Related Manuals for Granville-Phillips Micro-Ion 354 E Series
Summary of Contents for Granville-Phillips Micro-Ion 354 E Series
- Page 1 Series 354 ® ® Granville-Phillips Micro-Ion Vacuum Gauge Module with Analog or RS–232 Output Instruction Manual Instruction manual part number 354011E Revision A - October 2013...
- Page 3 Granville-Phillips Micro-Ion Vacuum Gauge Module with Analog or RS–232 Output This Instruction Manual is for use with all Granville-Phillips Series 354 Micro-Ion Vacuum Gauge Modules with analog output. A list of applicable catalog numbers is provided on the following page.
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Page 4: Module With Analog Output
® ® Granville-Phillips Series 354 Micro-Ion Vacuum Gauge Module with Analog Output or RS-232 Digital Interface Catalog Numbers for Series 354 Micro-Ion Modules - CE Marked Power supply and cable are not included. 354001E - Y D - T Analog Output... -
Page 5: Table Of Contents
Contents Chapter 1 Safety & Introduction ....... . . About These Instructions ......Caution and Warning Statements . -
Page 6: Maintenance
Contents Error Responses ........RS–232 Commands ....... RS–232 Command Set . -
Page 7: Chapter 1 Safety & Introduction
These instructions explain how to install, operate, and maintain the About These Instructions ® ® Granville-Phillips Micro-Ion E vacuum gauge module. The module may have an analog output or an RS–232 output. Installation and operating procedures depend on the output. -
Page 8: Reading And Following Instructions
Failure to comply with the instructions violates standards of design, manufacture, and intended use of the module. Brooks Automation / Granville-Phillips disclaim all liability for the customer's failure to comply with the instructions. • Read instructions – Read all instructions before installing or operating the product. -
Page 9: Service Guidelines
If the module must be returned to the factory for service, request a Return Materials Authorization (RMA) from Brooks Automation / Granville-Phillips. Do not return products without first obtaining an RMA. In some cases a hazardous materials document may be required. The Brooks Automation / Granville-Phillips Customer Service Representative will advise you if the hazardous materials document is required. - Page 10 Micro-Ion E Module Instruction Manual 354011, Rev. A...
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Page 11: Chapter 2 Installation
Pressure Relief Devices devices in the vacuum system. Brooks Automation / Granville-Phillips does not supply pressure relief valves or rupture disks. Suppliers of pressure relief valves and rupture disks are listed in the Thomas Register under “Valves, Relief” and “Discs, Rupture.”... -
Page 12: Step 1 Locate The Module
Chapter 2 Step 1 Locate the module To locate the module, refer to Figure 2-1 and follow the guidelines below. • Locate the module where it can be easily accessed. • For greatest accuracy and repeatability, locate the module in a stable, room-temperature environment. -
Page 13: Step 2 Attach Module To Vacuum Chamber
Tighten the clamp to compress the mating flanges together. Seal the O-ring. Step 3 Assemble and connect wiring Cable is user-supplied. Brooks Automation / Granville-Phillips does not Connecting Cable supply cable. Install externally shielded cable. • Connect the shield at both ends of the cable. -
