HEIDELBERG MLA150 User Manual
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HEIDELBERG MLA150 User Manual

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User Guide
MLA150
Maskless Aligner

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Summary of Contents for HEIDELBERG MLA150

  • Page 1 User Guide MLA150 Maskless Aligner...
  • Page 2 MLA150 Doc. No.: DWL-HI-062 Revision: 1 (July 2016) Copyright © 2016 by Heidelberg Instruments User Guide...

  • Page 3: Table Of Contents

    MLA150 Table of Contents Table of Contents Table of Contents ......................i List of Figures ....................... iv List of Tables ........................ iv Introduction ......................1 1.1 About this User Guide ..................... 1 1.2 Contact ........................2 1.3 Related Documentation ................... 3 Safety ........................
  • Page 4 MLA150 Table of Contents 4.2.1 Menu Bar ....................27 4.2.2 Tab Section ....................27 4.2.3 Info Section ....................28 4.3 Substrate Representation ..................31 System Startup ....................33 5.1 Powering Up ......................33 5.2 Powering Down ..................... 34 Job Setup ......................35 6.1 Select Job ......................
  • Page 5 MLA150 Table of Contents 7.1 Control Panel ......................63 7.2 Camera Window ....................65 7.3 Optimizing Alignment and Exposure Results ............66 7.3.1 Unsatisfying Alignment Measurements ............ 66 7.3.2 Unsatisfying Exposure Results ..............67 7.4 Back Side Alignment ..................... 68 7.4.1...
  • Page 6 MLA150 List of Figures List of Figures Figure 1: System components ................13 Figure 2: Elements of the laminar flow box ............15 Figure 3: Temperature control readout ..............15 Figure 4: System support ..................17 Figure 5: Operator Panel ..................17 Figure 6: Stage system with optics plane ..............

  • Page 7: Introduction

    1.1 About this User Guide This user guide gives information and instructions on how to handle the MLA150 system properly. It is important that every person who intends to work with the system reads this guide in order to avoid possible mishandling leading to damage to the system or to persons.

  • Page 8: Contact

    2807 Oregon Court, Unit E2 Hsinchu City, 30069 Torrance, CA, 90503 Taiwan Phone +886-3-5715188 Phone:+1-310-212-5071 +886-3-5715388 Fax: +1-310-212-5254 E-Mail: service_taiwan@himt.de Email: service_usa@himt.de You can also reach Heidelberg Instruments via email: himt@himt.de, or visit our site on the internet: http://www.himt.de User Guide...

  • Page 9: Related Documentation

    1.3 Related Documentation Heidelberg Instruments offers several further manuals related to the machine and its operation. If you did not get one of these or need an update, please contact Heidelberg Instruments, Germany (1.2 Contact). See the list of related documents below: ...
  • Page 10 MLA150 1 Introduction User Guide...

  • Page 11: Safety

    2.1 Intended Use and Limitations The intended use of the MLA150 lithography system is to expose structures on photosensitive, non-flammable layers which are located on non-flammable substrates. These substrates must not exceed the specified maximum dimensions and must be free of damage such as scratches or cracks.

  • Page 12: Conventions

    2.3 Laser Safety The MLA150 employs two types of continuous wave lasers, one for position measurement of the stage (interferometer laser), one for design exposure (exposure laser). When the window is closed, all laser light is blocked or absorbed, and the system is effectively of laser class 1.
  • Page 13 MLA150. Eye injuries and/or skin burns! Severe damage to the eye and possibly to the skin can be caused by laser radiation of class 3B or 4 ...

  • Page 14: Electrical Safety

    MLA150 2 Safety 2.4 Electrical Safety A CEE type 220-240 V, 16 A single-phase cable connector supplies operating power in the MLA. It is also possible to attach a local-type cable to a local-type wall connector. Please refer to the Pre-Installation Guide for details.

  • Page 15: Other Risks During Operation

    MLA150 2 Safety 2.5 Other Risks during Operation Injuries by moving parts or heat! If covers are removed, the operator may be exposed to dangerous collisions with moving parts, or heated components.  Do not remove any covers that are fixed with screws ...

  • Page 16: Labels

    MLA150 2 Safety 2.7 Labels Flowbox front E-Rack REAR DOOR FRONT DOOR User Guide...
  • Page 17 MLA150 2 Safety Optics cover: front cover, side covers, rear cover User Guide...
  • Page 18 MLA150 2 Safety User Guide...

