1. Start up
•
Move area of interest to the crosshairs on the phosphor screen and focus.
•
Adjust the z-height until the sample and correct objective astigmatism using the stigmators on the left
sub panel.
•
Insert the X-ray detector.
•
Insert condenser aperture (2nd aperture) and minimize the swinging beam using the condenser X/Y
adjustment screws when passing through crossover.
•
Remove the any objective aperture and turn off the column pressure gauge filament by pressing the
"FILAMENT" switch.
2. Beam alignments in STEM mode (Magnification: 100K ~ 200K)
•
Depress the [STEM] (left main panel).
•
Insert the "D-STEM DET" on left side of column.
•
Depress the [IMAGE SHIFT], centering the black circle on CRT monitor using image shift.
•
Adjust the FOCUS, CONTRAST, and STIGMA.
3. The element mapping
•
Make sure to turn off the column pressure gauge and insert condenser aperture (2nd aperture).
•
Turn on the power switch of the EDS workstation.
-Screen-
•
Click "Spectral Display" icon.
HITACHI
HF2000 TEM
Operation Manual
- STEM imaging and element mapping -
19