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Temescal FC-2800 Facility And Installation Manual

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0101-8603-0
F
I
G
ACILITY AND
NSTALLATION
UIDE FOR
FC/BCD-2800 E
S
VAPORATION
YSTEMS
Revision F, March 2011
Temescal, a division of Ferrotec (USA) Corporation
4569-C Las Positas Road, Livermore, CA 94551
Tel: 1-800-522-1215; Fax: 925-449-4096

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  • Page 1 0101-8603-0 ACILITY AND NSTALLATION UIDE FOR FC/BCD-2800 E VAPORATION YSTEMS Revision F, March 2011 Temescal, a division of Ferrotec (USA) Corporation 4569-C Las Positas Road, Livermore, CA 94551 Tel: 1-800-522-1215; Fax: 925-449-4096...
  • Page 2 Revision History 0101-8603-0 Revision Change Description Reason/ Date Approved Application First published version of FC-2800 F Applies to all FC-2800 July & I Guide systems 2006 Revised sections 1.4, 2.2.1, and Clarified specifications and Nov. 3.2.7. Modified Figures 3-4 through...

  • Page 3: Table Of Contents

    Routing of Customer Supplied Utility Lines in 400-V Installations ............ 3-12 Routing of Helium Lines (Temescal Supplied).................. 3-13 Routing of EMO Cables and Copper Grounding Straps (Temescal Supplied)........3-14 3-10 Routing of Power and Control/Data Cables (Temescal Supplied) ............ 3-15 0101-8603-0, Rev.
  • Page 4 This page has been intentionally left blank for pagination purposes. FC/BCD-2800 F & I Guide 0101-8603-0, Rev. F...

  • Page 5: Safety Instructions For Operating And Service Personnel

    SAFETY INSTRUCTIONS FOR OPERATING AND SERVICE PERSONNEL Operators and service personnel should always wear safety glasses. Operators shall not enter areas intended for service access only. Only experienced service personnel should enter such areas, and only after taking the preliminary precautions described in paragraphs 1 through 6 below. DANGER Potentially lethal voltages may exist within this unit, even with the line power switched off.
  • Page 6 Special Amendment for United Kingdom Users All Electrical Power Sources: Safety Precautions This component is designed to be used in an extra-high-voltage system. Only authorized personnel should be permitted to carry out work on this system. Prior to any servicing, grounding hooks should be used to short out all high-voltage parts and conductors in both the vacuum system and the high-voltage power supply.

  • Page 7: User Responsibility

    Defective equipment shall not be used. Parts that are broken, missing, plainly worn, distorted, or contaminated, shall be replaced immediately. Should such repair or replacement become necessary, a telephone or written request for service should be made to Temescal, Livermore, CA, a division of Ferrotec (USA) Corp.

  • Page 8: Health Hazard

    HEALTH HAZARD The condensates deposited on the tank walls of a vacuum system are generally in the form of extremely fine particles. The nature, as well as the form, of the materials poses the following potential health hazards: a) Inhaling fine particles (powder) may cause damage to the lungs. To help prevent this, wear a protective respirator mask with fine filter that has been approved by the National Institute for Occupational Safety and Health (NIOSH) and the federal Mine Safety and Health Administration (MSHA).
  • Page 9 In an effort to provide continuous improvement and ensure technical accuracy regarding product documentation, we invite you to comment on this Facilities & Installation (F & I) Guide. Please fill out and return this form to Temescal as soon as possible. Thank You.
  • Page 10 This page has been intentionally left blank for pagination purposes. FC/BCD-2800 F & I Guide viii 0101-8603-0, Rev. F...

  • Page 11: Introduction And Site Preparation Checklist

    Overview of F&I Guide The purpose of this Facilities and Installation (F & I) Guide is to provide facility requirements and installation guidelines for your Temescal System. This Guide gives information for preparing your site to receive and install your new equipment. Topics...

