BRONKHORST EL-FLOW Select Series Instruction Manual
Thermal mass flow meters and controllers
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Instruction Manual
EL-FLOW® Select series
Thermal Mass Flow Meters and Controllers
Doc. no.: 9.17.099 rev. F
Date: 17-02-2020
ATTENTION
Please read this document carefully before installing and operating the product.
Not following the guidelines could result in personal injury and/or damage to the equipment.
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Table of Contents
Related Manuals for BRONKHORST EL-FLOW Select Series
Summary of Contents for BRONKHORST EL-FLOW Select Series
- Page 1 Instruction Manual EL-FLOW® Select series Thermal Mass Flow Meters and Controllers Doc. no.: 9.17.099 rev. F Date: 17-02-2020 ATTENTION Please read this document carefully before installing and operating the product. Not following the guidelines could result in personal injury and/or damage to the equipment.
- Page 2 Check the outside packaging box for damage incurred during shipment. If the box is damaged, then the local carrier must be notified at once regarding his liability, if so required. At the same time a report should be submitted to your Bronkhorst representative.
- Page 3 Bronkhorst® Warranty Bronkhorst® products are warranted against defects in material and workmanship for a period of three years from the date of shipment, provided they are used in accordance with the ordering specifications and not subject to abuse or physical damage.
- Page 4 Bronkhorst® Instruction Manual EL-FLOW® Select 9.17.099F...
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Page 5: Table Of Contents
Bronkhorst® Table of contents Introduction ......................7 Scope of this manual . - Page 6 Bronkhorst® Communication ......................28 3.6.1...
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Page 7: Introduction
Material Safety Data Sheets of the media to be used in the system (if applicable). Bronkhorst High-Tech B.V. cannot be held liable for any damage resulting from improper or unsafe use, use for other than the intended purpose or use with other media and/or under other conditions than specified on the purchase order. -
Page 8: Calibration
-equivalent. The standard control valves on Bronkhorst® mass flow controllers are suited for max. 64 or 100 bar pressure ratings. These valves are normally closed and available up to Kv-values of 1.5. Normally open valves can also be supplied. Various other valve constructions enable the controlling of flow rates at very low differential pressure or at high pressure (max. -
Page 9: Documentation
The EL-FLOW® Select comes with all necessary documentation for basic operation and maintenance. Some parts of this manual refer to other documents, most of which can be downloaded from the Bronkhorst website. Calibration certificates, test certificates and material certificates are included in the scope of delivery or can be provided on request. -
Page 10: El-Flow® Select
Bronkhorst® 1.7.1 EL-FLOW® Select Instruction Manual EL-FLOW® Select 9.17.099F... -
Page 11: El-Flow® Metal Sealed
Bronkhorst® 1.7.2 EL-FLOW® Metal Sealed 9.17.099F Instruction Manual EL-FLOW® Select... -
Page 12: Sealing Material Compatibility
When in doubt, do not hesitate to contact your Bronkhorst representative for more information. The table below lists compatibility with some commonly used gases: Sealing material Viton®... -
Page 13: Installation
· Input and output signal Operating conditions Test pressure Bronkhorst® instruments are pressure tested to at least 1.5 times the specified operating pressure and outboard leak tested to at least 2 * 10 mbar l/s Helium. The operating pressure must never exceed the test pressure. -
Page 14: Fluid Connection
When using other cables, cable wire diameters must be sufficient to carry the supply current, and voltage loss must be kept as low as possible. When in doubt, contact your Bronkhorst representative. When connecting the product to other devices, be sure that the integrity of the shielding is not affected; always use shielded cabling for signals and communication and do not use unshielded wire terminals. -
Page 15: Flow-Bus
The DeviceNet™ interface offers a direct connection to a DeviceNet™ network, according to the mass flow controller profile specified by the ODVA. The Bronkhorst® DeviceNet™ instrument is a Group 2 Only Server device whose messages comply with the Controlled Area Network (CAN) 2.0A standard and with the DeviceNet™ protocol. -
