Inficon UL1000 Fab Technical Handbook
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Inficon UL1000 Fab Technical Handbook

Helium leak detector
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T E C H N I C A L
iina70e1-m (1408)
Translation of the original handbook
UL1000 Fab and
UL1000
Helium Leak Detector
H A N D B O O K
Catalog-No.
UL 1000:
550 - 000A
550 - 001A
550 - 002A
UL 1000 Fab:
550 - 100A
550 - 101A
from software version
V5.14

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  • Page 1 H A N D B O O K iina70e1-m (1408) Translation of the original handbook Catalog-No. UL 1000: 550 - 000A 550 - 001A 550 - 002A UL 1000 Fab: 550 - 100A 550 - 101A from software version V5.14 UL1000 Fab and UL1000 Helium Leak Detector...

  • Page 3: Table Of Contents

    Connections for the Data Acquisition Systems 2.3.2.1 Accessories 2.3.2.2 Digital Out 2.3.2.3 Digital In 2.3.2.4 Recorder 2.3.2.5 RS232 2.3.2.6 Remote Control Vaccum Connections 2.4.1 Inlet Port 2.4.2 Exhaust 2.4.3 Vent 2.4.4 Purge-connection (UL1000 Fab) / Gas ballast (UL1000) 32 Default parameters Table of Contents...
  • Page 4 Description of the Initial Operation 3.2.1 Start up and Measure 3.2.2 Internal Calibration 3.2.3 Verification Description and Working Principle Introduction Components of the UL1000 and UL1000 Fab 4.2.1 Vacuum System 4.2.2 Control Panel 4.2.2.1 LC Display 4.2.2.2 START Button 4.2.2.3 STOP Button 4.2.2.4...
  • Page 5 6.4.6.2 Leak rate prop. 6.4.6.3 Setpoint 6.4.6.4 Trigger alarm Calibration Settings 6.6.1 Vacuum settings 6.6.1.1 Automatic purge (UL1000 Fab only) 6.6.1.2 Vent delay 6.6.1.3 Vacuum ranges 6.6.1.4 Leak rate internal test leak 6.6.1.5 Machine factor 6.6.1.6 Auto Leak Test adjustments 6.6.2...
  • Page 6 Replacing the Filter Insert 9.10 Monitoring the Oil Level of the D16 B and Topping up the Oil 111 9.11 Oil Change for the D16B 9.12 Scroll Pumps (UL1000 and UL1000 Fab only) Appendix Diagram Index Declaration of Conformity Table of Contents...

  • Page 7: General Information

    This technical handbook contains important informations on the functions, installation, start-up and operation of the UL1000 and UL1000 Fab. General We reserve the right to modify the design and the specified data. The illustrations are not binding.

  • Page 8: Indications

    The range of the preamplifier and the vacuum ranges are selected automatically. The autoranging feature of the UL1000 Fab covers the entire range or leak rates depending on the selected operating mode. Not only the leak rate signal, but also the pressure in the test sample (inlet pressure P1) and the forevacuum pressure (P2) are used for control purposes.
  • Page 9 This function determines the internal ZERO level of the unit which is then deducted from the currently measured leak rate signal. This function is enabled by pressing the Start key provided the UL1000 or UL1000 Fab have run at least 20 s in "Standby" mode or in "Ventilation" mode.

  • Page 10: Support From Inficon Service

    Support from INFICON Service If an instrument is returned to INFICON or an authorised representative of INFICON, please indicate wether the instrument is free of substances damaging to healths or wether it is contaminated. If it is contaminated also indicate the nature of the hazard.

  • Page 11: Service Centers

    1.2.1 Service Centers In case you urgently need assistance please get in touch with the local INFICON Service in your country or the service hotline in Cologne, Germany: Algeria jhj@agramkow.dk Finland jhj@agramkow.dk Agramkow Phone: +45 741 236 36 Agramkow Phone: +45 741 236 36...
  • Page 12 Fax: +49 221 56788-9112 Poland kamola@vakpol.com Taiwan Susan.Chang@inficon.com VAK-POL & GAZ Sp. zo.o Phone: +48 60 23 15 212 INFICON Company Limited Phone: +886.3.5525.828 Pulawy Fax: +48 60 23 15 212 Chupei City, HsinChu Hsien Fax: +886.3.5525.829 Portugal leakdetection.service@inficon.com Tunisia leakdetection.service@inficon.com...

