Using A Cascade Microtech Pa200 Prober; Cascade Microtech Pa200 Prober Software; Software Versions - Keithley 4200A-SCS Reference Manual

In this appendix:

Cascade Microtech PA200 prober software

To configure and operate the PA200 prober with the Keithley Instruments 4200A-SCS, you need the
following applications:
•
ProberBench NT: Provides easy access to configuration and help programs.
•
Wafer Map: Use to configure wafer geometry, set origin, set home, select dies to probe, and align
the wafer.
•
Chuck Navigator: Use to move the chuck and select subsites.
•
PB-GPIB: Use to configure the GPIB interface.
•
PB-RS-232: Use to configure the serial interface.
•
Prober Setup (in the service programs folder): Use to initialize the serial communications port.

Software versions

The following list contains the software versions used to verify the configuration of the PA200 prober
with the 4200A-SCS.

Using a Cascade Microtech PA200 Prober

Cascade Microtech PA200 prober software ............................ G-1
Probe station configuration ...................................................... G-2
Set up communications ........................................................... G-2
Set up wafer geometry .......................................................... G-10
Create a site definition and define a probe list ....................... G-13
Load, align, and contact the wafer ......................................... G-14
Clarius probesubsites project example .................................. G-20
Commands and error symbols .............................................. G-27
Product Name: WaferMap for ProberBench NT
Product Version: 3.1 (Feb 12, 1999)
©
Copyright:
Karl Suss 1998 - All Rights Reserved
Kernel: 3.000000 ProberBench Kernel Version 3.10 12-7-98
Control Box: 2.400000 ProberBench Control Box 2.4
Product Name: NI-GPIB for ProberBench NT
Product Version: 3.10 (Feb 12, 1999)
©
Copyright:
Karl Suss 1998 - All Rights Reserved
Kernel: 3.000000 ProberBench Kernel Version 3.10 12-7-98
Control Box: 2.400000 ProberBench Control Box 2.4
Appendix G