Varian Turbo-V 2000 HT Instruction Manual
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Varian Turbo-V 2000 HT Instruction Manual

969-9084 series 969-9059 series
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Turbo-V 2000HT
969-9084 series
969-9059 series
87-900-969-01
MAY 2003
pumps
MANUALE DI ISTRUZIONI
BEDIENUNGSHANDBUCH
NOTICE DE MODE D'EMPLOI
MANUAL DE INSTRUCCIONES
MANUAL DE INSTRUÇÕES
BEDRIJFSHANDLEIDING
INSTRUKSTIONSBOG
BRUKSANVISNING
INSTRUKSJON MANUAL
OHJEKÄSIKIRJA
ODHGIES CRHSEWS
INSTRUCTION MANUAL

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  • Page 1 MANUALE DI ISTRUZIONI Turbo-V 2000HT BEDIENUNGSHANDBUCH pumps NOTICE DE MODE D’EMPLOI MANUAL DE INSTRUCCIONES MANUAL DE INSTRUÇÕES 969-9084 series BEDRIJFSHANDLEIDING 969-9059 series INSTRUKSTIONSBOG BRUKSANVISNING INSTRUKSJON MANUAL OHJEKÄSIKIRJA ODHGIES CRHSEWS INSTRUCTION MANUAL 87-900-969-01 MAY 2003...
  • Page 2 Turbo-V 2000HT...

  • Page 5: Table Of Contents

    ISTRUZIONI PER L’USO ....................1 GEBRAUCHSANLEITUNG ....................3 MODE D’EMPLOI ........................ 5 INSTRUCCIONES DE USO ....................7 INSTRUÇÕES PARA O USO....................9 GEBRUIKSAANWIJZINGEN..................... 11 BRUGSANVISNING ......................13 BRUKSANVISNING ......................15 BRUKERVEILEDNING ...................... 17 KÄYTTÖOHJEET ......................19 PDHGIES CRHSEWS ......................21 INSTRUCTIONS FOR USE....................

  • Page 6: Istruzioni Per L'uso

    Onde evitare problemi di degassamento, non toccare con le mani ogni altra informazione addizionale fornita dalla Varian prima dell'uti- nude i componenti destinati ad essere esposti al vuoto. Utilizzare lizzo dell'apparecchiatura. La Varian si ritiene sollevata da eventuali sempre i guanti o altra protezione adeguata.
  • Page 7 In caso di guasto è possibile usufruire del servizio di riparazio- contattare la Varian. ne Varian o del "Varian advanced exchange service", che per- mette di ottenere una pompa rigenerata in sostituzione di Fissare la turbopompa in posizione stabile collegando la flangia quella guasta.

  • Page 8: Gebrauchsanleitung

    Schäden erleiden. Sie sollte jedoch bis Text hervorgehoben werden. zur Installation auf der Anlage geschlossen bleiben, um Staubverschmutzungen zu vermeiden. LAGERUNG Um ein Höchstmaß an Effizienz und Zuverlässigkeit der Varian INSTALLATION Turbomolekularpumpen zu gewährleisten, sind die folgenden Anweisungen zu beachten: ! ! ! ! GEFAHR! •...
  • Page 9 Installieren Sie die Pumpe in einer stabilen Position, indem Sie den Flansch am Eingang der Turbopumpe an einen festen Ge- Bei einem Defekt kann der Varian Service oder der "Varian ad- vanced exchange service" in Anspruch genommen werden. genflansch anschließen, der ein Drehmoment von 30000 Nm um seine eigene Achse aushält.

  • Page 10: Mode D'emploi

    ! ! ! ! indication supplémentaire fournie par Varian, avant d'utiliser ATTENTION ! l'appareil. Varian décline par conséquent toute responsabilité En vue d'éviter tous problèmes de dégazage, ne pas en cas d'inobservation totale ou partielle des instructions toucher, les mains nues, les éléments devant être exposés...
  • Page 11 8.8 ( = 800 N/mm ). Il est conseillé venir au bureau local Varian la fiche "Sécurité et Santé" de serrer à un couple de 22 Nm. annexée à la présente notice d'instructions. Une copie de cette La turbopompe à...

  • Page 12: Instrucciones De Uso

    Varian antes los componentes destinados a someterse al vacío. Utilizar siempre de utilizar el equipo. Varian se considera libre de cualquier los guantes u otra protección apropiada. responsabilidad debida al incumplimiento total o parcial de las...
  • Page 13 Las bombas turbomoleculares de la serie Turbo-V2000HT se deberán utilizar sólo con uno de los controladores apropiados MANTENIMIENTO Varian (serie 969-9462, 969-9562) y se deberán acoplar a una bomba primaria (véase esquema en "Technical Information". Las bombas de la serie Turbo-V2000HT no necesitan ningún La turbobomba se puede instalar en cualquier posición.

