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Operation Examples (Position measurement)
3-2 Position measurement
An example of the operation for measuring the deviation (from an absolute position) of a positioning mark
is shown below.
Positioning mark
3
(1) Operation on the MAIN OPS MENU (after initialize all condetions)
MAIN OPS MENU
1. Move the cursor to SET-SCRN item and press the SET key.
- The [SYSTEM SETUP] menu will be displayed.
(2) Operation on the [SYSTEM SETUP] menu
1
1. Move the cursor to 2 OBJECT TYPE COND (conditions of object type) and press the SET
key.
- [OBJECT TYPE COND] menu will be displayed.
Continued on the following page
(TYPE00)
MEAS.
ms
MEAS0 CAM1 NO
X0~6
Y0~7
:
:
MSR-CHNG REG-CHNG PC-MONTR SET-SCRN MANL-TYP-CHG
[SYSTEM SETUP]
1OPS MENU SETTING (TO NEXT SUB-MENU)
2OBJECT TYPE COND (TO NEXT SUB-MENU)
3I/O CONDITIONS
(TO NEXT SUB-MENU)
4ADJ. CAM POSITION (TO NEXT SUB-MENU)
5DISPLAY MODE
JAPANESE ENGLISH
6RECEIVING PARMS
EXEC
7INIT ALL PARMS
EXEC
8SELF DIAGNOSTICS EXEC
9SAVE IN FLASH MEM EXEC
0OPERATIONS
F L C1ALLC2NO
VX.X
BUSY
:
1
F C1 H
3-8
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