Page 16: Communication Interface
Bronkhorst® Communication interface The standard 9-pin D-sub connector provides the following communication interfaces: · Analog (0…5 Vdc; 0…10 Vdc; 0…20 mA or 4…20 mA) · Digital RS232 (ProPar) or RS485 (FLOW-BUS or Modbus) Additionally, the instrument can be provided with one of the following optional digital fieldbus interfaces: ·... -
Page 17: Rs232 Communication
RS232 communication. Consult the according fieldbus manual for more information about setting up a fieldbus network with Bronkhorst® instruments. If you need assistance with setting up a fieldbus system, contactyour Bronkhorst representative for information. 9.17.099F Instruction Manual EL-FLOW® Select... -
Page 18: E-8000 Power Supply, Readout And Control
· E-8000 power supply, readout and control module Consult the E-8000 manual (document 9.17.076) for more information. This manual can be downloaded from the Accessories and software section on the Bronkhorst® product pages (www.bronkhorst.com/products). 2.8.4 BRIGHT readout and control Most digital parameters and functions are... -
Page 19: Operation
Bronkhorst® Operation After correct installation of the EL-FLOW® Select and when all safety precautions have been taken into account, the instrument can be used for measuring and/or controlling mass flow in the system. Powering up and powering down · It is recommended to turn on power before applying fluid pressure and to switch off power only after relieving fluid pressure. -
Page 20: Changing Fluid Set
When switching to another fluid set, controller settings are automatically adjusted to the new process conditions, so there is no need to change PID controller settings manually. The FlowTune™ software and the associated documentation can be downloaded from the product pages on the Bronkhorst website: www.bronkhorst.com/products To connect with FlowTune™, use RS232 communication via the 9-pin D-sub connector. -
Page 21: Valve Safe State
Bronkhorst® Valve Safe State When a controlling instrument is not powered, the control valve automatically returns to its default state (also called Safe State), which is closed for a 'normally closed' valve (n/c) and fully open for a 'normally open' valve (n/o). To protect the system, certain events (such as communication errors) may cause the instrument to switch to Valve Safe State (see also indications). - Page 22 Bronkhorst® • Pattern Time Indication continuous No error continuous Critical error; the instrument needs servicing before it can be used short flash 0.1 sec on, Node occupied: re-install instrument FLOW-BUS 2 sec off No data exchange between master and slave (automatic recovery)
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Page 23: Interface Status
Bronkhorst® 3.5.1.1 Interface status EtherCAT® and PROFINET instruments are equipped with a third LED, to indicate the status of the communication interface. This bi-color LED (green and red) can give the following indications: Pattern Time EtherCAT® PROFINET • continuous Power off or initializing Interface not (yet) started •... -
Page 24: Multifunctional Switch
Bronkhorst® Module status Pattern Time Indication • continuous No power • continuous Normal operation mode on, green • 0.5 sec on, Device is in standby mode or configuration is missing, incomplete or incorrect blinking, 0.5 sec off green • •... -
Page 25: Power-Up Functions
Bronkhorst® 3.5.2.2 Power-up functions · In order to access these functions, press and hold the switch while powering up the instrument. · As long as the switch is held, the LEDs show a repeating sequence of patterns, where each pattern indicates a function. -
Page 26: Network Settings - Readout/Change
Bronkhorst® To execute a step, follow these instructions: · Press and hold the switch (flashing slows) · To select value 0 (zero), release the switch within 1 second, otherwise: · Count the number of LED flashes · Release the switch when the required value is reached ·... -
Page 27: Rotary Switches
Bronkhorst® Changing network settings · By briefly pressing the switch 5 times with intervals of up to 1 second in normal operation mode, the instrument enters a state in which the node address and baud rate can be changed (non-Ethernet based protocols only; for Ethernet based protocols (EtherCAT®, PROFINET), network parameters are configured by the fieldbus master and cannot be set on the... -
Page 28: Communication
