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entegris INTELLIGEN MV Installation And Use Manual

Dispense system
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CRITICAL MATERIALS HANDLING
INTELLIGEN® MV DISPENSE SYSTEM
Installation and use manual

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  • Page 1 CRITICAL MATERIALS HANDLING INTELLIGEN® MV DISPENSE SYSTEM Installation and use manual...

  • Page 2: Table Of Contents

    INTELLIGEN MV DISPENSE SYSTEM Table of Contents Overview .............. 2 Priming Tab ............17 Liability Ownership ..........2 Status Tab .............. 20 Alarms Tab ............22 General Manual Notes ........2 Recipe Tab ............. 23 Changes to the Manual .......... 2 Recharge Tab ............

  • Page 3: Overview

    Read the following carefully before continuing: contains basic safety information and contains basic safety information for the installation and use of In no event shall Entegris or its suppliers be liable the pump system. This manual covers the pump for any damages whatsoever (including, without system only.

  • Page 4: Safety

    INTELLIGEN MV DISPENSE SYSTEM Safety DANGER! Failure to follow these safety WARNING! Chemicals are not supplied instructions may lead to fire, electric shock, with this equipment. Refer to the chemical chemical exposure, or other injuries, or suppliers’ MSDS for specific health and damage to property.

  • Page 5: Handling

    Do not loosen any screws on the mechanism unless 3. Only employees properly trained to clean up specifically directed to do so by an Entegris service spills of hazardous materials should conduct engineer. Handle the dispense system with care to clean up activities.
  • Page 6 INTELLIGEN MV DISPENSE SYSTEM 8. Isolate pump from power sources to prevent fluids from flowing through unit during cleanup of leak or spill. a. Use appropriate lockout/tagout out procedures to de-energize unit. b. De-energize all areas of unit that may be in contact with spilled or leaking material.

  • Page 7: Specifications

    INTELLIGEN MV DISPENSE SYSTEM Specifications Dispense Volume 0.1 – 10.0 mL in 0.001 mL increments performance: Rate 0.1 – 3.0 mL/sec in 0.001 mL/sec increments Repeatability <0.02 mL 3 sigma Viscosity range* 100 – 300 cP Maximum dispense pressure** 0.40 MPa (60 psi)

  • Page 8: Compatibility

    INTELLIGEN MV DISPENSE SYSTEM Compatibility The IntelliGen dispense system has been optimized for the dispense of photoresists and other ® photochemicals. The system is uniquely designed to deliver highly accurate dispenses even at very low volumes with high repeatability. The internal wettable surfaces of the dispense system are PTFE, modified PTFE and Kalrez.

  • Page 9: System Overview

    INTELLIGEN MV DISPENSE SYSTEM System Overview Appearance Communications/ power cable Pressure Fluid inlet outlet Fluid Vacuum inlet inlet Vent Front View Side View Rear View 38.0 mm 60.7 mm 235.0 mm (9.25”) 60.7 mm (1.50”) (2.39”) (2.39”) 228.2 mm (8.98”) 242.6 mm...

  • Page 10: Two-State Technology Operating Principle

    INTELLIGEN MV DISPENSE SYSTEM Two-stage Technology Operating Principle The IntelliGen dispense system uses a proven, unique two-stage design to operate dispense and filtration functions independently. Filtration occurs at a reduced rate, which prevents microbubble formation and maximizes filter performance. The system uses two motors (one for fill, one for dispense), and advanced fluid paths to deliver extreme repeatability at dispense rates down to 0.1 mL /sec.
  • Page 11 INTELLIGEN MV DISPENSE SYSTEM The following diagram shows the absolute mini- mum required clearances for filter replacement. The filter can be placed into the service area, then slid into the manifold. This feature allows easy installation into tight areas with drip trays, etc.

  • Page 12: Installation

    INTELLIGEN MV DISPENSE SYSTEM Installation Facility Requirements • Filtered N or CDA, 551 kPa (80 psig) This section covers the site requirements, tools and • Vacuum >20 in Hg equipment to install the system. Technical support is available for all installation types.