  • Page 19: System Description

    MLA150 3 System Description This chapter gives a short description of the MLA150 lithography system. The MLA150 system consists of the following individual components:  Lithography Unit  Electronics Rack  Cooling water supply (not explicitly described in this document) ...

  • Page 20: Lithography Main Unit

     Optics System 3.1.1 FLOWBOX The flow box is the housing of the lithography system and protects the MLA150 from damage. It also provides a stable environment in terms of temperature, laminar flow and clean air. This is of importance because only such a stable environment guarantees constant exposure conditions which guarantees the smallest possible variation of exposure parameters.

  • Page 21: Figure 2: Elements Of The Laminar Flow Box

    MLA150 3 System Description ELEMENTS OF THE LAMINAR FLOW BOX: TEMPERATURE CONTROL UNIT DISPLAY SWITCH PANEL CASTOR WHEEL WINDOW LIGHT Figure 2: Elements of the laminar flow box TEMPERATURE CONTROL UNIT ACTUAL TEMPERATURE TARGET TEMPERATURE RESET BUTTON HEAT OUTPUT REGULATOR...
  • Page 22 It is recommended to shut down the system and call one of Heidelberg Instruments service offices (see 1.2 Contact). CASTOR WHEELS The flow box stands on eight castor wheels that have locking brakes in order to provide a stable position.

  • Page 23: System Components

    MLA150 3 System Description 3.1.2 SYSTEM COMPONENTS SYSTEM SUPPORT A heavy-duty aluminum construction and four buffers that are filled with air to ensure vibration isolation support the granite base plate. To avoid any unnecessary bending forces in the base plate, these buffers are arranged in a triangular geometry (the two buffers at the front side are close together and act as one point).
  • Page 24 MLA150 3 System Description STAGE SYSTEM The stage is equipped with linear motors in both axes. They provide smooth and constant movement with low positioning errors. One air bearing and one roller bearing support the movement in y-direction whereas the x-axis is equipped with two roller bearings.

  • Page 25: Figure 6: Stage System With Optics Plane

    MLA150 3 System Description OPTICS PLANE The optics system is located on a smaller granite top plate supported by the base plate and its granite side elements. The optics plane contains the optical elements and all camera components. The write head stands at the end of the optical path and is mounted to this plate with downward beam direction facing the substrate.

  • Page 26: Optics System

    MLA150 3 System Description 3.1.3 OPTICS SYSTEM DIGITAL MICROMIRROR DEVICE (DMD) The DMD is an electrical input and optical output micro-electric-mechanical system for spatial light modulation. It is composed of an array of micro light switches containing individually controlled micro mirrors which correspond to the pixels in the image to be displayed.

  • Page 27: Figure 7: Interferometer Function

    MLA150 3 System Description defocusing range [-10 to 10]. This range is necessary to adapt the focus distance to an appropriate value which mainly depends on resist thickness and thus varies. INTERFEROMETER The laser interferometer is an optical device for measuring the stage position. The machine achieves its required positioning precision with this important element.

  • Page 28: Electronics Rack

    MLA150 3 System Description 3.2 Electronics Rack The electronics rack consists of several units. These units drive and control the system and provide communication with the operator of the system. The following electronic units are located inside the electronics rack:...

  • Page 29: Orientation Of Stage And Design

    MLA150 3 System Description 3.3 Orientation of Stage and Design It is important to load the substrate with the correct orientation on the center of the chuck. The coordinate system of the design to be exposed must match the direction and orientation of structures already exposed on the substrate.

  • Page 30: Figure 11: Rotation Of Coordinate System On Chuck

    MLA150 3 System Description Thus, the coordinate system of the design is also arranged rotated by 90 degrees clockwise (Figure 11). 90° clockwise loading side Figure 11: Rotation of coordinate system on chuck For easier orientation on the chuck regarding the design coordinates, the following figure gives an example of alignment crosses and their location on the substrate.

  • Page 31: Wizard Description

    MLA150 4 Wizard Description The MLA150 offers quick setup of exposure and alignment aided by the Exposure Wizard. This intuitive user interface guides the operator through the steps of an exposure set up. To start the wizard, double-click on the link icon.
  • Page 32 MLA150 4 Wizard Description MENU BAR The menu bar is located at the top of the window, offering a number of menu utilities. INFO SECTION The info block gives information about the hardware condition and the progress or status of the current exposure setup.

