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Tencor AlphaStep 200 Manual

Automatic step profiler
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Tencor Alphastep 200 Automatic Step Profiler
Contents
1. Introduction
1. Introduction
The Alphastep 200 is a computerized step profiler with a programmable X-Y stage, and a
9" video monitor which displays a magnified view of the sample and stylus during the
scan, as well as scan profiles and a summary of scan data. The system has three
operating modes: "manual" for single scans; "semiautomatic" for multi-point scans; and
"automatic" for repeated multi-point scans. The system allows the operator to set, and
store if desired, a variety of scan parameters such as scan direction, scan length/sampling
rate and vertical units (kA vs. Mm). Measurement cursors are used to level plots,
obtain a variety of data, and/or to zoom in on a particular section of a scan profile. A
printer is built into the system for hard copies of screen scan profiles and data.
This manual will describe operation of this system in manual mode "only". For
information on programming the stage, semiautomatic and automatic operating modes, or
menu storage, please refer to the manufacturer's user operation manual available from the
staff in the cleanroom office.

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Summary of Contents for Tencor AlphaStep 200

  • Page 1: Table Of Contents

    Printer Paper Change 1. Introduction The Alphastep 200 is a computerized step profiler with a programmable X-Y stage, and a 9" video monitor which displays a magnified view of the sample and stylus during the scan, as well as scan profiles and a summary of scan data. The system has three operating modes: "manual"...

  • Page 2: System Description

    Maximum Sample Dimensions - 16.5 mm thickness, 162 mm diameter 2.3. Data Display The Alphastep 200 digitizes measurement data and stores it in memory during the scan. When the scan has been completed, a plot of the scan is displayed along with pertinent data and information on the scan characteristics.

  • Page 3: Keyboard

    Total Indicator Runout - difference between maximum and minimum profile heights for section of plot between measurement cursors. Arithmetic Average Roughness, see a manufacturer's manual for details. Area Cross-sectional area of a profile above the base line, displayed in Mm2. The base line is that line which extends between the intersections of the two measuring cursors and the profile.

  • Page 4: Operating Procedures

    RESET If pressed prior to a scan, will return measurement cursors to their position during the previous scan. Used for other miscellaneous operations, such as setting the time clock. Stage Keys These include the 4 arrow keys and the NXT (next) key in the center. The arrows indicate the direction in which the stage, (not the stylus), will move when pressed.

  • Page 5: Scanning A Sample

    screen "SCAN MENU may now be changed". 4. Use the RANGE keys to select the desired scan length and sampling rate. Note how the scan time changes as you move through the options. 5. Use the CUR (cursor) arrow keys to indicate desired scan direction. Note: this is the direction in which the stylus will move, not the substrate.

  • Page 6: Manipulating Data

    displayed in the usual manner. 4. Manipulating Data After the scan, the profile is plotted on the screen with a summary of the data displayed next to it. For many applications, this initial display will contain all required information. When further analysis is needed, it can be performed in the instrument's computer without having to re-scan.

  • Page 7: Leveling The Plot

    highlighted area directly below shows the distance between the cursors. To measure the width of a feature, position on cursor on each side of it and read the horizontal distance shown in the highlighted area under HORIZ. Once positioned, the cursors will retain those positions for subsequent scans. They will not move unless forced to do so by a change in scan length or they are moved by the operator.

  • Page 8: Average Difference Mode

    Any portion of a profile can be magnified for close examination. Using the procedures of the previous section, position the cursors so that they bracket the feature of interest. Press the yellow PLOT button. The display will zoom in on the bracketed region. The horizontal and vertical scales will each auto-range to provide the greatest magnification that the feature's size will allow.

  • Page 9: Printing

    The reference profile section is marked with vertical lines called the average reference cursors. These cursors are drawn with large dashes and connected by bars at the top and bottom of the screen to distinguish them from the other cursors. 1.

  • Page 10: Appendix A Printer Paper Change

    4. To print, press the PRINT button. To abort a printout before it is complete, press ABT. APPENDIX A Printer Paper Change Remove the printer cover by lifting at the front and disengaging the tab at the rear of the cover. Pull forward on the small lever located on the right of the printer in front of the rubber roller.

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