  • Page 13: Introduction

    Great caution is necessary when using hydrogen! No smoking, no naked flames, avoid sparks. Caution The UL1000/UL1000 Fab is only allowed to be used as a leak detector. It may not be used as a pump system (especially not for pumping off aggressive or humid gasses)
  • Page 14 If you plan to detect noxious matters please contact the manufacturer. Rules for decontamination will be developed then. If the leak detector alreay has been in contact with dangerous gases please fill the declaration of contamination, too, and send it to INFICON before you send the parts. General Information...

  • Page 15: Technical Data

    Run-up time (after starting) Hinweis To get down to the minimum detected leak rate range some conditions must be fulfilled: • UL1000 and UL1000 Fab has fully warmed up • Ambient conditions must be stable (temperature, no vibration/accelerations.) • The part under test has been evacuated long enough (background is no longer decreasing) •...

  • Page 16: Other Data

    80% non condensing Max. permissible height above sea level (during operation) 2000 m Unpacking Unpack the UL1000 and UL1000 Fab immediately after delivery, even if it will be installed later on. Examine the shipping container for any external damage. Completely remove the packaging materials.

  • Page 17: Supplied Equipment

    – Spare Parts List UL1000 and UL1000 Fab • hooks to wrap power cord (with screws) (see arrow 6) • Tool to open the UL1000 and UL1000 Fab (see arrow 7) • O-Ring with filter (for use at applications with particles) Fig. 1-2...

  • Page 18: Accessories And Options

    LeakWare (software package) 14090 1.4.2.1 Sniffer line SL200 By use of the sniffer line the UL1000 and UL1000 Fab can easily be converted to a sniffer leak detector. The length of the sniffer line is 4m (i.e. 12 feet). 1.4.2.2 Toolbox The toolbox is a detachable compartment with a lockable lid.

  • Page 19: Rc1000 Remote Control

    The RC1000 is a wireless remote control that allows to operate the UL1000 and UL1000 Fab from distance up to 100 m. It provides the functions START, STOP/ VENT, ZERO and speaker volume, and displays leak rate in bargaraph or in chart mode.

  • Page 20: Test Chamber Tc1000

    1.4.2.6 Test chamber TC1000 This test chamber turns the UL1000 / UL1000 Fab into a workstation to test hermetically sealed components. Testing according to MIL-STD 883 can be done easily, fast and accurate. The test starts automatically when the chamber lid is closed, test parameters like cycle time and rejectant level can be setted in the menu Auto Leak Test (see 6.6.1.6).

  • Page 21: Installation

    Caution When transporting over longer distances the original packaging must be used. The castors must not be fixed when the UL1000 and UL1000 Fab is shipped in a crate. UL1000 Fab with Triscroll TS 620 For transportation the chassis plate where the pump is mounted on has to be secured by a transportation fixing.
  • Page 22 Fig. 2-1 For transportation fixing the screws are tightened to the chassis plate. For operation of the UL1000 Fab the screws should be loosened. To loosen the screws first loosen the counter nut that is accessible from underneath: Fig. 2-2...

  • Page 23: Working Location

    Fig. 2-3 For transportation tighten the screws again and fix them by the counter nuts. Working Location Move the UL1000 and UL1000 Fab to the desired position and arrest the castors. Danger S TOP Caution: Exhaust gases and fumes: Exhaust gases and fumes from oil-sealed pumps may be harmful to health.
  • Page 24 It is recommended that you check all major helium sources in the vicinity of the UL1000 and UL1000 Fab within a radius of about 10 m for the presence of any big leaks. You may use the sniffer probe for this.

  • Page 25: Electrical Connections

    (Circuit breaker 16A max. according to IEC/EN 60898 with tripping characteristic B). The mains voltage rating for the UL1000 and UL1000 Fab can be read off from the name plate beneath the mains socket Fig.
  • Page 26 Fig. 2-4 secure fixture power cord Notice: If the machine is not operating the cable can be stored at the cable holders. Fig. 2-5 storing power cord Installation...

  • Page 27: Connections For The Data Acquisition Systems

    7. Mains Socket 8. Mains Switch 9. Hole to mount cable hooks. 10. Speaker 11. Vent 12. Purge (UL1000 Fab) / Gas ballast (UL1000) Fig. 2-6 Tipp The sockets: Accessories, Digital Out, Digital In and Recorder have pin 1 on top. The pin numbers are counted downwards. The socket 2 and 3 are coded mechanically to avoid a confusion with the counter plug.

  • Page 28: Accessories

    2.3.2.1 Accessories The following accessories may be connected to the sniffer line SL200 (Please refer to Chapter Fig. 2-6/1) or the test chamber TC1000: Contact pins 1 and 3 are fused with a 0.8 A slow-blow fuse. The amount of power which can be drawn is limited to 10 W.