  • Page 33: Static Wizard Elements

    MLA150 4 Wizard Description 4.2 Static Wizard Elements 4.2.1 MENU BAR FileExit: To leave the wizard and close the window ToolsControl Panel: Activates the Control Panel (see 7.1 Control Panel) ToolsInitialize Stage: To initialize the stage in case the hardware info shows that it is not initialized UserSelect User:...

  • Page 34: Info Section

    MLA150 4 Wizard Description 4.2.3 INFO SECTION The Info Section consists of four subsections:  Exposure Info  Alignment Info  Progress Info  Hardware Info Exposure Info  Job Name is a combination of the word job and the job number. It is editable in the Job frame by double-clicking into the Job Name value field.
  • Page 35 MLA150 4 Wizard Description Alignment Info This info box has two tables: Expose Cross Positions shows the positions of the alignment crosses set during the setup of the layer previous to the layer with the design that is to be aligned. For...
  • Page 36 MLA150 4 Wizard Description  Stripe Number shows which stripe is being exposed at the moment.  Time [hh:mm]. shows the time that the exposure takes in total.  Remaining Time [hh:mm] shows the time that the exposure is still requiring to be finished.

  • Page 37: Substrate Representation

    MLA150 4 Wizard Description 4.3 Substrate Representation In the menu panel you find a simple graphical depiction of the substrate showing the design position on the substrate. The position of the camera is also displayed in order to see which part of the substrate is currently visible in the camera image.
  • Page 38 MLA150 4 Wizard Description The horizontal and vertical measure lines indicate the real size of the substrate. The size of the design representation and the size of the camera are scaled in relation to these measure lines. To move the design to a certain position on the substrate, use the Control Panel.

  • Page 39: System Startup

    MLA150 5 System Startup This chapter describes how to power up and power down the MLA150. For powering up and down the system the buttons at the front of the flow box are used. 5.1 Powering Up Powering up the system: On (I) If not already done, switch on the main switch at the e-rack.

  • Page 40: Powering Down

    MLA150 5 System Startup  At each startup, the menu checks for necessary component initializations. A window shows the status of hardware initialization 5.2 Powering Down Powering down in emergency case: In case of emergency, press the EMERGENCY OFF button at the front of the flow box.

  • Page 41: Job Setup

    MLA150 6 Job Setup As mentioned before (4 Wizard Description), the MLA150 provides an exposure wizard that guides the user through the steps needed to perform an exposure. The following subchapters build a sequence of actions that have to be executed one after the other.

  • Page 42: Select Job

    MLA150 6 Job Setup 6.1 Select Job To start the wizard, double-click on the desktop. The Exposure Wizard opens and automatically creates a new job. This job has a Name and a Number. The name is editable and can be changed by clicking into the Name field. The number is fixed and auto-incrementing.

  • Page 43: Select Substrate Template

    MLA150 6 Job Setup also be used for finding the appropriate dose and defoc relation for the exposure. Draw Mode To create boxes, circles or ellipses of arbitrary size limited only by the camera field. Used for creating connections between structures or for repairing imperfections in structures of an exposed layer.

  • Page 44: Load Design

    MLA150 6 Job Setup 6.3 Load Design In Draw Mode there is no design loading procedure because this mode is for exposing boxes, circles and ellipses of arbitrary size limited only by the camera field. Skip this subchapter and go to 6.5 Load Substrate.

  • Page 45: Standard: Alignment

    MLA150 6 Job Setup  The design is now listed in the Layer frame. Optional: Double-click the value field titled Resist and select the appropriate resist type for your application. The recommended dose for exposures on that type of resist is listed automatically in the Sensitivity field. In the Thickness field the thickness of the resist is displayed.

  • Page 46: Series

    MLA150 6 Job Setup  The design is now listed in the Layer frame. Double-click into the value field titled Align Crosses. A list opens showing several templates with the crosses required for alignment procedures. A special template called _Manual.xml is offered for cases in which the cross positions should be selected in the alignment setup.

  • Page 47: Convert Design

    MLA150 6 Job Setup 6.4 Convert Design If you have chosen a listed design file, skip to the next section 6.5 Load Substrate. For converting a new design, follow these instructions: In the Layer frame: Double-click into the value field titled Design. A page containing a list of designs opens.
  • Page 48 MLA150 6 Job Setup In the Conversion window: From the menu bar, select File New Job (alternatively click the sheet icon). You are asked to enter a name for the job. Enter a name and click Ok. Click Add, select a design format. A directory opens containing the source files for the selected design format.