  • Page 13: Install The Pump

    Refer to system dimensional drawings on previous pages. Step 3: Connect Electrical Supply Cable 1. Connect power/communications cable. Contact Entegris for any pinout or connection details. Step 4: Connect N and Vacuum Supplies 1. Connect filtered and regulated N or CDA supply to the inlet connection.
  • Page 14 INTELLIGEN MV DISPENSE SYSTEM 5. Slide in a new filter. 2. Hand tighten Pillar nut. 3. Use a 13 mm wrench to hold the fluid fitting WARNING! PINCH HAZARD! Keep adapter from turning when tightening the fingers clear of jaw mechanism to prevent personal injury.

  • Page 15: Storage

    INTELLIGEN MV DISPENSE SYSTEM Storage • A self-test page with tests designed to evaluate the status of the dispense pump. Short-term “Wet” Storage • An improved alarms page that allows the user to search and sort alarms history to determine A wet pump should be left in auto-recirculation changes to the system.

  • Page 16: Connect Tab

    • The exact COM port will depend on the specific computer connection and system setup. 2. Enter the Address, or click “Scan” to search for pump connections. • Each IntelliGen MV system can be assigned a unique address from 1 to 63. 3. Click “Connect” to connect to the pump.

  • Page 17: System Tab

    INTELLIGEN MV DISPENSE SYSTEM System Tab The System tab provides variables relating to the system management of the pump. Variables can be changed from the default values to optimize the dispense system. Use the mouse-over feature to obtain more information on displayed variables.

  • Page 18: Priming Tab

    INTELLIGEN MV DISPENSE SYSTEM Priming Tab The Priming tab provides the ability to purge the dispense pump and system of air using a “priming sequence” of steps. • Use “Loading a Sequence from a Saved File” to load an existing priming sequence.
  • Page 19 INTELLIGEN MV DISPENSE SYSTEM Creating a Sequence A priming sequence can be created with multiple steps to provide the most efficient sequence for a specific fluid type and viscosity: 1. Under “Type” select a type of priming. 2. Under “Count” enter how many times the type of priming is to be performed.
  • Page 20 INTELLIGEN MV DISPENSE SYSTEM Priming When in use, the Priming tab is divided into three sections: • In the top section, pump status and priming step is displayed. • In the middle section, an estimated time of completion and countdown is displayed.

  • Page 21: Status Tab

    INTELLIGEN MV DISPENSE SYSTEM Status Tab The Status tab displays realtime data of the dispense system. System pressure and vacuum readings with color display: Pump status bar - Green = OK Enhanced realtime pump Information and Last dispense Quick access...
  • Page 22 INTELLIGEN MV DISPENSE SYSTEM Quick Access Menu The Quick Access Menu allows the user to quickly perform certain functions without switching pages. This will clear all active warnings and errors. This will open the vent valve, relieving pressure on the fill side of the filter.

  • Page 23: Alarms Tab

    INTELLIGEN MV DISPENSE SYSTEM Alarms Tab The Alarms tab displays information on the pump system’s current state and history. Types of Alarms Error Type Action Solution Critical error Pump shuts down immediately. Clear error. If problem persists, Motors are disabled.

  • Page 24: Recipe Tab

    INTELLIGEN MV DISPENSE SYSTEM Recipe Tab The Recipe tab allows access to the variables that control dispense. To import or save all recipes or individual recipes: 1. Click on the Menu logo. 2. Select File. 3. Select Import or Save.

  • Page 25: Recharge Tab

    INTELLIGEN MV DISPENSE SYSTEM Recharge Tab The Recharge tab allows access to the variables that control the “Recharge” portion of the dispense cycle, including vent, purge, fill and filtration, and maximum dispense volume. Use the mouse-over feature to obtain more information on displayed variables.
  • Page 26 INTELLIGEN MV DISPENSE SYSTEM Profile Command. These are two profile commands: Profile A and Profile B: This will load the latest dispense to the graph below. This shows or hides the profile from the graph below. This will load a saved csv file to the graph below.