  • Page 29: Digital In

    Closed in case recorder output is invalid. Only used when record output is set on „leak rate“. 2.3.2.3 Digital In These inputs can be used to control the UL1000 and UL1000 Fab with a programmable logic control (PLC). Assignment +24V, bridged with pin 1 of socket „Digital Out“...

  • Page 30: Recorder

    UL1000 and UL1000 Fab and the chart recorder from the same mains phase. If this is not possible, you must make sure that the frame ground of both instruments is kept at the same potential.

  • Page 31: Rs232

    Fig. 2-6/6 is a serial interface to control the UL1000 and UL1000 Fab by the RC1000. The RC1000 Remote Control can be connected via the wireless transmitter or via an extension cable with a RJ45 plug. Refer to the RC1000 Technical Handbook for more information.

  • Page 32: Vaccum Connections

    Vaccum Connections 2.4.1 Inlet Port The inlet port is located on the top of the UL1000 and UL1000 Fab. The size of the flange is DN 25 KF. Warning Risk of injury due to sucking connection flange. If the Vacuum-Mode of the UL1000 is activated, the connection flange may suck bodily parts around the connection flange.

  • Page 33: Default Parameters

    Default parameters The following parameters are set like shown when in the menu of the UL1000 and UL1000 Fab under Settings  Parameters load/save, „load default values“ is chosen. Auto-scaling: Scaling logarithmic Display range: 4 decades Time axis: 32 seconds...

  • Page 34: First Operation Check

    First Operation Check The steps for an initial operation are described in this chapter. It is explained how to switch on the UL1000 and UL1000 Fab, how to measure and how to carry out an internal calibration. Notice: If anything unexpected happens during the initial operation or the leak detector acts in a strange way the UL1000 and UL1000 Fab can be switched off by the mains switch at any time.
  • Page 35 The start up procedure takes about 3 minutes and the end is indicated by a beep. The UL1000 and UL1000 Fab is in Stand-by mode now. Fig. 3-1: Top view of the Standards Pos.
  • Page 36 Fig. 3-2: Control Panel Pos. Description Pos. Description LC Display Soft Key no. 5 Soft Key no. 1 Soft Key no. 6 Soft Key no. 2 Soft Key no. 7 Soft Key no. 3 Soft Key no. 8 Soft Key no. 4 MENU Button START Button STOP Button...

  • Page 37: Internal Calibration

    3.2.2 Internal Calibration Proceed the internal calibration (Please refer to Chapter 7.2.1 Internal Calibration). For better quantitative measurements please allow the unit to warm up (15 … 20 minutes). • Press Calibration (Soft Key no. 5 Fig. 3-2/8) to get into the calibration menu. •...

  • Page 38: Description And Working Principle

    Fab. In addition the vacuum can be generated by pumps with are set up in parallel to the leak detector. Another operating mode of the UL1000 and UL1000 Fab is the Sniff mode which can only be used when a sniffer line (See Chapter 1.4.2 Accessories and...

  • Page 39: Vacuum System

    4.2.1 Vacuum System The vacuum diagram below shows the major components inside the UL1000 and UL1000 Fab: Fig. 4-1: Vacuum Diagramm UL1000 and UL1000 Fab Pos. Description MS: Mass Spectrometer, Helium sensor (180° magnetic field mass spectrometer) Turbomolecular Pump (TMP, provides high vacumm conditions in the MS) V1a …...

  • Page 40: Control Panel

    Besides maintaining the pressure in the mass spectrometer the pump system is used to evacuate the test parts. It is made sure that the pressure in the mass spectrometer is low enough under all circumstances. The valves V1a, V1b, V2, V4a, V4b control the gas flows when measuring.

  • Page 41: Lc Display

    START Button Pushing the START Button Fig. 4-2/6 enables the UL1000 and UL1000 Fab to start the measure procedure. If the START button is pushed again in measurement mode, the maximum leak rate indicator („hold“ function) is acitvated. This indicator shows the maximum leak rate since „START“.
  • Page 42 Fig. 4-3 decreasing background When the measurement signal declines below the saved underground value the underground value will automatically be equated with the measurement signal. As soon as the measurement signal is increasing again the saved decreasing value remains constant. Increasings of the signal are displayed clearly as a leak. Fig.

