TABLE OF CONTENTS
E2C Rev.6
1.1 Conventions ..............................................................................................3
1.3 For Operations ..........................................................................................4
1.4 Emergency Stop ........................................................................................5
2.3 Appearance .............................................................................................12
2.3.1 Table Top Standard-model: S Type ..............................................12
2.3.2 Table Top Cleanroom-model: C Type...........................................14
2.4 Specifications ..........................................................................................20
3.2 Base Table...............................................................................................24
3.3.1 Table Top .....................................................................................26
3.4.2 Transportation..............................................................................29
3.4.3 Contents ......................................................................................29
3.5 Installation ...............................................................................................30
3.5.1 Table Top .....................................................................................30
3
9
23
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