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ACCRETECH UF200R User Manual

Fully automatic prober

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Contents
Table of Contents
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Table of Contents

Table of Contents
Operation Points and Startup
Appearance
EMO and POWER Switches
Display/Touch Panel Unit
Head Stage
Storage Media
Internal Printer (Optional)
Loader Unit
Prober Startup
Lot Processing
Screen Display and Operations Prior to Starting Lot Processing
Switching the Display with the <Screen Change >Button
Switching the Display with the <Screen Change> Button
Operation Settings
Device Data Switching
Saving/Deleting Device Data
Probe Card Replacement
Wafer Alignment
Manual Registartion of Models
Manual Registration of Models
Manual Alignment
Automatic Probe-Pad Alignment
Setting Control Parameters
Registering Pads
Tips on the Pad Registration
Pad Alignment
Confirming the Pad Alignment Results
Contact Height Determination
Execution of the Automatic Contact Height Determination
Checking/Correcting Probe Mark Position
Wafer Mapping & die Sampling
Operation Flow Chart
Test die Area Setting
Setting the Test die Area
Reference die Setting
Target Sensing
Difference between TEG and Corner Targets
Setting the Reference die
Die Attribute Setting
Sampling Dice Setting
Performing Data-In for Sample Dice
Operations after Start of Probing
Device Parameter Modifications During Lot Processing
Overdrive Amount Modification
Confirmation and Correction of Probe Mark Position
Probe Mark Display
Sequence-Back
Multi-Pass Probing
Tips for Multi-Pass Probing
Operation Setting for Multi-Pass Probing
Operation Settings for Multi-Pass Probing
Utility Functions
Wafer Handling
Ttlmanual Test
TTL Manual Test
GP-IB Communication Data Display
Map Data Utility
Date & Time Setting
Internal Printer Status Display/Switching
Cleaning Utility
Task Version
Test Count Display
Reject Counter Reset
Data Reference
Marker Counter Reset
Parameter Mask Utility
Make User File
System Reset

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USER'S MANUAL

- OPERATION -

Before operation, be sure to read this manual and obtain

full knowledge about this device through training.

Keep this manual safely in a specified place.

WARNING

TOKYO SEIMITSU CO., LTD.

Document No.

: FT32000-R001-E0

Date Issued

: 2010-05-26

FULLY AUTOMATIC

PROBER

UF200R

UF190R

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ACCRETECH UF200R User Manual

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