  • Page 43: Menu Button

    4.2.2.5 MENU Button When pressing the MENU button (Fig. 4-2/12) the selecting menu is shown at the display. This function is not depending on the operating mode when calibrating. If the menu is opened during the current session the operator will lead to the last screen before the menu was left.
  • Page 44 Example To change the trigger level 1.0x10 mbar l/s to 3x 10 mbar l/s please press 2/3 (Soft Key no. 3) Fig. 4-5. Fig. 4-5: Numerical entry of the Trigger Level 1 In the submenu press 3 (Soft Key no. 4) Fig.

  • Page 45: Working Modes

    START Button Valves V1a and V1b open and the sample is pumped down by the roughing pump (UL1000) or scroll pump (UL1000 Fab). At the same time valve V2 is closed to avoid an unacceptable pressure increase in the turbo pump and the mass spectrometer.
  • Page 46 Since the scroll pump continues to evacuate the test sample the inlet pressure p will continue to drop. Below 2 mbar the UL1000 and UL1000 Fab will switch to FINE mode, i.e. V4a will open and V1b will close. The gas stream enters the turbo pump at an intermediate level.

  • Page 47: Sniffer Mode

    Fast test results within seconds are achieved by using the internal test leak of the UL1000 or UL1000 Fab for a dynamic calibration, matched to the required test cycle. Leak rates in the 10-9 mbar l/s range can be detected within 5 seconds.

  • Page 48: Operation Of The Ul1000 And Ul1000 Fab

    The displayed leak rate corresponds to the helium background concentration in the part under test. Since the UL1000 and UL1000 Fab continues to pump down the part this background leak rate will further reduce. As soon as the leak rate is low enough in respect to your requirements you may start spraying Helium to search for possible leaks.

  • Page 49: Display In Stand-By Mode

    (see Chapter 5.3.1) 5.3.1 Purging Every time when the UL1000 Fab changes into stand by mode it can start purging automatically after 20 seconds. During this purging the scroll pump is flushed through purge connection (See Fig.

  • Page 50: Speaker Volume

    (Please refer to Chapter Mode). ULTRA • Vacuum area Depending on the inlet pressure the UL1000 and UL1000 Fab may be in GROSS, FINE or ULTRA, which is indicated here (Chapter 4.3 Working Modes) ZERO •...

  • Page 51: Numerical Display Mode

    (Please refer to Chapter 6.2.3 Time axis). The intensity axis (y-axis) is defined the same way as the bargraph (Please refer to Chapter 6.2.1 Scale linear/ logarithmic ff). Fig. 5-2: Display, trend mode Operation of the UL1000 and UL1000 Fab...

  • Page 52: Description Of The Menu

    Mode Please refer to Chapter 6.3. Settings of units, trigger levels and alarms. Trigger & Alarms Please refer to Chapter 6.4. Calibration of the UL1000 and UL1000 Fab. Calibration Please refer to Chapter 6.5. Settings of internal machine parameters. Settings Please refer to Chapter 6.6.
  • Page 53 Alarm delay Audio alarm type manual internal automatic Calibration (See 6.5 ) Edit leakrate external Start Automatic purge (UL1000 Fab only) Vent delay Vacuum settings Vacuum ranges Leak rate internal test leak Machine factor Background Suppression Zero & Background Zero Mass...

  • Page 54: View

    View • Main Menu > View In this menu Fig. 6-3 all features that influence the way data are displayed are put together. Fig. 6-3: The View Menu Key No. Name Description Back Return to the main menu. Settings for bargraph and trend mode. Scale linear/logarithmic Please refer to Chapter 6.2.1.

  • Page 55: Scale Linear/Logarithmic

    6.2.1 Scale linear/logarithmic • Main Menu > View > Scale linear/logarithmic These settings apply to the bargraph (= bar underneath the digital figures in the measurement mode) and Y-axis in the trend mode. The scale of the bargraph can either be linear or logarithmic. With the arrows (up and down) it can be determined how many decades the bargraph covers.

  • Page 56: Time Axis

    Switch off the UL1000 and UL1000 Fab and turn it on again. During the run- up phase press the key no. 3 or 7 so long until the display can be read properly again.

  • Page 57: Background In Stand-By

    6.2.5 Background in Stand-by • Main Menu > View > Background in Stand-by The internal background leak rate can be displayed in Stand-by mode (ON) or not (OFF).The default setting is OFF. Softkey 3: Off The background leak rate will not be shown. Softkey 5: ? Help Softkey 7: ON...

  • Page 58: Lower Display Limit

    6.2.7 Lower display limit • Main Menu > View > Lower display limit This parameter defines the lower leak rate limit in the measurement ranges.This is valid for vacuum modes only. Softkey 3, 7: Changing of the lower detection limit between 1×10 and 1×10 Softkey 5: Help...

