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Unload
s ample
h older
f rom
T ransfer
R od
t hen
c lose
t he
d oor
&
h old
c losed
-
Push
E VAC
t o
R ough
t he
S EC
( wait
t ill
g reen
l ight
f or
S EC
V ACUUM
H I
l ights
u p
)
-
Check
t he
p ressure
f or
I P
-
Turn
o ff
D isplay
p ower.
<
. 5x10
,
I P
< 1.5x10
-‐7
1
2
,
I P
< 6x10
-‐7
-‐6
3
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