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Installation at delivery, maintenance and/or relocation must be carried out under the
supervision of Hitachi-approved specialists.
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The customer is responsible for proper ventilation of the room when using chemicals.
Inadequate ventilation could cause a health hazard.
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Maintenance up to 4.4 in section 4 must be entrusted to the service engineers (of Hitachi
Instrument Service). The user should not carry out these procedures.
•
Do not carry out modification of the instrument, parts replacement, use non-specified
parts, nor detach safety mechanisms since this could be hazardous.
Locations of Warning Labels on the equipment are illustrated on the next pages.
Maintenance of Warning Labels
Contact your nearest Hitachi High-Technologies Corporation service representative for
maintenance of deteriorated or damaged warning labels.
Locations of Warning Labels on the equipment are illustrated on the next pages.
SEMI S2 modification including ANSI style labels is provided as option. Refer to fig S-1
and S-2 for standard version and S-3 and S-4 for ANSI style labels.
SAFETY SUMMARY(cont'd)
SAFETY - 2
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