  • Page 59: Auto Leak Test

    6.3.1 Auto Leak Test • Menu > Mode > Auto leak test After selecting the Auto leak test mode this message pops up: Fig. 6-5 By pressing OK button the settings menu is called (see 6.6.1.6 ) Notice: If the UL1000 requests a calibration due to the mode change a calibration message will come up.
  • Page 60 Shut down When the test chamber should remain under vacuum after switching off the UL1000 or UL1000 Fab, push the button (cup of coffee), follow the instruction on the display and switch off the leak detector. This function can also be used when a test of parts should be interrupted due to a brake.

  • Page 61: Trigger & Alarms

    Trigger 1 and Trigger 2 are programmable switching thresholds. When these thresholds will be exceeded the UL1000 and UL1000 Fab reacts as follows: Display In the status line of the display the signs for Trigger 1 and Trigger 2 are displayed inverted if the leak rate exceeds (becomes higher than) the programmed value.

  • Page 62: Volume

    6.4.2 Trigger Level 2 • Main Menu > Trigger & Alarms > Trigger Level 2 The value of the second trigger level can be set. Please refer to Chapter 4.2.2.7 Numerical Entries for the description of the entry. If Trigger 2 is exceeded the corresponding relay will switch. This is also indicated at the display (see above).

  • Page 63: Units

    6.4.4 Units • Main Menu > Trigger & Alarms > Units The prefered leak rate unit can be selected. There is the choice of 4 (mbar, Pa, Torr, atm)pressure units and 5 leak rate units (mbar l/s, Pa m /s-1, Torr l/s, atm cc/s). Notice: In Sniff mode the following measuring units are electable (Refer to chapter 6.3): ppm, g/a eq (helium leak rate is equivalent with leak rate R134a), oz/...

  • Page 64: Audio Alarm Type

    6.4.6 Audio alarm type • Main Menu > Trigger & Alarms > Audio alarm type The trigger of the audio alarm can be switched on or off. Softkey 2: Pinpoint 6.4.6.1 Use this function to localize a leak with a well-known size. Please refer to Chapter Softkey 3: Leak rate prop.

  • Page 65: Setpoint

    6.4.6.3 Setpoint The tone is off as long as the leak rate is below the Trigger level 1. Above Trigger 1 the tone varies proportional to the leak rate Fig. 6-11. 3000 Hz - 375 Hz - no tone 1000 • TR.1 Tr.

  • Page 66: Settings

    (local, RS232, PLC). See Chapter 6.6.4 Change rarely necessary settings (Date, Miscellaneous language). See Chapter 6.6.5 Parameter save / load See Chapter 6.6.6 Choose functions of protection of the UL1000 and Monitoring functions UL1000 Fab. See Chapter 6.6.7 Description of the Menu...

  • Page 67: Vacuum Settings

    UL1000 Fab will just change to Stand-by mode. When the STOP button is pressed for a period of time which is longer than the delay time specified here, the UL1000 and UL1000 Fab will vent the inlet port. Description of the Menu...

  • Page 68: Vacuum Ranges

    Softkey No. 3: FINE only In this mode the UL1000 and UL1000 Fab remains after falling below 2 mbar at the inlet flange in FINE mode. Valve V1a will be closed. When the pressure at the inlet flange is increasing > 1 mbar the UL1000 and UL1000 Fab switches immediately into evacuation mode.

  • Page 69: Leak Rate Internal Test Leak

    The machine factor can be estimated by taking into consideration the Helium absorbing capability of the UL1000 and UL1000 Fab and the external pump. Exactly, this is the result of the measured leak rate of an external test leak on the test sample once with and then without the external pump.
  • Page 70 PASS even if the maximum value of the measurement period is not reached. Fig. 6-14 Measurement period Examples for time settings (using the Inficon Test Chamber with a volume of 430 cm³): Range of rejectant level Measurement Period 10E-5...
  • Page 71 Trigger level 1 The rejectant level for a part to be tested can be set in the range from 10 mbar l/s. Fig. 6-15 Series error messages The number of failed parts in series can be set from 1 to 9. In disable mode this function is switched off.
  • Page 72 Part under test The number of the first part to be tested can be entered. The number counts automatically up at the next test cycle. In disable mode this function is switched off. Fig. 6-17 Reference measurement Fig. 6-18 This mode can be used to clean up the chamber after a helium contamination or after a series of failed parts.

  • Page 73: Zero & Background

    > Background Suppression By this mode the internal helium background of the UL1000 and UL1000 Fab will be subtracted at every measurement after pressing START. This function helps to save clean up of the UL1000 and UL1000 Fab after a helium contamination.