Page 14: Wiring For Analog Module
Chapter 2 • If the module has an analog output, see Figure 2-2. Wiring for Analog Module • Table 2-1 lists pin designations for the 9-pin subminiature D connector. Table 2-1 Wiring Pin Designations for Analog Module Pin designation Function Pin number Micro-Ion E gauge ON/OFF (+) Switch between pins 1 and 2 turns Micro-Ion E gauge ON or OFF... -
Page 15: Wiring For Rs-232 Module
Installation • If the module has an RS–232 output, see Figure 2-3. Wiring for RS–232 Module • Table 2-2 lists pin designations for the 9-pin subminiature D connector. Table 2-2 Wiring Pin Designations for RS–232 Module Pin designation Function Pin number Chassis ground Ground connection for module chassis RS–232 TDX... -
Page 16: Eliminating Radio Frequency Interference
Chapter 2 If the analog module has a VCR type fitting or ConFlat flange, the module will be properly grounded via the vacuum chamber connection. If the analog or RS–232 module has a KF flange, refer to Figure 2-4 and follow these instructions to ground the module to the vacuum chamber: Attach a metal hose clamp or other metal clamp to the gauge stem of the housing. -
Page 17: Chapter 3 Operation Overview
Chapter 3 Operation Overview The module may have an analog output or an RS–232 output. The operating Analog versus RS–232 Operation Procedures procedure depends on the output. Using the module to measure the pressure of flammable or explosive gases can cause a fire or explosion resulting in severe property damage, personal injury, or death. -
Page 18: Rs-232 Operation
Chapter 3 If the module has an RS–232 output, the operation procedure consists of RS–232 Operation using RS–232 commands to perform the tasks listed in Table 3-2. Table 3-2 Commands, Tasks, and Page References for RS–232 Operation Command Task Instructions: Unlock interface functions Page 27 Toggle functions to locked or unlocked state... -
Page 19: Chapter 4 Analog Operation
11–16. If you need application assistance, phone a Brooks Automation / Granville-Phillips application engineer at 1–303–652–4400 or 1–800–776–6543 within the USA, or email co-csr@brooks.com. Once the module is operating, you may perform the tasks listed in Table 3-1 Operational Tasks on page 17. -
Page 20: Turn The Micro-Ion E Gauge On Or Off
Chapter 4 The Micro-Ion E gauge measures vacuum pressure for N or air within the Turn the Micro-Ion E Gauge ON or OFF ranges listed in Table 4-1. As pressure decreases to 5 x 10 –3 Torr (6.66 x 10 –1 Pa, 6.66 x 10 –3... -
Page 21: Micro-Ion E Gauge On/Off Status
Analog Operation The gauge ON/OFF status pin (pin 9) is an open collector transistor output Micro-Ion E Gauge ON/OFF Status rated for 40 Vdc, 50 mA maximum. Apply a voltage and pull-up resistor to monitor the ON/OFF status of the Micro-Ion E gauge. •... -
Page 22: Reading Vacuum Pressure
Chapter 4 Table 4-2 Conditions Indicated by Status LED LED Behavior Condition Indicated Solid green Micro-Ion E gauge is ON. See page 20 to turn the gauge OFF. Solid amber Micro-Ion E gauge is OFF. See page 20 to turn the gauge ON. Solid red •... -
Page 23: Correction Factor
Analog Operation Use one of the following equations to calculate N or air pressure as a function of analog output voltage: Volts 10 – Pvacuum (Torr) (Volts 10 ) – × Pvacuum 1.33 10 (mbar) (Volts 11 ) – × Pvacuum 1.33 10 (kPa) - Page 24 Micro-Ion E Module Instruction Manual 354011, Rev. A...