  • Page 49: Load Substrate

    MLA150 6 Job Setup 6.5 Load Substrate After you have chosen the appropriate substrate, selected a substrate template and loaded a design, you can place the substrate on the chuck. The following instructions guide you through the loading procedure. You also get on-screen instructions inside the yellow Info Box.
  • Page 50 MLA150 6 Job Setup STEP-BY-STEP SUBSTRATE LOADING In the Setup Job panel: Click Load Substrate. The stage moves into loading position.  The wizard moves on to the Load Substrate panel. Wait until the movement has stopped. Resist coated substrates get useless when exposed to...
  • Page 51 MLA150 6 Job Setup In the Load Substrate panel, click Continue. Check if the substrate is placed under the write head. If not, see below. If the substrate position is correct, click Continue. Note: In case the substrate is not placed under the write head, click Cancel. The stage moves back to loading position.

  • Page 52: Draw Structures

    MLA150 6 Job Setup 6.6 Draw Structures After having selected the appropriate substrate, you can start drawing the image. In the Draw Mode panel In the Procedure frame, select the kind of shape to use for image drawing by activating the corresponding radio button: ...

  • Page 53: Draw Image

    MLA150 6 Job Setup 6.6.1 DRAW IMAGE Click Draw Image and select the area for the structure on the substrate inside the camera window (use the Stage Control section for moving on the substrate). In the camera window select the shapes of the structures that should be drawn onto the substrate by clicking on the corresponding icon.

  • Page 54: Draw Line Or Polygon

    MLA150 6 Job Setup To confirm the drawn image, click Submit in the menu bar of the camera window. To clear the image, click Clear and start again. To save the image, click Save, insert a name for the file and save it. To cancel the entire drawing procedure, click Cancel.

  • Page 55: Expose Crosses In Draw Mode

    MLA150 6 Job Setup Click the left mouse button at the position in which the first point of the line should be set. Move to the next point of the line/polygon by using the arrow buttons of the Control Panel.

  • Page 56: Setup Overlay Alignment

    For exposing the first layer, skip this subchapter and continue with 6.8 Expose Design. The MLA150 is able to execute precise alignment exposures. In order to achieve best results, the system offers top side as well as back side alignment. Back side alignment (BSA) is realized by a separate camera unit for back side viewing that is mounted inside the stage and looks to the substrate.
  • Page 57 MLA150 6 Job Setup Alignment Procedure In the Alignment panel: If the template _Manual.xml for manual setup of the alignment cross coordinates was chosen, select Top Surface for top side alignment or Back Surface for back side alignment from the dropdown list. The other templates already contain this information.
  • Page 58 MLA150 6 Job Setup Double-check the positions of the alignment crosses taken from the template file.  Editing: The Edit button is used for changing the alignment cross positions. Click Edit and enter new values. To delete one of the cross coordinates, delete the value and leave the field blank.
  • Page 59 MLA150 6 Job Setup Repeat the procedure for all alignment cross positions. Cancelling the alignment procedure is possible by clicking Cancel. Alternatively, with Setup Job the alignment procedure gets cancelled and the Exposure Wizard moves back to the Setup Job panel.

  • Page 60: Expose Design

    MLA150 6 Job Setup 6.8 Expose Design The system offers two standard exposure modes, one with and the other one without overlay alignment. Additionally, it is possible to execute series exposures in order to determine the appropriate defoc settings and dose settings for the current exposure job.

  • Page 61: Overlay Exposure Procedure

    MLA150 6 Job Setup  The machine is exposing the design. If Auto-Unload is not activated, then after completion of the exposure a dialog window pops up asking if the substrate should be unloaded. Click Yes, if you want the system to unload the substrate or No if the substrate should stay loaded on the chuck e.
  • Page 62 MLA150 6 Job Setup  Rotation [mRad]: If the Use checkbox is activated, the system calculates the rotation of the substrate.  Scaling X/Y: The system compares the distance measured during alignment with the distance given by the alignment positions. From the deviation a scaling factor results.

  • Page 63: Series Exposure Procedure

    MLA150 6 Job Setup 6.8.3 SERIES EXPOSURE PROCEDURE After having loaded the substrate and the design, the substrate is ready to be exposed. You are in the Series panel of the Series mode. In this panel several values have to be set for series exposure. Find the explanation of...
  • Page 64 MLA150 6 Job Setup When choosing Dose Series only, the Defoc value is fixed. The Dose value is fixed when Defoc Series is active. The substrate visualization shows the arrangement of the fields according to the values set in the Series panel.