EtherCAT® Bronkhorst® instruments with an EtherCAT® interface have 3 rotary switches, with which the EtherCAT® Second Address can be set in the range of 0 – 4095 (0xFFF). This value is copied to the Configured Station Alias register (address 0x0012:0x0013) at instrument start-up. -
Page 29: Digital Operation (Rs232)
3.6.2.1 FlowDDE Digital Bronkhorst® instruments can be operated via RS232 using the Bronkhorst® FlowDDE server application. Dynamic Data Exchange (DDE) provides a basic level of inter process communication between Windows applications. Together with a client application, either self-made or with a third party SCADA program, it is possible to create an easy way of data exchange between the flow meter/controller and a Windows application. -
Page 30: Software (Dde Applications)
DDE are for example MS-Office, LabVIEW, InTouch and Wizcon. Bronkhorst® software applications 'FlowView' (left) and 'FlowPlot' (right) FlowDDE and other Bronkhorst® applications are available on the support CD or can be downloaded from the product pages on the Bronkhorst website: www.bronkhorst.com/products 3.6.3... - Page 31 Bronkhorst® FLOW-BUS Digital Bronkhorst® instruments can be monitored and operated via RS232 using the free FlowWare software tools for Windows. These tools provide a graphical interface to the ProPar protocol (used by FLOW-BUS), for monitoring and changing instrument parameters. The FlowWare toolkit provides functionality for monitoring and operating digital instruments (FlowPlot, FlowView) and selection of the active fluid and configuration of the fieldbus connection (if applicable).
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Page 32: Adjusting Zero Point
Adjusting zero point The zero point (the signal that corresponds to zero flow) of a Bronkhorst® flow meter/controller is factory adjusted at approximately 20 °C and atmospheric pressure, with the instrument in an upright position. If the ambient conditions or mounting position are significantly different, the instrument might detect a flow when actually there is none. -
Page 33: Digital Parameters
Bronkhorst® Digital parameters Each instrument is controlled internally by a number of digital parameters, most of which can only be accessed using digital communication. Each communication protocol uses its own methods for communicating with instruments and accessing parameters. General This section describes the most commonly used parameters for digital operation of the EL-FLOW® Select. Descriptions are... -
Page 34: Special Parameters
Bronkhorst® Special parameters Init Reset Type Access Range FlowDDE FLOW-BUS Modbus Unsigned char 82/64 0/10 0x000A/11 Init Reset is used to unlock secured parameters (marked with a B symbol) for writing. It supports the following values: Value Description unlocked, secured parameters can be read and written to locked, secured parameters are read-only At power-up, Init Reset is always set to ‘Locked’... -
Page 35: Default Control Mode
Bronkhorst® Value Mode Instrument action Setpoint source Setpoint 100% Controlling, setpoint fixed to 100% Valve Fully Open Controller disabled, valve fully opened Calibration Mode Calibration mode enabled (factory only) Analog Slave Acting as slave of other instrument in analog mode... -
Page 36: Advanced Measurement And Control
Bronkhorst® Setpoint Type Access Range FlowDDE FLOW-BUS Modbus Unsigned int 0…32767 0x0021/34 This parameter is used to set the required flow rate for the controller. Within the setpoint range, value 32000 corresponds to 100% To convert Measure and Setpoint to actual volume flows, use parameters Capacity and Capacity Unit (see... -
Page 37: Device Identification
BHT Model Number Type Access Range FlowDDE FLOW-BUS Modbus RW B Unsigned char[35] 113/2 0xF110…0xF117/ 61713…61720 This parameter shows the Bronkhorst® instrument model type information. Firmware Version Type Access Range FlowDDE FLOW-BUS Modbus Unsigned char[6] 113/5 0xF128…0xF12A/ 61737…61739 Revision number of the firmware... -
Page 38: Alarms
Device type information string; this parameter contains an abbreviation referring to the identification number. Alarms Alarm settings are most easily accessible using FlowPlot or FlowView or a Bronkhorst® readout and control unit. The built-in alarm functionality can be used to handle different alarm types: ·... - Page 39 Bronkhorst® Alarm Delay Time Type Access Range FlowDDE FLOW-BUS Modbus Unsigned char 0…255 97/7 0x0C27/3112 This value represents the time in seconds the alarm action will be delayed when an alarm limit has been exceeded. This value also delays the alarm off action if an alarm limit is no longer exceeded.