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Page 25: Chapter 5 Rs-232 Operation
11–16. If you need application assistance, phone a Brooks Automation / Granville-Phillips application engineer at 1–303–652–4400 or 1–800–776–6543 within the USA, or email co-csr@brooks.com. Once the module is operating, you may use RS–232 commands to perform Operational Tasks the tasks listed in Table 3-2 on page 18. -
Page 26: Error Responses
Chapter 5 If a command cannot be processed, the module returns one of the error Error Responses responses listed in Table 5-1. Table 5-1 RS–232 Error Responses Message from Module Possible Causes Solution COMM ER Parity error in command from host. •... -
Page 27: Rs-232 Commands
RS–232 Operation Some RS–232 commands require entry of ASCII character strings, integer RS–232 Commands values (such as “2400”), and values in engineering notation (such as “2.00E+02”). The ↵ symbol at the end of the command represents the carriage return (CR), which is entered as hex code 0D or, if you’re using a terminal, by simultaneously pressing the “Control”... -
Page 28: Tlu Toggling Locked Functions
Chapter 5 Send the toggle lock/unlock (TLU) command to set locked functions to an Toggling Locked Functions unlocked state or unlocked functions to a locked state. The module processes the command, then returns a character string that indicates whether or not interface functions are unlocked. TLU ↵... -
Page 29: Reset Values To Factory Defaults
RS–232 Operation Figure 5-1 Data Timing and Response Delays Table 5-4 Data Timing and Response Delay Limits Timing Segment Time Limit Time T 2 msec minimum 18 msec maximum 300 μsec maximum Time D Time H Depends on baud rate and command type. Use the following equation to calculate the total response time for each task listed in Table 5-5: Response time... -
Page 30: Fac Reset Baud Rate To Factory Defaults
Chapter 5 You may restore the baud rate to its default value of 9600 baud by sending Reset Baud Rate to Factory Defaults a factory reset (FAC) command. FAC ↵ FAC command from host: PROGM OK ↵ Response from module: After sending the FAC command, you must send the reset (RST) command. -
Page 31: Igs Read Micro-Ion E Gauge On/Off Status
RS–232 Operation If you send the ion gauge status (IGS) command, the module returns a Read Micro-Ion E Gauge ON/OFF Status character string that indicates the ON/OFF status of the Micro-Ion E gauge. IGS ↵ IGS command from host: 1 IG ON ↵ Example response from module: •... -
Page 32: Rd Read Vacuum Pressure
Chapter 5 Send a read pressure (RD) command to read vacuum pressure for N2 or air. Read Vacuum Pressure If the process gas is a gas other than N2 or air, you must apply a correction factor to determine the actual pressure for the gas that is being used. The RD command causes the module to return a value that indicates or Air Pressure vacuum pressure for N... -
Page 33: So Set Overpressure Limit
RS–232 Operation Send the set overpressure value (SO) command to set the highest pressure Set Overpressure Limit at which the Micro-Ion E gauge will operate. The value represented by the SO command is the pressure, in Torr, at which the Micro-Ion E gauge shuts OFF with increasing vacuum pressure. -
Page 34: Ver Read Firmware Version
VER ↵ VER command from host: 16497 01 ↵ Example response from module: • The first five digits are the Granville-Phillips internal part number. • The last two digits are the firmware version. Micro-Ion E Module Instruction Manual 354011, Rev. A... -
Page 35: Chapter 6 Maintenance
Chapter 6 Maintenance For customer service: Customer Service • Phone 1–303–652–4400 or 1–800–776–6543 within the USA. • Email co-csr@brooks.com. Shut OFF power to the module and refer servicing to qualified service Damage Requiring Service personnel under the following conditions: • The product has been exposed to rain or water. •... -
Page 36: Symptoms, Causes, And Solutions
• Install only those replacement parts that are specified by Brooks Automation / Granville-Phillips. • Do not install substitute parts or perform any unauthorized modification to the module. •... - Page 37 Maintenance Table 6-1 Failure Symptoms, Causes, and Solutions Symptom Possible Causes Solution Output voltage = 0 V. 24 Vdc power supply cable is Repair or replace power supply cable improperly connected or faulty. (see page 13). Pressure reading is too high. •...
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Page 38: Rs-232 Error Responses
Chapter 6 Table 6-2 lists failure symptoms, causes, and solutions that are indicated by RS–232 Error Responses an error response from the module. Table 6-2 Troubleshooting RS–232 Error Responses Message from Module Possible Causes Solution COMM ER Parity error in command from host. •... -
Page 39: Micro-Ion E Gauge Continuity Test
Maintenance If a problem with pressure measurement is traced to the module, the Micro-Ion E Gauge Continuity Test Micro-Ion E gauge can be tested with an ohmmeter. This test should only be performed while the Micro-Ion E gauge is exposed to atmospheric pressure and the electronics is removed from the module. - Page 40 10. Measure the resistance of the collector pin to the gauge case. The reading should be infinity. If resistance values are not the specified values, the Micro-Ion E gauge is defective. Contact Brooks Automation / Granville-Phillips customer service to order a replacement gauge. Micro-Ion E Module Instruction Manual 354011, Rev. A...