  • Page 14: Instruções Para O Uso

    Para evitar problemas de perdas de gás, não tocar com as mãos informação adicional fornecida pela Varian antes de usar a os componentes destinados à exposição do vácuo. Utilizar sempre aparelhagem.
  • Page 15 Em caso de defeito é possível usufruir do serviço de reparação Fixar a turbobomba em posição estável ligando a flange de Varian ou do "Varian advanced exchange service", que permite entrada da turbobomba a uma contraflange fixa capaz de obter uma bomba regenerada que substitua a bomba com resistir a um torque de 30000 Nm ao redor do próprio eixo.

  • Page 16: Gebruiksaanwijzingen

    Varian verstrekte informatie door te lezen ! ! ! ! alvorens het apparaat in gebruik te nemen. Varian acht zich ATTENTIE niet aansprakelijk voor de gevolgen van het niet of gedeeltelijk...
  • Page 17 “schoon” vacuüm is in de handleiding van de regeleenheid vermeld. Lees aandachtig vereist. Neem contact op met Varian Vacuum Technologies of uw deze handleiding vóór ingebruikname door. Om een betere leverancier voor andere toepassingen.

  • Page 18: Brugsanvisning

    For at undgå afgasningsproblemer skal man ikke røre med de Varian har leveret, inden udstyret tages i brug. Varian er ikke bare hænder de dele, der vil bliver udsat for vakuum. Brug altid ansvarlig, hvis vejledningen ikke er nøje fulgt, eller hvis den kun...
  • Page 19 “Technical Information” for yderligere detaljer. Pumpen må ikke anvendes i eksplosionsfarlige miljøer. Turbomolekulærpumperne i Turbo-V2000HT serien må kun anvendes med en af de særlige Varian kontrolapparater (serie VEDLIGEHOLDELSE 969-9462, 969-9562) og skal forbindes med en primær pumpe Pumperne af Turbo-V2000HT typen behøver ikke nogen (se skemaet i "Technical Information").

  • Page 20: Bruksanvisning

    Användaren bör läsa denna bruksanvisning, samt övrig dokumentation från Varian före användning av utrustningen. Varian tar inget ansvar för skador helt eller delvis till följd av åsidosättande av instruktionerna, olämplig användning av person utan tillräcklig kunskap, obehörigt bruk av utrustningen eller hantering som strider mot gällande lokala föreskrifter.
  • Page 21 Varian (serie 969-9462, 969- 9562), och anslutas till en förpump (se schemat " Technical Använd ej pumpen i närheten av explosiva gaser.

  • Page 22: Brukerveiledning

    Brukeren bør lese denne brukerveiledningen og all annen pumpen. Likevel anbefaler vi å holde den lukket til den er informasjon fra Varian før utstyret tas i bruk. Varian kan ikke montert i systemet, slik at den ikke forurenses eller utsettes for holdes ansvarlig for hendelser som skjer på...
  • Page 23 (argon eller kvelstoff) koples for å beskytte lagrene (se skjermer. Se “Teknisk informasjon” for detaljer. “Teknisk informasjon”). Turbo-V2000HT serien turbo-molekulære pumper må kun brukes med en av de spesielle Varian kontrollere (serie 969- ! ! ! ! 9462, 969-9562), og må koples til hovedpumpen (se skjema i ADVARSEL! "Teknisk informasjon ").

  • Page 24: Käyttöohjeet

    Jotta kaasun poistumisongelmilta vältyttäisiin, ei tyhjiöön mukana seuraava käyttöohje sekä kaikki muu Varianin tarkoitettuihin osiin tule koskea paljain käsin. Hanskojen tai toimittama lisätieto. Varian ei ota vastuuta seurauksista, jotka muun sopivan suojan käyttö on tarpeellinen. johtuvat laitteen käyttöohjeiden täydestä tai osittaisesta laiminlyönnistä, ammattitaidottoman henkilön virheellisestä...
  • Page 25 Information“-liitteestä. Sarjan Turbo-V2000HT pumput eivät vaadi lainkaan huoltoa. Sarjan V2000HT turbomolekyylipumppuja tulee käyttää Minkä tahansa toimenpiteen täytyy suorittaa siihen valtuutettu ainoastaan niihin sopivien varian valvojien kanssa (sarja 969- henkilö. 9462, 969-9562) niiden täytyy olla yhdistettyinä pääpumppuun (katso kaaviota osasta "Technical Information").

  • Page 26: Pdhgies Crhsews

    Varian, prin apÒ th crhsimopo∂hsh thj suskeuÿj. aer∂ou, mhn agg∂zete me gumn£ c◊ria ta tmÿmata pou prÒkeitai na H Varian den f◊rei kam∂a euqÚnh Òson afor£ thn olikÿ ÿ merikÿ ekteqoÚn sto kenÒ. Na crhsimopoie∂te p£nta g£ntia ÿ £llh aq◊thsh twn odhgièn, thn akat£llhlh crÿsh ek m◊rouj kat£llhlh prostas∂a.
  • Page 27 Se per∂ptwsh bl£bhj mpore∂te na apeuqunqe∂te sto s◊rbij fl£ntza eisÒdou me m∂a staqerÿ kÒntrofl£ntza ikanÿ na na episkeuèn Varian ÿ sto “Varian advanced exchange service”, antistaqe∂ se ◊na zeÚgoj 30000 Nm gÚrw apÒ ton £xon£ thj. pou saj d∂nei th dunatÒthta na antikatastÿsete thn Η...

