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6
Connecting to External Instruments
（1）
（2）
Signal Name
B-A filament inhibit input
B-A degas ON/OFF input
Crystal gauge ATM set input
Crystal gauge zero set input
Remote I/O Connector Pin Layout and Function
Table 4 D-Sub Connector Pin Layout
Pin No.
Function
1
DC Input (22 to 26 VDC)
2
DC Input common (Note 1)
3
Control signal Vcc IN (24V DC)
4
Control signal Vcc common
5
Filament ON/OFF input
6
Degas ON/OFF input
7
Crystal gauge ATM input
8
Crystal gauge zero input
9
Not in use (NC)
10
Not in use (NC)
11
Analog output
12
Analog GND
13
Not in use (NC)
14
Not in use (NC)
15
Not in use (NC)
Note 1: Connected to the controller case or the chamber by the gauge head.
Note 2: Control signal power supplies
The control signal Vcc IN can be connected in parallel to the controller power supply.
However, if the control signal voltage differs from the controller drive voltage, or if the
control signal power supplies are to be insulated from the controller drive power supply, or
if the effects of noise are to be considered, connect the control signal Vcc IN to a separate
power supply.
Remote Control Input
①
Function
Table 5 Remote Control Input Functions
Pin No.
Prohibits the filament switching ON. (The filament can be forcible switched
5
OFF.)
Switches the B-A gauge degas ON/OFF. However, this function is only
6
enabled when the B-A filament is ON.
Adjusts the crystal gauge ATM. Pay attention that this is set to the pressure
7
value adjusted by VR for ATM adjustment.
Sets the crystal gauge zero point.
* Sets the zero point by switching OFF → ON → OFF (switching ON for
8
0.5 to 1 second). (This is the same operation as switching the zero point set
switch.)
②
Input Electrical Specifications
Input type: Contact input
Current: Approx. 6 mA (when Ext Vcc = 24 V)
Control signal power supply input (Note 2)
See Section 6 (2) for the control method.
See Section 6 (3) for details
Function
6
FT651-059
Remarks
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