Operation; Measuring Setups - HP 10722A Instruction Manual

Model 10722A
Instruction Manual
OPERATION
With the Plane Mirror Converter and a n additional retroreflector, the Linear Interferometer can be
converted to a Plane Mirror Interferometer*. The Plane Mirror Interferometer extends the Laser
Measurement System's capability to make axial displacement measurements of a plane mirror
reflector. A Plane Mirror Interferometer is illustrated in Figure 4.
Figure 4. Plane Mirror Interferometer
Because the two reflections inherent in the Plane Mirror Interferometer, there is optical resolution
doubling.
Measuring Setups
The 5501A Laser Transducer System can perform either single axis or dual axis plane mirror mea-
surements. The dual axis option is particularly useful for
X-Y
stage applications. The requirements
for single axis measurements are: Laser Head, Plane Mirror Interferometer, and a plane mirror reflec-
tor. The dual axis requirements are: Laser Head, Beam Splitter, two Plane Mirror Interferometers,
and two plane mirror reflectors. Typical measuring setups for single
axis
and dual axis measurements
are shown in Figure 5 and 6.
*The Linear Interferometer includes one retroreflector.
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