  • Page 74: Mass

    Softkey 2: Zero at ULTRA With “Zero at ULTRA” the ZERO functions executes automatically as soon as the measuring range ULTRA is reched for the first time after START. In this mode the ZERO function also can be executed manually via the ZERO button. Softkey 3: Disable: ZERO function Softkey 5:...

  • Page 75: Interfaces

    Interfaces > Control Location Softkey 2: The UL1000 and UL1000 Fab is controlled via the Digital In connector (See Chapter 2.3.2.3). The START, STOP and ZERO buttons at the control panel are locked. Softkey 3: RS232 The UL1000 and UL1000 Fab is controlled via RS232 interface by an external computer.

  • Page 76: Rs232 Protocol

    Please execute the function „STORE DATE“ in the operating mode „Single Part Measurement“ for starting the record of the measured values. Softkey 7: ASCII Gives the chance to use the UL1000 and UL1000 Fab via a RS232 terminal. Description of the Menu...

  • Page 77: Recorder Output

    6.6.4.3 Recorder output • Main Menu > Settings > Interfaces > Recorder output The signals to be recorded can be selected in this submenu. Softkey 1: Cancel Return to the previous menu without any changes of the present settings. Softkey 2: Arrow up Adress recorder output 1 or 2 Softkey 3: Arrow down Adress recorder output 1 or 2...

  • Page 78: Scaling Recorder Output

    LR lin The leak rate output voltage is scaled linear. The fundamental voltage is 0-10 V in scalable steps from 0.5 to 10 volts per decade. For information about scaling see chapter 6.6.4.4 LR log The leakrate is recorded on a logarithmic scale. The voltage output ranges from 1 …...

  • Page 79: Miscellaneous

    6.6.5 Miscellaneous • Main Menu > Settings > Miscellaneous The actual date and time, the prefered language and the mains frequency can be set in this submenu. Softkey 2: Time&Date 6.6.5.1 Please refer to Chapter Softkey 3: Language 6.6.5.2 Please refer to Chapter Softkey 4: Leak rate filter 6.6.5.3...

  • Page 80: Leak Rate Filter

    50 Hz for 230 V and 60 Hz for 115 V. Softkey 3: 50 Hz The UL1000 and UL1000 Fab will be run at a mains frequency of 50 Hz. Softkey 6: 60 Hz The UL1000 and UL1000 Fab will be run at a mains frequency of 60 Hz.

  • Page 81: Service Message Exhaust Filter

    Service message exhaust filter The exhaust filter must be maintained at regular intervals to ensure the correct function of the UL1000 and UL1000 Fab. If the service message is activated, the UL1000 and UL1000 Fab reminds you of the required maintenance.

  • Page 82: Save Parameter Set

    If the calibration request is switched on, a corresponding message will appear when 30 minutes have elapsed after power on or if the temperature of the UL1000 and UL1000 Fab has changed by more than 5 °C (9 °F) since the last calibration. Particle protection •...
  • Page 83 Monitoring functions > Contamination protection If this mode is switched on the UL1000 and UL1000 Fab closes all inlet valves as soon as the measured leak rate exceeds the programmed leak rate. Thus no more Helium gets into the mass spectrometer. Helium that has gotten into the tool under test can be pumped away by the tool pump.
  • Page 84 Softkey 3 and 6: Setting of the maximal pressure: upper limit 2 mbar Softkey 4 and 7: Setting of the minimal pressure: lower limit 0.02 mba Softkey 5: Help Maximum evacuation time • Main Menu > Settings > Monitoring functions >...

  • Page 85: Information

    Information on measured internal data is provided on 4 screens. Softkey 4: Vacuum diagram The vacuum diagram of the UL1000 and UL1000 Fab is shown. Here you can see which valves are opend or closed momentarily and more. Softkey 5: View error list The list of occured errors and warnings will be displayed.

  • Page 86: Access Control

    Access Control • Main Menu > Access Control With this menu you can deny or allow access to specific functions of the UL1000 and UL1000 Fab. Fig. 6-23: The Access Control Menu Softkey 2: Access to CAL function 6.8.1 Please refer to Chapter Softkey 3 Access to Trigger&Alarme menu...

  • Page 87: Access To Trigger&Alarme Menu

    > Change Device PIN The access to the UL1000 and UL1000 Fab can be restricted by a Device-PIN. If the Device-PIN is not 0000 the UL1000 and UL1000 Fab will ask for this PIN directly after power on. Without device-PIN the UL1000 and UL1000 Fab foes not even switch on the pumps.