  • Page 12: General Safety Information

    For more specific details, please read the remainder of this Facilities & Installation (F&I) Guide. If you have any questions concerning your installation, please feel free to call Temescal Customer Support (1-800-522-1215, ext. 2891). Please complete the Site Preparation Checklist on the next page, checking off each requirement as it is completed.

  • Page 13: Site Preparation Checklist

    0.3 gpm (1.1 L/min.) Edwards Model iGX3/100 0.6 gpm (2.2 L/min.) For water requirements for mech. pumps other than those supplied by Temescal, consult the manufacturer of the pump in question.  Optional Hot Water Max. inlet pressure 90 psig (6.21 bar) Min.
  • Page 14 Use this section of the checklist to specify the lengths of the nominal, component-to- component route of helium lines, power and control/data cables, and 3”-wide copper ground strap in your installation. Temescal will add length as appropriate for service loops. Helium lines, power cables, and control/data cables are available in 10-ft.
  • Page 15 FC/BCD-2800 Facility and Installation Guide Section 1: Introduction and Site Prep. Checklist Table 1-1 Length of Control/Data Cables (see Figure 3-10) Cable Required Description Length Vacuum cubicle to cryopump compressor Vacuum cubicle to operator station 20 ft.* *Std. cable of fixed length. Custom cables of other lengths can be quoted. Table 1-2 Length of Utility Power Cables (see Figure 3-10) Cable Required...
  • Page 16 Section 1: Introduction and Site Prep. Checklist FC/BCD-2800 Facility and Installation Guide This page has been intentionally left blank for hard-copy pagination purposes. FC/BCD-2800 F & I Guide 0101-8603-0, Rev. F...

  • Page 17: Facility Requirements

    Before system installation can be scheduled, site preparation must be completed, and the Site Preparation Checklist (see Section 1.4) must be completed and returned to Temescal. Environment Ambient Air Temperature 55º...

  • Page 18: Compressed Gases

    0.3 gpm (1.1 L/min.) Edwards Model iGX3/100 0.6 gpm (2.2 L/min.) For water requirements for mech. pumps other than those supplied by Temescal, consult the manufacturer of the pump in question. 2.2.2 Optional Hot Water Flow rate 5 gpm (18.9 L/min) Max.

  • Page 19: Electrical Power Requirements

    60 feet (18.3 meters), this strap should be 0.035 to 0.050 inches (0.9–1.3 mm) thick. For runs longer than 60 feet, consult Temescal for specifications. The strapping should be silver-soldered to one of the rods and secured to the other mechanically, so that the grounding strap can be disconnected later to allow retesting of the resistance between the rods.
  • Page 20 Section 2: Facility Requirements FC/BCD-2800 Facility and Installation Guide CAUTION Do not use braided wire for any ground connections. CAUTION Do not rely on water pipes to establish the system ground connection. Multiple plumbing joints, each with tape and/or sealing compounds, make such a ground unreliable. Figure 2-1 Facility and System Grounding Requirements FC/BCD-2800 F &...
  • Page 21 FC/BCD-2800 Facility and Installation Guide Section 2: Facility Requirements 2.5.3 Low-Impedance Ground for the E-Beam Power Supply Figure 2-2 illustrates the low-impedance grounding scheme required for the e-beam power supply. As that illustration shows, 1/2”-wide copper straps must connect: the grounding stud on the rear of the power module to a grounding point on ...
  • Page 22 Section 2: Facility Requirements FC/BCD-2800 Facility and Installation Guide  The base of the source and the surface on which it is mounted (usually the upper surface of the source tray) must be clean and free of evaporated material.  The mounting surface must be made of nonmagnetic material. ...

  • Page 23: Unpacking And Installation

    The customer is responsible for unpacking and preparing the site, as outlined in sections 3.1 and 3.2. Temescal is responsible for making equipment interconnections and for energizing and testing the equipment prior to acceptance, as described in section 3.3. This section contains the following subsections:...