  • Page 65: Draw Mode Exposure Procedure

    MLA150 6 Job Setup  The machine is exposing the design. If Auto-Unload is not activated, then after completion of the exposure a dialog window pops up asking if the substrate should be unloaded. Click Yes, if you want the system to unload the substrate or No if the substrate should stay loaded on the chuck e.

  • Page 66: Unload Substrate

    MLA150 6 Job Setup 6.9 Unload Substrate For unloading the substrate the system provides a function called Auto-Unload. This function is selectable by activating a checkbox. Read more in the information below. Figure 14: Unloading options in Standard Mode and Series Mode...
  • Page 67 MLA150 6 Job Setup Removing the substrate from the chuck To remove the substrate from the chuck, follow the steps below: Push the window button and release it again. The window opens. At the operator panel switch off the vacuum.
  • Page 68 MLA150 6 Job Setup User Guide...

  • Page 69: System Utilities And Tools

    MLA150 7 System Utilities and Tools The MLA offers further elements beside the main menu that facilitate handling the exposure and alignment processes. 7.1 Control Panel The Control Panel is a utility that provides navigation functions as well as other necessary control functions.
  • Page 70 MLA150 7 System Utilities and Tools A positive number brings the laser focus closer to the surface, exposing deeper into the resist. The Stage Control frame provides arrow buttons for moving on the substrate surface. Every click is one movement. They are also used for fine positioning.

  • Page 71: Camera Window

    MLA150 7 System Utilities and Tools 7.2 Camera Window Together with the wizard we provide a camera software that opens in an individual window. The window is only for viewing purposes and is navigable by using the Control Panel (see 7.1 Control Panel). The example below shows the camera window performing a manual alignment.

  • Page 72: Optimizing Alignment And Exposure Results

    MLA150 7 System Utilities and Tools 7.3 Optimizing Alignment and Exposure Results 7.3.1 UNSATISFYING ALIGNMENT MEASUREMENTS Sometimes the measurements during the alignment process might be unsatisfying due to bad contrast caused by uneven surface conditions or low reflectivity of the substrate.

  • Page 73: Unsatisfying Exposure Results

    7.3.2 UNSATISFYING EXPOSURE RESULTS Sometimes exposure results can be unsatisfying for the needs of distinctive applications. The MLA150 offers a way of optimizing the exposure outcomes. It is possible to adjust the Defoc value or the Dose value. The following section gives details about how to work with these two values in order to improve exposure results.

  • Page 74: Back Side Alignment

    The following section informs about the back side alignment (BSA) preparation and exposure procedure. 7.4.1 OVERVIEW OF BSA MARKER ZONES The MLA150 comes with a multi-purpose chuck ready to expose both large and small substrates. For BSA, the chuck provides four designated openings. Markers located in these areas are detected by the BSA camera system and used for alignment.

  • Page 75: Figure 16: Bsa Marker Zones Overview

    MLA150 7 System Utilities and Tools Figure 16: BSA marker zones overview User Guide...

  • Page 76: Bsa Exposure Preparation

    After processing of side A, position wafer on chuck with side B on top Remove the inlets of the required BSA holes in the chuck. Define your default marker positions in the MLA150 menu. Select Backside Camera for this measurement.

  • Page 77: Operator Maintenance And Troubleshooting

    Make sure nothing is placed inside the system that obstructs stage movement ENVIRONMENTAL ADJUSTMENT Allow room humidity to come within the specified range before using the MLA150. If temperature is out of range, determine how long this condition has prevailed.

  • Page 78: Troubleshooting

     Focus or energy setting incorrect  Out of date resist THE MLA150 STOPS ANYTIME DURING THE EXPOSURE  The MLA150 reached an end switch because the imaging area was set incorrectly  The interferometer head is broken  The conversion encountered a problem SUBSTRATES COME OUT COMPLETELY CLEAR ...

  • Page 79: Teamviewer Software

    MLA150 8 Operator Maintenance and Troubleshooting  Edge beads are not removed. Remove edge beads with the appropriate method to provide uniform thickness of coating across the wafer. 8.3 TeamViewer Software On the desktop, you find the icon for the TeamViewer Software. This software enables the service engineer to enter the system via remote connection.

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