  • Page 88: Calibration

    Although the UL1000 and UL1000 Fab is a very stable instrument a calibration is recommended from time to time to make sure that ambient temperature changes or dirt or other impacts don’t adulterate the measurements.

  • Page 89: Internal Calibration

    7.2.1.2 Manual Internal Calibration When Manual Internal Calibration is selected it is assumed that the UL1000 and UL1000 Fab is connected to a component under test (if not please go to Automatic Internal Calibration). After starting the Manual Internal Calibration...
  • Page 90 • Make sure that the test leak is connected and opened. • Check the leak rate printed on the test leak and compare it with the leak rate at the display. If the leak rates are not identical press Edit leak rate (Soft Key no. 4) and correct the value.
  • Page 91 • No action required. Fig. 7-4: External Calibration, Step 4 • No action required. Fig. 7-5: External Calibration, Step 5 • Close the external leak standard and confirm with OK (Soft Key no. 8). Fig. 7-6: External Calibration, Step 6 Calibration...
  • Page 92 If so please press OK (Soft Key no. 8). Fig. 7-7: External Calibration, Step 7 • The UL1000 and UL1000 Fab displays the old and the calculated new calibration factor. Fig. 7-8: External Calibration, Step 8...

  • Page 93: Factor Of Calibration - Range Of Values

    Factor of Calibration - Range of Values To avoid a faulty calibration the factor of calibration is tested for plausibility at the end of the calibration routine: When the new factor of calibration is not considerably higher or lower (< factor 2) than the previous factor of calibration the new factor will be accepted automatically.

  • Page 94: Error And Warning Messages

    (e.g. a request for calibration or a service timer has expired). The UL1000 and UL1000 Fab will indicate a message on the LC display and will remain in the Stand-by or the measurement mode.

  • Page 95: List Of Errors & Warnings

    List of Errors & Warnings The following pages contain a list of all errors and warnings displayed at the control panel. Warning messages are indicated by numbers with a leading W. Error messages are indicated by numbers with a leading E Displayed Message Description and possible solutions E04 Temperature...
  • Page 96 W46 Emission for cathode 2 can Signal MSIBE on MSV board is not active. Emission for cathode 2 can not can not be switched. be switched on. UL1000 and UL1000 Fab switches to cathode 1. Order a new ion source. Error And Warning Messages...
  • Page 97 The maximum limit can be set by the menu. Default value is 1.0 mbar. 6.6.1.3. E73 Emission off (p2 too high) PV >> 0.2 or 3 mbar due to an inrush, e. g. The UL1000 and UL1000 Fab will again try to resume the measurement mode. W76 Maximum of evacuation time •...
  • Page 98 Displayed Message Description and possible solutions W77 Peak not in Range The signal maximum has shifted to mass range alignment limits. • Signal of leak rate was instable during mass adjustment. Calibrate again. • Check the basic setting for the anode voltage through the service menu.

  • Page 99: Maintenance Work

    As soon as the different maintenance intervals are reached, a warning is displayed on the screen of the leak detector of the UL1000 and UL1000 Fab/UL1000 each time it is switched on. This message will remain on the display until the maintenance interval has been acknowledged.

  • Page 100: Maintenance Or Service At Inficon

    The pump has been specified for use in the leak detector UL1000 with Arctic Oil and must for this reason be filled with Arctic Oil (Part No. 20099091) only. When using any other kind of oil, INFICON GmbH Cologne must reject all warranty claims relating to the backing pump.

  • Page 101: Maintenance Plan

    09.fm (1408) technical handbook Maintenance Plan Subassembly Maintenance work Operating hours/years Service Spare part level UL1000 / UL1000 Fab 1500 4000 8000 16000 24000 number Vacuum system Backing pump D16 B Check oil level, if required exchange I & II...

  • Page 102: Maintenance Groups

    The 4000 hours maintenance work should be done by an INFICON service technician or a person authorised by INFICON, were by this work should be done once a year. The operating agent reservoir of the turbomolecular pump and the oil of the backing pump in the UL1000 must be exchanged at least once a year SplitFlow 80.

  • Page 103: 8000 Hours Maintenance

    For the scroll module of the Agilent scroll pump, the „tip seal“ must be replaced by an INFICON service technician as soon as 8000 operating hours are attained. If the „tip seal“ is not replaced, it will become necessary to replace the scroll module after 12000 operating hours.