  • Page 24: Customer's Site Preparation Responsibilities

    The electrician will also establish the grounding points for the required low-impedance ground (see section 2.5) and connect the vacuum cubicle to that ground. Temescal will oversee the connection of Drop #2 to the HV power supply.
  • Page 25 3. Connect power Drop #1 to the input of the transformer. 4. Using the Temescal-supplied cables, connect the transformer’s output to the input for Drop #1 in the power distribution box. In nominal 208 V ac installations, connect both Drop #1 and Drop #2 to the PDB, as shown in Figure 3-6.
  • Page 26 (see Figures 3-6 and 3-7) so they are properly routed all the way to their connection points at the system (see Figure 3-5). However, service connections to the system may be made only by or under the supervision of a Temescal service representative, unless the customer has made specific arrangements to the contrary.

  • Page 27: Temescal Installation Responsibilities

    In such cases, the cryopump must be recharged with 99.999% pure Helium to 250 psig. Such customers should therefore have on hand at least one standard bottle of 99.999% pure Helium. The Temescal service representative will have the required equipment and ®...

  • Page 28: Installation Drawings

     all system components are properly positioned  all required service connections have been made and verified  all necessary adjustments have been made. The system is then ready for inspection and startup by a Temescal service representative. Installation Drawings The following drawings are provided to facilitate system installation.
  • Page 29 FC/BCD-2800 Facility and Installation Guide Section 3: Unpacking and Installation Figure 3-2 System Plan View, Showing Dimensions of Major Components 0101-8603-0, Rev. F FC/BCD-2800 F & I Guide...
  • Page 30 Section 3: Unpacking and Installation FC/BCD-2800 Facility and Installation Guide Figure 3-3 Mounting Hole Locations for System Power Distribution Box 31.50 in. 31.4961 in. [800.00 mm] SYSTEM MAIN RESET 39.37 in. 39.3701 in. 37.80 in. 37.7952 in. [1000.00 mm] [960.00 mm] 29.92 in.
  • Page 31 FC/BCD-2800 Facility and Installation Guide Section 3: Unpacking and Installation Figure 3-4 Vacuum Cubicle Footprint, Showing Precise Locations of Casters, Leveling Feet, and Seismic Brackets 0101-8603-0, Rev. F FC/BCD-2800 F & I Guide...
  • Page 32 Section 3: Unpacking and Installation FC/BCD-2800 Facility and Installation Guide Figure 3-5 Utility Connection Points on Rear of Vacuum Cubicle FC/BCD-2800 F & I Guide 3-10 0101-8603-0, Rev. F...
  • Page 33 FC/BCD-2800 Facility and Installation Guide Section 3: Unpacking and Installation Figure 3-6 Routing of Customer Supplied Utility Lines in 208-V Installations 0101-8603-0, Rev. F 3-11 FC/BCD-2800 F & I Guide...
  • Page 34 Section 3: Unpacking and Installation FC/BCD-2800 Facility and Installation Guide Figure 3-7 Routing of Customer Supplied Utility Lines in 400-V Installations FC/BCD-2800 F & I Guide 3-12 0101-8603-0, Rev. F...
  • Page 35 FC/BCD-2800 Facility and Installation Guide Section 3: Unpacking and Installation Figure 3-8 Routing of Helium Lines (Temescal Supplied) 0101-8603-0, Rev. F 3-13 FC/BCD-2800 F & I Guide...
  • Page 36 Section 3: Unpacking and Installation FC/BCD-2800 Facility and Installation Guide Figure 3-9 Routing of EMO Cables and Copper Grounding Straps (Temescal Supplied) FC/BCD-2800 F & I Guide 3-14 0101-8603-0, Rev. F...
  • Page 37 FC/BCD-2800 Facility and Installation Guide Section 3: Unpacking and Installation Figure 3-10 Routing of Power and Control/Data Cables (Temescal Supplied) 0101-8603-0, Rev. F 3-15 FC/BCD-2800 F & I Guide...
  • Page 38 Section 3: Unpacking and Installation FC/BCD-2800 Facility and Installation Guide FC/BCD-2800 F & I Guide 3-16 0101-8603-0, Rev. F...

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Bcd-2800

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