Related Manuals for Pfeiffer Vacuum CMR 361
Summary of Contents for Pfeiffer Vacuum CMR 361
- Page 1 A P A S S I O N F O R P E R F E C T I O N CMR 361 … CMR 365 Ceramic Capacitance Gauge Operating Instructions...
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Page 2: Product Identification
Product Identification In all communications with Pfeiffer Vacuum, please specify the information given on the product nameplate. For convenient re- ference copy that information into the space provided below. Pfeiffer Vacuum, D-35614 Asslar Typ: Range: F-No: BG 5136 BEN / B... -
Page 3: Validity
The part number (No) can be taken from the product nameplate. If not indicated otherwise in the legends, the illustrations in this document correspond to CMR 361 gauges with the DN 16 ISO-KF vacuum connection. They apply to other vacuum connections by analogy. -
Page 4: Intended Use
Intended Use The Ceramic Capacitance Gauges of the CMR 36X series are intended for absolute pressure measurement of gases in their respective pressure ranges (→ 3). Function The Ceramic Capacitance Gauge consists of a capacitive sensor element made of aluminum oxide ceramics and electronics which convert the capacitance into a DC voltage output signal. -
Page 5: Table Of Contents
Contents Product Identification Validity Intended Use Function Trademark Patents Scope of Delivery Safety 1.1 Symbols Used 1.2 Personnel Qualifications 1.3 General Safety Instructions 1.4 Liability and Warranty Technical Data Installation 3.1 Vacuum Connection 3.2 Power Connection Operation 4.1 Displays 4.2 Zeroing the Gauge 4.2.1 <ZERO>... -
Page 6: Safety
Safety Symbols Used DANGER Information on preventing any kind of physical injury. WARNING Information on preventing extensive equipment and environ- mental damage. Caution Information on correct handling or use. Disregard can lead to malfunctions or minor equipment damage. Notice Personnel Qualifications Skilled personnel All work described in this document may only be carried out by persons who have suitable technical training and the neces-... -
Page 7: General Safety Instructions
Communicate the safety instructions to all other users. Liability and Warranty Pfeiffer Vacuum assumes no liability and the warranty becomes null and void if the end-user or third parties • disregard the information in this document • use the product in a non-conforming manner •... -
Page 8: Technical Data
Technical Data Measurement range → "Validity" Accuracy PT R24 600 … PT R24 633 0.20% of reading PT R24 640 … PT R24 643 0.50% of reading Temperature effect on zero 0.0050% F.S./ °C PT R24 600 … PT R24 623 0.015% F.S./ °C PT R24 630 …... - Page 9 Gauge identification Resistance 13.2 k refer- Ω enced to supply common Supply DANGER The gauge may only be connected to power sup- plies, instruments or control devices that conform to the requirements of a grounded protective extra- low voltage (SELV). The connection to the gauge has to be fused.
- Page 10 Materials exposed to vacuum Flange, tube stainless steel AISI 316L Sensor and diaphragm ceramics (Al ≥99.5%) Sensor–diaphragm connection glass ceramics solder Ceramics–metal connection AgTiCu hard solder, Vacon 70 (28% Ni, 23% Co, 49% Fe) Internal volume ≤3.6 cm Admissible pressure (absolute) PT R24 600 …...
- Page 11 Dimensions [mm] DN 16 ISO-KF DN 16 CF-R OD½" 8 VCR female Weight ≤370 g BG 5136 BEN / B (2013-11)
- Page 12 = (U - 1) × c (F.S.) Torr 0.125 12.5 0.094 Example: Gauge CMR 361 with 1000 hPa F.S. Measuring signal U = 6 V p = (6 V - 1 V) × 0.125 × 1000 hPa = 625 hPa...
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Page 13: Installation
Installation WARNING WARNING: fragile components The ceramic sensor may be damaged by impacts. Do not drop the product and prevent shocks and impacts. Vacuum Connection DANGER DANGER: overpressure in the vacuum system >100 kPa Injury caused by released parts and harm caused by escaping process gases can result if clamps are opened while the vacuum system is pressurized. - Page 14 DANGER DANGER: protective ground Products that are not correctly connected to ground can be extremely hazardous in the event of a fault. Electrically connect the gauge to the grounded vacuum chamber. This connection must conform to the requirements of a protective connection ac- cording to EN 61010: •...
