Part Names And Functions - Canon ANELVA M-332MX Operation Manual

A-net crystalion gauge
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3

Part Names and Functions

No.
LED
LED Operation
Green flashing
OFF
Red illuminated
Red flashing 1
Crystal
Red flashing 2
OFF
Green illuminated
Green flashing
B-A
Red illuminated
Red flashing
6
Table 2 Part Names and Functions
Name
D-Sub 15P connector
D-Sub 15-pin connector used for power supply and input-output signals
Crystal LED
Indicates the operating status of the crystal gauge
B-A LED
Indicates the operating status of the B-A gauge
ATM
Trimmer volume control used for adjusting atmospheric pressure (ATM)
Push switch used for adjusting the pressure zero point setting (zero
Zero
adjustment)
Controller
Electronics unit
MX-1
Gauge head
The crystal LED and B-A LED operate as follows.
Table 3 LED Operation
Content
Operating normally
Not operating
Controller internal hardware error
Note 1
Crystal unit gauge head error
Zero adjustment or ATM
adjustment error (the error is
Note 2
output continuously until
corrected)
Filament OFF
Filament ON
Filament and Degas ON
Emission current error
(The emission current has drifted
± 50% from the standard emission
current)
Filament protection due to over
range
2
3
1
Function
No power input, circuit failure
Circuit failure
Gauge head not connected, gauge head failure
Error when adjusting zero:
Zero adjusted at a pressure of 10
gauge head contamination
Error when adjusting ATM:
Adjustment is outside of the ATM adjustment range, or
gauge head contamination
Filament has blown-out
The pressure has exceeded the measurement range
4
FT651-059
4
5
Cause of Error
-2
Pa or above, or

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