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Page 41: Service Guidelines
If the module must be returned to the factory for service, request a Return Authorization (RA) from Brooks Automation / Granville-Phillips. Do not return products without first obtaining an RA. In some cases a hazardous materials document may be required. - Page 42 Chapter 6 Micro-Ion E Module Instruction Manual 354011, Rev. A...
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Page 43: Appendix A Specifications
Appendix A Specifications or Air Pressure Measurement Specifications Measurements will change with different gases and mixtures. Torr 5 x 10 to 5 x 10 –3 Absolute Pressure Range mbar 6.66 x 10 to 6.66 x 10 6.66 x 10 to 6.66 x 10 –1 Overpressure is the pressure at which the Micro-Ion E gauge shuts OFF with Overpressure Limit... -
Page 44: Baud Rate
Appendix A Outputs and Indicators Module with Analog Output Logarithmic, 0 to 9 Vdc, 1 volt per decade Analog Pressure Output Torr, Pa, or mbar Pressure Measurement unit Open collector transistor output is rated for 40 Vdc, 50 mA maximum. Micro-Ion E Gauge ON/OFF •... -
Page 45: Ip Rating
Specifications Electrical Connectors 9-pin subminiature D male I/O Connector 24 Vdc ±15%, 12 W maximum Power Requirements Physical Specifications 340 g (12 oz.) Weight Powder-coated extruded aluminum Case Material 304 stainless steel, tantalum, tungsten, yttria-coated iridium, alumina, CuAg Materials Exposed to Vacuum eutectic, Kovar, borosilicate glass IP20 IP Rating... - Page 46 Micro-Ion E Module Instruction Manual 354011, Rev. A...
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Page 47: Theory Of Operation
Appendix B Theory of Operation The Micro-Ion E vacuum gauge module houses a Micro-Ion gauge Module Operation (Bayard-Alpert type ionization gauge). The functional parts of the Micro-Ion E gauge are the filament (cathode), Micro-Ion E Gauge Operation grid (anode), and ion collector. Figure B-1 is a schematic diagram of the Micro-Ion E gauge. - Page 48 Appendix B The amount of ion current for a given emission current and pressure depends on the Micro-Ion E gauge design. This gives rise to the definition of ionization gauge sensitivity, frequently denoted by “S”: Ion current --------------------------------------------------------------------- - × Emission current Pressure Micro Ion gauge sensitivity for N or air is 20/Torr (0.15/Pa, 15/mbar).
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Page 49: Index
Index vacuum chamber ground connections 16 wiring terminals About these instructions 7 module with analog output 14 Analog output specifications 44 module with RS-232 output 15 Appendixes Filament material 44 Specifications 43 Firmware version 34 Theory of Operation 47 Ground wiring 15 Baud rate 28 I/O wiring connector 45 Case material 45... - Page 50 Index sensitivity to N Pressure specifications 44 correction factors 23, 32 Module gases other than N or air 23, 32 attaching to vacuum chamber 13 or air 22, 32 components 11 Pressure relief devices 11 location 12 operation 47 status 33 Radio frequency interference (RFI) 16 Reading and following instructions 8 Response time 43...
- Page 51 Index response time 43 RS-232 output 44 storage temperature 43 temperature 43 weight 45 Temperature bakeout 43 operating 43 storage 43 Theory of operation Micro-Ion E gauge 47 module 47 Troubleshooting precautions 35 symptoms, causes, solutions 36 Weight 45 Wiring analog module 14 assembling and connecting 13 ground 15...
- Page 52 Micro-Ion E Module Instruction Manual 354011, Rev. A...
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Page 54: Customer Service
Series 354 ® ® Granville-Phillips Micro-Ion Vacuum Gauge Module with Analog or RS–232 Output Customer Service/Support For customer service within USA, 8 AM to 5 PM Mountain Time Zone, weekdays excluding holidays: Granville-Phillips 6450 Dry Creek Parkway Longmont, CO 80503 USA...
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