  • Page 104: Notes Refering The Maintenance Of The Splitflow 80

    In this case the turbopump SplitFlow 80 will be replaced by a refurbished pump. Description of the Maintenance Work Modifications to the UL1000 and UL1000 Fab/UL1000 which exceed the scope of normal maintenance work must only be performed by trained personnel.

  • Page 105: Opening The Instrument For Maintenance Purposes

    Side wall separator (Plastic wedge) from the accessories. Danger S TOP Before removing one of the covers of the UL1000 and UL1000 Fab/UL1000 the leak detector must be disconnected from the mains power! • Vacuum components which are fitted to the inlet of the UL1000 and UL1000 Fab/ UL1000 must be disconnected from the inlet system.

  • Page 106: Checking And Replacing The Filter Insert

    Replacement filter insert P/N 200 000 685 Danger S TOP Before removing one of the covers of the UL1000 and UL1000 Fab/UL1000 the leak detector must be disconnected from the mains power! • To open the leak detector, refer to Chapter 1.6.1...
  • Page 107 Fig. 9-2 Replacement of the air filter in the chassis wall Item Description Item Description Air filter cut out Air filter guide Air filter insert Ejection bore (rear) • When inserting the new air filter insert, note the direction of the air flow. It is indicated in the figure above Fig.

  • Page 108: Replacing The Exhaust Silencer

    Replacing the Exhaust Silencer Required material Replacement silencer P/N 200 99 183 • Switch the UL1000 Fab leak detector off. • Unscrew the silencer from the connection adapter and replace it by the new silencer and tighten it. For this refer to Fig.

  • Page 109: Checking/Emptying The Exhaust Filter

    1.6.1. Danger S TOP Before removing one of the covers of the UL1000 and UL1000 Fab/UL1000 the leak detector must be disconnected from the mains power! • Loosen the hexagon screw at the bottom of the reservoir vessel and drain the oil into a suitable vessel.
  • Page 110 Fig. 9-4 Installation location of the exhaust filter Item Description Item Description Clamping ring KF 16 Maximum oil level mark Filter insert Oil level viewing glass Oil reservoir vessel Maximum oil level mark To exchange the filter insert proceed as follows: •...

  • Page 111: Monitoring The Oil Level Of The D16 B And Topping Up The Oil

    To open the instrument, observe the instructions given in Chapter 1.6.1. Danger S TOP Before removing one of the covers of the UL1000 and UL1000 Fab/UL1000 the leak detector must be disconnected from the mains power! Maintenance Work...

  • Page 112: Oil Change For The D16B

    Required tools Side wall separator Through the oil level viewing glass of the backing pump D16B the oil level and the colour of the oil can be checked visually. The oil level of the vacuum pump must be within the minimum and maximum marks. For this refer to Fig.
  • Page 113 Further oil changes should be done before and after storing the pump for a longer period of time. Caution Exchange the oil always while the vacuum pump is still warm and with the vacuum pump switched off! Required tools Side wall separator Hexagon socket screw key, size 5 mm;...

  • Page 114: Scroll Pumps (Ul1000 And Ul1000 Fab Only)

    Scroll Pumps (UL1000 and UL1000 Fab only) The maintenance intervals of the scroll pump (Agilent TS620) is given in the maintenance plan detailed in 9.4. We recommend to have this maintenance work done by the INFICON Service or a service partner authorised by INFICON. Maintenance Work...

  • Page 115: Appendix

    Appendix Diagram Fig. 10-1 Appendix...

  • Page 116: Index

    Access Control Hand Set Accessories – Helium leak rate alarm Humidity Ambient temperature Audio alarm I CAL Automatic Internal Calibration INFICON Service information background Inlet area background suppression built-in leak standard Inlet Port Inlet port Inlet pressure Calibration Installation calibration...
  • Page 117 Power Trigger • consumption Trigger alarm pressure turbo pump Protection turbomolecular pump • Type of Type of protection Pumping speed Purge Purging ULTRA Purpose ULTRA only QT100 Vacuum Diagramm Vacuum mode Valves Recorder Vent Relay Output volume RS232 run-up mode Run-up time Weight Safety Symbols...

  • Page 118: C Declaration Of Conformity

    Declaration of Conformity Declaration of Conformity...
  • Page 119 INFICON GmbH, Bonner Strasse 498, D-50968 Cologne, Germany UNITED STATES TAIWAN JAPAN KOREA SINGAPORE GERMANY FRANCE UNITED KINGDOM HONG KONG Vi s i t o ur w eb s i t e f o r c on ta c t i nf o rma t i on an d o t he r s al es of f i c e s w or l dwi de . w w w. i n fi c o n . com...

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