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Page 40: Counter
Bronkhorst® Counter Counter settings are most easily accessible using FlowPlot or FlowView or a Bronkhorst® readout and control unit. Counter Mode Type Access Range FlowDDE FLOW-BUS Modbus Unsigned char 0…2 104/8 0x0D08/3337 Available modes: Value Description Counter off (default) Counting up continuously... -
Page 41: Network Configuration
Bronkhorst® Counter New Setpoint Type Access Range FlowDDE FLOW-BUS Modbus Unsigned int 0…32000 104/6 0x0D06/3335 New (safe) setpoint when a counter limit is reached until reset. Range 0…32000 represents 0…100% setpoint. Default value: 0 Reset Counter Enable Type Access Range... -
Page 42: Fluid Set
When in doubt, consult your Bronkhorst representative. Instruction Manual EL-FLOW® Select... - Page 43 Bronkhorst® Fluid Set Index Type Access Range FlowDDE FLOW-BUS Modbus Unsigned char 0…7 1/16 0x0030/49 With this parameter, any of the pre-configured fluids (up to 8) can be selected. Each fluid has its specific (configurable) properties, such as Fluid Name, Capacity, etc.
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Page 44: Advanced Fluid Set Parameters
Bronkhorst® Capacity Unit Type Pressure Type Access Range FlowDDE FLOW-BUS Modbus RW B Float 0…3.4E+38 33/11 0xA158…0xA159/41305…41306 This parameter defines a reference pressure for conversion of the measured mass flow to a volume flow. See also parameters Capacity Unit and Counter Unit. -
Page 45: Master/Slave Configuration (Flow-Bus)
Bronkhorst® Master/slave configuration (FLOW-BUS) Normally, there is no communication between slave instruments in a fieldbus system. The FLOW-BUS protocol, however, provides a feature to set up a master/slave relationship between two instruments. The typical behavior of a slave instrument is to automatically set its own setpoint relative to the output (measurement value) of its master. -
Page 46: Troubleshooting And Service
Energizing and de-energizing the equipment can indicate whether there is an electronic failure. After energizing, control behavior can be checked by applying fluid pressure. If you suspect leakage, do not disassemble the device for inspection, but contact your Bronkhorst representative for service or repairs. -
Page 47: Common Issues
Invalid node address Change node address (see Network configuration) Other Reset instrument and/or restart master. If problem persists, contact Bronkhorst. No output signal No power supply · Check power supply · Check cable connection · Check cable hook-up Invalid control mode (instrument... - Page 48 Piping, filters and/or control valve · Flush fluid system with clean, dry air. If reaches setpoint clogged or blocked problem persists, contact Bronkhorst. · For external proportional control valves: supply 0…15 Vdc and operational inlet pressure to valve and slowly increase voltage.
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Page 49: Service
Bronkhorst® Service For current information about Bronkhorst® and service addresses, please visit our website: ü www.bronkhorst.com Do you have any questions about our products? Our Sales Department will gladly assist you selecting the right product for your application. Contact sales by e-mail: ›... -
Page 50: Returns
All Bronkhorst® products covered by the WEEE directive (the majority) carry an image of a crossed-out waste bin (usually on the serial number label). If you wish to dispose of Bronkhorst® equipment bearing this... -
Page 51: Parameter Index
Bronkhorst® Fmeasure Parameter index Fsetpoint Measure Parameters Pressure Parameters - Alarms Setpoint Alarm Delay Time Setpoint Slope Alarm Info Temperature Alarm Maximum Limit Valve Output Alarm Minimum Limit Parameters - Network configuration Alarm Mode Fieldbus1 Address Alarm New Setpoint Fieldbus1 Baud Rate...
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