coordinate of the current position (0.05[mm],-0.05[mm]) and move stages of axis No1, axis No3 one round clockwise until the current position. Axis 3 0.05[mm] Axis 1 -0.05[mm] Copyright 2020, SIGMAKOKI Co.,Ltd.
  • Page 27 4-2-6-2 E：1 command (Arc interpolation movement command 1) (1) Function This command indicates a designation of center point and degree of ended point in order to operate the arc movement (2) Example E：1, axis1,axis2,d,c1,c2,ae axis1, axis2：1～3 means to designate the number of axis to operate arc interpolation movement.
  • Page 28 4-2-6-3 E：2 command (Arc interpolation movement command 2) (1) Function This command indicates a designation of pass point coordinate and ended point’s coordinate in order to operate the arc interpolation movement. Note: if 3 points (current position, pass point coordinate and ended point coordinate) lay on the same straight line, it is unable to make an arc movement.
  • Page 29 4-2-7 K command (Linear interpolation movement command) (1) Function This command indicates a designation of axis of movement and a designation of relative movement in order to operate linear interpolation movement. Operation of linear interpolation movement is able to designate up to arbitrary 3 axes. When this command is sent under condition of busy and unconnected of axis, it will be responsed by NG as a command error and all command will stop to operate.
  • Page 30 4-2-8 J command (Jog command) (1) Function This command indicates to drives stages continuously (at a constant speed) at the minimum pulse speed (S). During command operation, stage will move non-stop until the detection of limit sensor or receipt of Stop command (L command). (2) Example J：s1,s2,s3 s：+,- or abbreviated...
  • Page 31 4-2-11 R command (Return to logical origin command) (1) Function This command indicates a setting of logical origin (coordinate value ０) to the stage of the designated axis number based on the current position. When this command is sent under condition of busy and unconnected of axis, it will be responsed by NG as a command error and all command will stop to operate.
  • Page 32 1 is an Excitation ON to the stage of the axis number. 0 is an Excitation OFF to the stage of the axis number. The abbreviation is NOP（No Operation） C：0,0,1 Excitation ON to the motor of the axis No3, and OFF to motor of axis No1,2. Copyright 2020, SIGMAKOKI Co.,Ltd.
  • Page 33 4-2-15 Q command (Reading current position command) (1) Function This command indicates to return the current position information of 3 tages of axis.unit No 1-3(0.01[μm] unit). In the case of pulse specified in memory SW, return the number of pulses. The returned current position data is separated by (,) -mark represents when the current position is minus.
  • Page 34 4-2-17 ! command (Reading status command) (1) Function This command indicates to return the status (Busy/Ready) of each axis. (2) Example ！： sts1, sts2 ,sts3 Returned data 0 means the ready status of the axis. 1 represents the busy status of the axis.
  • Page 35 4-2-19 O command （Output data command） (1) Function This command indicates output the data to the output terminal of I/O connector (4 bit). Output OUT1 OUT2 OUT3 OUT4 (2) Example O：14 out2,3,4 out pot. 4-2-20 I command （Input data command） (1) Function This command indicates input the data to the input terminal of I/O connector (4 bit).
  • Page 36 4-2-21 P command （Internal program control command） (1) Function This command indicates program number selection of internal program and Operate/Stop. Please refer to the detail of program feature from “4-2 program feature”. (2) Example P：p p：P, S, E, U0, U1 P：Pn n represents program number which can be selected 0-9.

  • Page 37: Program Functions

    10 kinds of program, numbered 0 to 9, can be stored in HSC-103 controller. These programs are stored in unerasable memory, which means they will not be erased even when POWER goes OFF. Maximum capacity for each program is 1024 lines. Please use tool software by SigmaKoki when composing, editing, loading and saving programs.
  • Page 38 In case of F/N/Y, it will be omitted. Please refer to table below regarding whether or not each parameter by command code can be omitted. ◎ indicates ‘cannot be omitted’, ○‘omittable in circumstances’, and － ‘be omitted at all times’in table below. Copyright 2020, SIGMAKOKI Co.,Ltd.
  • Page 39 Travel +2mm in the +direction at speed 3 on the 1 axis, +2mm in the +direction at speed 3 on the axis, output OUT10 with waiting 0.5second after completion of positioning. Copyright 2020, SIGMAKOKI Co.,Ltd.