- Page 15 Caution Caution: dirt sensitive area Touching the product or parts thereof with bare hands increases the desorption rate. Always wear clean, lint-free gloves and use clean tools when working in this area. Mount the gauge so that no vibrations occur. The gauge may be mounted in any orientation.
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Page 16: Power Connection
Power Connection Make sure the vacuum connection is properly made (→ 13). DANGER The gauge may only be connected to power sup- plies, instruments or control devices that conform to the requirements of a grounded protective extra- low voltage (SELV). The connection to the gauge has to be fused. - Page 17 If no sensor cable is available, make one according to the following diagram. – 13K2 – Electrical connection Pin 1 Identification Pin 2 Signal output (measuring signal) Pin 3 Signal common Pin 4 Supply Pin 5 Supply common Connector, Pin 6 Screening soldering side...
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Page 18: Operation
Operation Put the gauge into operation. A warm-up time of at least 15 minutes should be allowed; for exact pressure measurements a warm-up time of at least 2 hours is required. Displays For factory setting only ZERO State Meaning Measurement mode <RUN>... -
Page 19: Zero> Adjustment
The output signal (measuring signal) is depending on the moun- ting orientation. The signal difference between the vertical and horizontal mounting orientation is: F.S. U / 90° Δ 1000 hPa ≈2 mV 100 hPa ≈10 mV 10 hPa ≈50 mV 1 hPa ≈300 mV 0.1 hPa... - Page 20 Press the <ZERO> button briefly with a pin (max. ø1.1 mm). The zero adjustment runs automatically. The <RUN> LED flashes until the adjustment (duration ≤8 s) is completed. Press the button briefly max. ø1.1 mm After zero adjustment the gauge automatically returns to measurement mode.
- Page 21 The offset should not exceed 2% of the F.S. (+160 mV). At a higher positive offset, the upper limit of the measurement range is exceeded. Recommended procedure for adjusting the offset of a measuring system: → Notice 19. Operate the gauge for at least 15 minutes (until the signal is stable).
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Page 22: Activating The Factory Setting (Factory Reset)
Push the <ZERO> button again: Fine adjustment the zero adjustment value changes within 0...3 s: by one unit (push <ZERO> button in intervals of 1 s) Change of direction the zero adjustment changes its within 3...5 s: direction (the flashing frequency of the <RUN>... -
Page 23: Deinstallation
Deinstallation WARNING WARNING: fragile components The ceramic sensor may be damaged by impacts. Do not drop the product and prevent shocks and impacts. DANGER DANGER: contaminated parts Contaminated parts can be detrimental to health and environment. Before beginning to work, find out whether any parts are contaminated. -
Page 24: Maintenance, Repair
We recommend checking the zero at regular intervals (→ 19). Pfeiffer Vacuum assumes no liability and the warranty becomes null and void if any repair work is carried out by the end-user or third parties. -
Page 25: Returning The Product
Contaminated products (e.g. radioactive, toxic, caustic or microbiological hazard) can be detrimen- tal to health and environment. Products returned to Pfeiffer Vacuum should pre- ferably be free of harmful substances. Adhere to the forwarding regulations of all involved countries and forwarding companies and enclose a duly completed declaration of contamination Form under www.pfeiffer-vacuum.com... -
Page 26: Conversion Table
WARNING Caution: substances detrimental to the environ- ment Products or parts thereof (mechanical and electric components, operating fluids etc.) can be detrimen- tal to the environment. Dispose of such substances in accordance with the relevant local regulations. Separating the components After disassembling the product, separate its components ac- cording to the following criteria: •... -
Page 27: Ec Declaration Of Conformity
EC Declaration of Conformity We, Pfeiffer Vacuum, hereby declare that the equipment men- tioned below complies with the provisions of the Directive relat- ing to electromagnetic compatibility 2004/108/EC and the Directive on the restriction of the use of certain hazardous substances in electrical and electronic equipment 2011/65/EU. - Page 28 A P A S S I O N F O R P E R F E C T I O N Pfeiffer Vacuum stands for innovative and custom Vacuum solutions vacuum solutions worldwide, technological perfection, from a single source competent advice and reliable service.
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