  • Page 28: Instructions For Use

    Varian before operating the equipment. hands to handle components which will be exposed to vacuum. Varian will not be held responsible for any events occurring due Always use gloves or other appropriate protection. to non-compliance, even partial, with these instructions, im-...
  • Page 29 See the appendix "Technical In- by authorized personnel. formation" for detailed information.The Turbo - V 2000HT se- ries pumps must only be used with one of the special Varian ! ! ! ! controllers (series 969-9462, 969-9562) and must be con- WARNING! nected to a primary pump (see "Technical Information").

  • Page 30: Technical Information

    TECHNICAL INFORMATION The Turbo-V2000HT pump consists of a high fre- DESCRIPTION OF THE TURBOPUMP quency motor driving a turbine fitted with 8 bladed The Turbo-V2000HT pump is available in two ver- stages and 4 Macrotorr stages. The turbine rotates sions which differ only in their inlet flange. in an anticlockwise direction when viewed from the They are: high vacuum flange end.

  • Page 31: Technical Specification

    TECHNICAL INFORMATION TECHNICAL SPECIFICATION The following figure shows the Turbo-V2000HT pump outline drawing. Dimensions are in inches [mm]. Pumping speed : 1950 l/s Coolant water minimum flow: 200 l/h (0.89 GPM) He: 2000 l/s temperature: + 10° C to + 20° C : 1500 l/s pressure: 3 to 5 bar (45 to 75 Psi) Compression ratio...
  • Page 32 TECHNICAL INFORMATION Graph of nitrogen pumping speed vs inlet pressure Graph of compression ratio vs foreline pressure Graph of nitrogen throughput vs inlet pressure using the recommended mechanical forevacuum pump 87-900-969-01...

  • Page 33: Inlet Screen Installation

    TECHNICAL INFORMATION INLET SCREEN INSTALLATION WATER COOLING KIT INSTALLATION Two types of water cooling kits are available to be mounted when the pump is used under heavy load conditions or when air cooling is insufficient. The two model part numbers are: 969-9338 (metal- lic model), and 969-9348 (plastic model).
  • Page 34 TECHNICAL INFORMATION Two 6 mm (1/4") internal diameter rubber or plastic hoses from the water supply must be fitted to the two nozzles. NOTE These hoses must be held on the respective noz- zles using hose clips to avoid that the tube(s) gets loose or disconnected during operation.

  • Page 35: Vent Device Installation

    TECHNICAL INFORMATION VENT DEVICE INSTALLATION VENT VALVE INSTALLATION The vent valve mod. 969-9843 allows to avoid un- desired venting of the pump during a temporary power failure (5 sec maximum), and enables an The vent device mod. 969-9831 allows to avoid automatic vent operation.

  • Page 36: Gas Purge Valve Installation

    ! ! ! ! CAUTION To prevent bearing damage, Varian suggests the following purge gas flow rates: 10 sccm (0.17 mbar l/s) for a mild purge process, or 20 sccm (0.34 mbar l/s) for an heavy process. Please contact Varian for specific applications.

  • Page 37: Typical Layout Diagram

    TECHNICAL INFORMATION The recommended procedure to vent the system TYPICAL LAYOUT DIAGRAM and the pump avoiding the contact between the pump bearings and the corrosive gas is described in the following points: Close the corrosive gas flow into the system. Leaving the Turbo-V pump and the backing pump running and the purge gas flowing, wait for enough time to evacuate the corrosive gas...

  • Page 38: Connection B - Fore-Vacuum Pump

    TECHNICAL INFORMATION For ConFlat flange connections we recommend Connection C - ELECTRICAL using Varian hardware. Other hardware can be used if it satisfies to this specifications: − stainless steel screws − minimum strength point of 500 N/mm − length: 63.5 mm (2.5 inches).

  • Page 39: Moving The Gas Purge Valve And Forevacuum Pump Connections

    Dual stage rotary vane pump DS 949-9335 602 with single phase motor Dual stage rotary vane pump DS 949-9336 602 with 3 phase motor For a complete overview of Varian's extensive product lines, please refer to the Varian catalog. 87-900-969-01...
  • Page 40 NOTE: If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed, the customer will be held responsible for all costs incurred to ensure the safe handling of the product, and is liable for any harm or injury to Varian employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product.
  • Page 41 Request for Return FAILURE REPORT TURBO PUMPS and TURBOCONTROLLERS POSITION PARAMETERS Power: Rotational Speed: Does not start Noise Vertical Current: Inlet Pressure: Does not spin freely Vibrations Horizontal Temp 1: Foreline Pressure: Does not reach full speed Leak Upside-down Mechanical Contact Overtemperature Other: Temp 2:...
  • Page 42 Tel: (39) 011 997 9111 Tel: (39) 011 997 9111 Fax: (39) 011 997 9350 Brazil Fax: (39) 011 997 9350 Varian Industria e Comercio Ltda. Japan Avenida Dr. Cardoso de Mello 1644 Internet Users: Varian Vacuum Technologies Vila Olimpia Customer Service &...

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