  • Page 27: Confirmation Tab

    INTELLIGEN MV DISPENSE SYSTEM Confirmation Tab The Confirmation tab compares a dispense profile to a referenced profile by means of a criteria of “settable” confirmation tests. • Alarms can be set to warning or error. • Alarm limits, upper and lower, can be set by the user.
  • Page 28 INTELLIGEN MV DISPENSE SYSTEM Enable/disable all confirmation alarms Reference and last Test operation Settable warning Enable warning dispense data and results criteria and error limits or error Using Dispense Confirmation 1. When the user is satisfied with the condition of dispense, press “Save to Reference”. Please be patient;...
  • Page 29 INTELLIGEN MV DISPENSE SYSTEM Confirmation Example • Since “All Confirmation Alarms” was disabled, the data field shows what the results would have been if the confirmations test was enabled. • The results show one test condition would have triggered an error.
  • Page 30 INTELLIGEN MV DISPENSE SYSTEM Reading the Results Read the results as a sentence. In this example, “Air Detect Volume” would have triggered an alarm, if enabled. Result shown in data field and “Overall Confirmation Status”. To enable tests, enable “All Confirmation Alarms”.
  • Page 31 INTELLIGEN MV DISPENSE SYSTEM Using the Profiling Page for Confirmation 1. In the Control Panel, check the graph boxes. • It is possible to graph reference profile separately by first selecting a reference and then pressing “Load” in the “Reference Only” section.

  • Page 32: Maintenance

    INTELLIGEN MV DISPENSE SYSTEM Maintenance 4. Verify that only ONE set of o-rings is used. WARNING! POTENTIAL CHEMICAL LEAK! The system needs no special maintenance beyond Use one set of o-rings only. Check that periodically changing the filter and flushing the the filter has o-rings.

  • Page 33: Flushing The System

    Contact Entegris prior cause particulates. Flushing of the pump is accom- to returning any device for service and to obtain...

  • Page 34: Updating The Firmware

    If this Attach a pressurized source of the fluid to each of occurs, please contact Entegris for assistance. the lines or use a gravity feed to each of the lines. 7. Blow dry the pump by applying compressed N 4.

  • Page 35: Troubleshooting

    INTELLIGEN MV DISPENSE SYSTEM Troubleshooting This section covers some of the common problems and solutions for the dispense system. Refer to the “Serial Communications Protocol” for details on event codes, error codes, and other details, if required. After making any adjustments, test the result with 2-3 dispenses.
  • Page 36 INTELLIGEN MV DISPENSE SYSTEM Poor End of Dispense If the problem is related to the end of the dispense, check the following: Symptom Problem Solution Droplet hangs down/drips External stop valve closing Close the valve earlier by adjusting the close...

  • Page 37: Appendix: Priming Recipe Information

    Priming filtration rate 0.1 – 3.0 mL/sec Filtration Priming filtration pressure maximum pressure Soak pressure Soak time Contact your local Entegris sales representative to create a customized filter priming recipe. INSTALLATION AND USE MANUAL P/N P92500 REV. A ENTEGRIS, INC.

  • Page 38: Priming Sequence Examples

    See the “Flushing the System” section of this manual. Please call your Regional Customer Service Center today to learn what Entegris can do for you. Visit www.entegris.com and select the Customer Service link for the center nearest you. Terms and Conditions of Sale All purchases are subject to Entegris’...
  • Page 39 ENTEGRIS, INC. Corporate Headquarters | 129 Concord Road | Billerica, MA 01821 USA Customer Service Tel. +1 952 556 4181 | Customer Service Fax +1 952 556 8022 In North America 800 394 4083 | www.entegris.com © 2014 Entegris, Inc.

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