  • Page 40: About The Use Of Peripheral Equipment

    JS-300/301 / JB-400/401 or JD-100/101 can be used in HSC-103. Manual manipulation and the Count level, can be indicated by using JS-300/301 / JB-400/401. ※)About the usage of OPTION(JS-300/301 / JB-400/401 / JD-100/101), confirm various User’s manuals. Copyright 2020, SIGMAKOKI Co.,Ltd.

  • Page 41: Chapter 5: Rotation Stage

    PLS_RATE (Memory-SW)：Set the travel Rotaly angle per 1 step pulse for each axis. (Setting Unit： 0.000001[°] ) Case of sigmakoki’s rotation stage: ORG_OFFSET (Memory-SW)：Set the ORG offset value to “25000(2.5[°])” for each axis. *) In the case of HST-120YAW / HST-160YAW The following items are automatic, and, in the case of ON, memory switch 16~18 is set.

  • Page 42: Chapter 6: Run Current Setting

    Set current values supplied from HSC-103 to stages. Turn a RUN current volume, 3 or A, to adjust RUN current corresponding to the stages to use. Volume (Expansion) Current volumes Axis3 axis2 axis1 Top Panel Volume No. A (Default Value) Run current 0.45 0.75 [A/phase] Copyright 2020, SIGMAKOKI Co.,Ltd.

  • Page 43: Chapter 7: Specifications

    USB Interface (Serial communication) Communication Parameters ・Baud Rate 9600/38400/57600 [bps] ・Data Bits 8bit ・Parity None ・Stop Bit 1bit ・Flow Control Hardware ・Delimiters CR+LF Input 4-pin (Photo-coupler Input, Internal Resistance 2.2k[Ω]) Output 4-pin (Open-collector Output Maximum Use Conditions DC24[V] 20m[A]) Copyright 2020, SIGMAKOKI Co.,Ltd.

  • Page 44: Connector Pin Assignments

    Connector 10220-52A2PL (by 3M Limited) used When using the I / O signal, please supply the 24V_EX (pin 1) and GND_EX (pin 2) than external. Equivalent to Figure 6-2-1：IN1～4,jpgX-Y-Z,ORG,STOP Input Circuit Diagram Equivalent to Figure 6-2-2：OUT1～4 Output Circuit Diagram Copyright 2020, SIGMAKOKI Co.,Ltd.
  • Page 45 +24V: sensor power supply Female XM3B-1522 connector (OMRON products) used ・7-2-3. USB Connector Description Description DATA+ DATA- Connector XM7B-0442 (By Omron) used ・7-2-4. OPTION Connector Description Description RXD+ RXD- TXD+ TXD- STOP CONNECT Connector 10214-52A2PL (by 3M Limited) used Copyright 2020, SIGMAKOKI Co.,Ltd.

  • Page 46: Outlines

    SC12205-K10-15002A 7-3. Outlines Copyright 2020, SIGMAKOKI Co.,Ltd.
  • Page 47 SC12205-K10-15002A Copyright 2020, SIGMAKOKI Co.,Ltd.
  • Page 48 SC12205-K10-15002A SIGMAKOKI CO., LTD. http://www.global-optosigma.com Tokyo Head Office SIGMAKOKI Tokyo Head office 19-9, Midori 1 chome, Sumida-ku, Tokyo 130-0021, JAPAN TEL+81-3-5638-8228 FAX+81-3-5638-6550 E-mail:international@sigma-koki.com Osaka office 9-28 , Nishi-Nakajima 4 chome, Yodogawa-ku, Osaka 532-0011, JAPAN TEL+81-6-6307-4835 FAX+81-6-6307-4834 E-mail:sales.osaka@sigma-koki.com Kyushu office 3-17, hiemachi, hakata-ku, Fukuoka 812-0014 TEL+81-92-481-4300 FAX+81-92-481-4310 E-mail:sales.kyushu@sigma-koki.com...

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